JPS59159582A - 無声放電ガスレ−ザ電極破壊検出装置 - Google Patents

無声放電ガスレ−ザ電極破壊検出装置

Info

Publication number
JPS59159582A
JPS59159582A JP3413883A JP3413883A JPS59159582A JP S59159582 A JPS59159582 A JP S59159582A JP 3413883 A JP3413883 A JP 3413883A JP 3413883 A JP3413883 A JP 3413883A JP S59159582 A JPS59159582 A JP S59159582A
Authority
JP
Japan
Prior art keywords
electrode
silent discharge
discharge gas
gas laser
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3413883A
Other languages
English (en)
Japanese (ja)
Other versions
JPH021385B2 (en, 2012
Inventor
Yoshihide Kanehara
好秀 金原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3413883A priority Critical patent/JPS59159582A/ja
Publication of JPS59159582A publication Critical patent/JPS59159582A/ja
Publication of JPH021385B2 publication Critical patent/JPH021385B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP3413883A 1983-03-02 1983-03-02 無声放電ガスレ−ザ電極破壊検出装置 Granted JPS59159582A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3413883A JPS59159582A (ja) 1983-03-02 1983-03-02 無声放電ガスレ−ザ電極破壊検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3413883A JPS59159582A (ja) 1983-03-02 1983-03-02 無声放電ガスレ−ザ電極破壊検出装置

Publications (2)

Publication Number Publication Date
JPS59159582A true JPS59159582A (ja) 1984-09-10
JPH021385B2 JPH021385B2 (en, 2012) 1990-01-11

Family

ID=12405853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3413883A Granted JPS59159582A (ja) 1983-03-02 1983-03-02 無声放電ガスレ−ザ電極破壊検出装置

Country Status (1)

Country Link
JP (1) JPS59159582A (en, 2012)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61170087A (ja) * 1985-01-23 1986-07-31 Mitsubishi Electric Corp 無声放電式ガスレ−ザ装置
WO1988002939A1 (en) * 1986-10-14 1988-04-21 Fanuc Ltd Laser device
JP2003031878A (ja) * 2001-07-18 2003-01-31 Amada Eng Center Co Ltd ガスレーザ発振器における電極外放電検出方法および電極外放電検出手段を備えたガスレーザ発振器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61170087A (ja) * 1985-01-23 1986-07-31 Mitsubishi Electric Corp 無声放電式ガスレ−ザ装置
WO1988002939A1 (en) * 1986-10-14 1988-04-21 Fanuc Ltd Laser device
JP2003031878A (ja) * 2001-07-18 2003-01-31 Amada Eng Center Co Ltd ガスレーザ発振器における電極外放電検出方法および電極外放電検出手段を備えたガスレーザ発振器

Also Published As

Publication number Publication date
JPH021385B2 (en, 2012) 1990-01-11

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