JPS59168295A - タ−ボ分子ポンプ - Google Patents

タ−ボ分子ポンプ

Info

Publication number
JPS59168295A
JPS59168295A JP58042143A JP4214383A JPS59168295A JP S59168295 A JPS59168295 A JP S59168295A JP 58042143 A JP58042143 A JP 58042143A JP 4214383 A JP4214383 A JP 4214383A JP S59168295 A JPS59168295 A JP S59168295A
Authority
JP
Japan
Prior art keywords
rotor
rotating body
turbo
molecular pump
cylindrical member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58042143A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0313436B2 (enExample
Inventor
Shinjiro Ueda
上田　新次郎
Osami Matsushita
修己 松下
Naoyuki Tamura
直行 田村
Yoshiteru Miyatake
宮竹　義照
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58042143A priority Critical patent/JPS59168295A/ja
Priority to DE8484101198T priority patent/DE3469311D1/de
Priority to EP84101198A priority patent/EP0121673B1/en
Publication of JPS59168295A publication Critical patent/JPS59168295A/ja
Priority to US07/042,627 priority patent/US4768921A/en
Publication of JPH0313436B2 publication Critical patent/JPH0313436B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP58042143A 1983-03-16 1983-03-16 タ−ボ分子ポンプ Granted JPS59168295A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP58042143A JPS59168295A (ja) 1983-03-16 1983-03-16 タ−ボ分子ポンプ
DE8484101198T DE3469311D1 (en) 1983-03-16 1984-02-06 Turbomolecular vacuum pump
EP84101198A EP0121673B1 (en) 1983-03-16 1984-02-06 Turbomolecular vacuum pump
US07/042,627 US4768921A (en) 1983-03-16 1987-04-23 Turbomolecular vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58042143A JPS59168295A (ja) 1983-03-16 1983-03-16 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS59168295A true JPS59168295A (ja) 1984-09-21
JPH0313436B2 JPH0313436B2 (enExample) 1991-02-22

Family

ID=12627715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58042143A Granted JPS59168295A (ja) 1983-03-16 1983-03-16 タ−ボ分子ポンプ

Country Status (4)

Country Link
US (1) US4768921A (enExample)
EP (1) EP0121673B1 (enExample)
JP (1) JPS59168295A (enExample)
DE (1) DE3469311D1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005069066A (ja) * 2003-08-21 2005-03-17 Ebara Corp ターボ真空ポンプおよび該ターボ真空ポンプを備えた半導体製造装置

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3818556A1 (de) * 1988-06-01 1989-12-07 Pfeiffer Vakuumtechnik Magnetlager fuer eine schnell rotierende vakuumpumpe
IT1250804B (it) * 1991-07-10 1995-04-21 Varian Spa Stadio di pompaggio per pompa turbomolecolare
DE19846189A1 (de) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe
JP2000183037A (ja) * 1998-12-11 2000-06-30 Tokyo Electron Ltd 真空処理装置
US6450772B1 (en) * 1999-10-18 2002-09-17 Sarcos, Lc Compact molecular drag vacuum pump
US6727616B1 (en) * 2000-11-08 2004-04-27 Christopher W. Gabrys Flywheel energy storage system with quill stabilizer
US7679245B2 (en) * 2001-09-17 2010-03-16 Beacon Power Corporation Repulsive lift systems, flywheel energy storage systems utilizing such systems and methods related thereto
US8632302B2 (en) * 2009-12-07 2014-01-21 Dresser-Rand Company Compressor performance adjustment system
DE102013206526A1 (de) * 2013-04-12 2014-10-16 Oerlikon Leybold Vacuum Gmbh Verfahren zur Reinigung einer Vakuumpumpe

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5812478A (ja) * 1981-07-15 1983-01-24 Hitachi Ltd 固体撮像装置の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1475765A (fr) * 1966-01-31 1967-04-07 Snecma Perfectionnements aux appareils à arbre vertical tournant à grande vitesse
DE2123654B2 (de) * 1971-05-13 1973-11-22 Maschinenfabrik Augsburg-Nuernberg Ag, 8000 Muenchen Dampfungsvorrichtung fur einen schnell umlaufenden Rotationskörper
DE2349033C3 (de) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
DE2554995A1 (de) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik Turbomolekularpumpe
US4140441A (en) * 1977-04-11 1979-02-20 Patterson Williams G Turbomolecular pump lubrication system
US4196946A (en) * 1978-05-25 1980-04-08 Westinghouse Electric Corp. Temperature compensated magnetic bearing system for a watthour meter
DE2825551C3 (de) * 1978-06-10 1982-06-09 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetische Lagerung
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
DE3239328C2 (de) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung
JPH0646036B2 (ja) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 軸流分子ポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5812478A (ja) * 1981-07-15 1983-01-24 Hitachi Ltd 固体撮像装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005069066A (ja) * 2003-08-21 2005-03-17 Ebara Corp ターボ真空ポンプおよび該ターボ真空ポンプを備えた半導体製造装置

Also Published As

Publication number Publication date
DE3469311D1 (en) 1988-03-17
EP0121673B1 (en) 1988-02-10
EP0121673A1 (en) 1984-10-17
US4768921A (en) 1988-09-06
JPH0313436B2 (enExample) 1991-02-22

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