JPS5920985U - Laser processing equipment - Google Patents
Laser processing equipmentInfo
- Publication number
- JPS5920985U JPS5920985U JP1982115001U JP11500182U JPS5920985U JP S5920985 U JPS5920985 U JP S5920985U JP 1982115001 U JP1982115001 U JP 1982115001U JP 11500182 U JP11500182 U JP 11500182U JP S5920985 U JPS5920985 U JP S5920985U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- optical system
- laser processing
- processing equipment
- generator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図及び第２図は従来のレーザ加工装置を示す。第３
図及び第４図は、本考案によるレーザ加工装置の実施例
を示す。
１・・・・・・レーザ光線発生装置、２・・・・・・レ
ンズ、３・・・・・・被加工物、４・・・・・・ＸＹテ
ーブル、５・・・・・・グイクロイックミラー、６・・
・・・・５ＨＣ４［，７，３゜９、１０・・・・・・ミ
ラー。
９、 、 Ｖ””；ｔｌ 、ａ
Ｘ Ｎ 會 ノ ｊ ）
／□
？ ↑Ｎ″７゜
’： ｍ ・） ／
□1 and 2 show a conventional laser processing apparatus. Third
The figures and FIG. 4 show an embodiment of the laser processing apparatus according to the present invention. 1...Laser beam generator, 2...Lens, 3...Workpiece, 4...XY table, 5...Group Ichroic mirror, 6...
...5HC4[,7,3゜9,10...Mirror. 9, , V””; tl , a X N meeting no j)
／□? ↑N″7゜’: m ・) /
□
Claims (1)
長を二逓倍する第二高調波発生装置と、この装置を通過
したレーザ光線を集光する光学系と、この光学系の焦点
位置に支持される被加工物を集光光学系の光軸に対して
相対的に、かつ直角に駆動する装置と、前記レーザ光線
発生装置からのレーザ光線を第二高調波発生装置から迂
回させ前記集光光学系へ導入させるような光路をもち、
レーザ光線の光軸に対して相対的に移動できる可動型バ
イパス光学系とを具備することを特徴とするレーザ加工
装置。A laser beam generator, a second harmonic generator that doubles the wavelength of the laser beam from this device, an optical system that focuses the laser beam that has passed through this device, and a device that is supported at the focal point of this optical system. a device for driving a workpiece relative to and perpendicular to the optical axis of a condensing optical system; and a device for detouring a laser beam from the laser beam generator from the second harmonic generating device, It has an optical path that allows it to be introduced into the system,
A laser processing device comprising a movable bypass optical system that can move relative to the optical axis of a laser beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982115001U JPS5920985U (en) | 1982-07-29 | 1982-07-29 | Laser processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982115001U JPS5920985U (en) | 1982-07-29 | 1982-07-29 | Laser processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5920985U true JPS5920985U (en) | 1984-02-08 |
| JPS6235597Y2 JPS6235597Y2 (en) | 1987-09-10 |
Family
ID=30265619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982115001U Granted JPS5920985U (en) | 1982-07-29 | 1982-07-29 | Laser processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5920985U (en) |
-
1982
- 1982-07-29 JP JP1982115001U patent/JPS5920985U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6235597Y2 (en) | 1987-09-10 |
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