JPS59171339U - Infrared heat treatment equipment - Google Patents
Infrared heat treatment equipmentInfo
- Publication number
- JPS59171339U JPS59171339U JP6535483U JP6535483U JPS59171339U JP S59171339 U JPS59171339 U JP S59171339U JP 6535483 U JP6535483 U JP 6535483U JP 6535483 U JP6535483 U JP 6535483U JP S59171339 U JPS59171339 U JP S59171339U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- infrared heat
- heating means
- treatment equipment
- infrared
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の赤外線熱処理装置を示す構成図、第２図
は本考案の一実施例である赤外線熱処理装置を示す構成
図、第３図は第２図のＡ−Ａ’部部面面図ある。
図中、１１・・・・・・赤外線熱処理装置、１２・・・
・・・反応管、１３・・・・・・モータ、１４・・・・
・・基板ホルダー、１５・・・・・・半導体基板、１６
・・・・・・赤外線ランプ、１７・・・・・・楕円形反
射ミラー。Fig. 1 is a block diagram showing a conventional infrared heat treatment apparatus, Fig. 2 is a block diagram showing an infrared heat treatment apparatus which is an embodiment of the present invention, and Fig. 3 is a partial view taken along the line AA' in Fig. 2. There is a diagram. In the figure, 11... Infrared heat treatment device, 12...
...Reaction tube, 13...Motor, 14...
...Substrate holder, 15...Semiconductor substrate, 16
...Infrared lamp, 17...Oval reflecting mirror.
Claims (1)
加熱する第１の加熱手段と、試料周辺部を加熱する第２
の加熱手段とを備えたことを特徴とする赤外線熱処理装
置。 （２）上記第２の加熱手段は楕円形反射ミラーと上記赤
外線ランプとで構成され、該試料周辺近傍の全部若しく
は一部をランプ焦点線近傍に暴し該周辺部を加熱するこ
とを特徴とする実用新案登録請求の範囲第１項記載の赤
外線熱処理装置。[Claims for Utility Model Registration] (1) A first heating means that uses an infrared lamp as a heat source to heat the main surface of the rotating sample, and a second heating means that heats the peripheral area of the sample.
An infrared heat treatment apparatus characterized by comprising: heating means. (2) The second heating means is composed of an elliptical reflecting mirror and the infrared lamp, and is characterized in that it exposes all or part of the vicinity of the sample to the vicinity of the lamp focal line and heats the peripheral area. An infrared heat treatment apparatus according to claim 1 of the utility model registration claim.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6535483U JPS59171339U (en) | 1983-04-30 | 1983-04-30 | Infrared heat treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6535483U JPS59171339U (en) | 1983-04-30 | 1983-04-30 | Infrared heat treatment equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59171339U true JPS59171339U (en) | 1984-11-16 |
Family
ID=30195552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6535483U Pending JPS59171339U (en) | 1983-04-30 | 1983-04-30 | Infrared heat treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59171339U (en) |
-
1983
- 1983-04-30 JP JP6535483U patent/JPS59171339U/en active Pending
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