JPS59152246A - Bonding of quartz glass to metal - Google Patents

Bonding of quartz glass to metal

Info

Publication number
JPS59152246A
JPS59152246A JP2713483A JP2713483A JPS59152246A JP S59152246 A JPS59152246 A JP S59152246A JP 2713483 A JP2713483 A JP 2713483A JP 2713483 A JP2713483 A JP 2713483A JP S59152246 A JPS59152246 A JP S59152246A
Authority
JP
Japan
Prior art keywords
alloy
quartz glass
metal
glass
bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2713483A
Other languages
Japanese (ja)
Inventor
Yoichi Hashimoto
陽一 橋本
Yoshiro Shimamune
島宗 義郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2713483A priority Critical patent/JPS59152246A/en
Publication of JPS59152246A publication Critical patent/JPS59152246A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Joining Of Glass To Other Materials (AREA)

Abstract

PURPOSE:To bond quartz glass to a metal in such a high strength that they are not released even in an atmosphere with change in temperature, by bonding the quartz glass through alkali borosilicate glass to an Fe-Ni alloy, bonding the metal to it. CONSTITUTION:The thin lamminar alkali borosilicate glass 2a is placed on the quartz glass 1, the Fe-Ni alloy 2b is placed on it, heated at about 800 deg.C and calcined. Consequently, since the alkali borosilicate glass 2a has good compatibility with the quartz glass 1 and the Fe-Ni alloy 2b, the alkali borosilicate glass 2a is bonded to the quartz glass 1 and the alkali borosilicate glass 2a to the Fe-Ni alloy in sufficient strength. The metal 3 is bonded to the Fe-Ni alloy 2b by soldering or brazing, so that the quartz glass 1 is bonded to the metal 1 without using an adhesive.

Description

【発明の詳細な説明】 この発明は9石英ガラス吉金属の接合方法に関するもの
である。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for joining 9 quartz glass metals.

従来1石英ガラスと金属を接合するには第1図の断面図
に示すように接着剤を用いて接合する方法がとられてい
た。図において(11は石英ガラス。
Conventionally, 1 quartz glass and metal have been bonded by using an adhesive as shown in the cross-sectional view of FIG. In the figure (11 is quartz glass.

(2)は接着剤、(3)は金属である。(2) is an adhesive, and (3) is a metal.

従来の接合方法では5石英ガラス(1)と接着剤(2)
と金属(3)との三層構造になっており0石英ガラス(
11と接着剤(2)との熱膨張係数の相違により、温度
変化のある環境では接合境界面方向に繰り返しせん断力
が働き十分な強度が得られず石英ガラス(11と金属(
3)が剥離したり、あるいは接着剤(2)の劣化により
剥離したり、又高温環境では接着剤から有害ガスが発生
するなどの欠点があった。
In the conventional bonding method, 5 quartz glass (1) and adhesive (2) are used.
It has a three-layer structure of 0 quartz glass (3) and metal (3).
Due to the difference in thermal expansion coefficient between 11 and the adhesive (2), in an environment with temperature changes, repeated shear force acts in the direction of the bonding interface, making it difficult to obtain sufficient strength.
3) may peel off, or may peel off due to deterioration of the adhesive (2), and harmful gases may be generated from the adhesive in high-temperature environments.

この発明は上記のような従来のものの欠点を除去するた
めになされたもので0石英ガラスにホウケイ酸アルカリ
ガラスを介在させてFe−Ni系合金を付着し加熱焼成
して接合し1石英ガラスに接合した上記FB−N1系合
金と金属をハンダ付は又はろう付けにより接合するよう
にすることにより。
This invention was made in order to eliminate the drawbacks of the conventional products as described above, and it is made by interposing borosilicate alkali glass on 0 quartz glass, adhering Fe-Ni alloy to it, and bonding it by heating and baking to form 1 quartz glass. By joining the joined FB-N1 alloy and metal by soldering or brazing.

接合強度が増す石英ガラスと金属の接合方法を提供する
ことを目的としている。
The purpose of this invention is to provide a method for bonding quartz glass and metal that increases bonding strength.

以下、この発明の一実施例を図について説明する。第2
図の断面図において、(11は石英ガラス。
An embodiment of the present invention will be described below with reference to the drawings. Second
In the cross-sectional view of the figure, (11 is quartz glass.

(2a)はホウケイ酸アルカリガラス、  (2b)は
Fe −Ni系合金でこの場合はFe−43%N1合金
、  (20)は5n−40%P1)合金、(3)は金
属例えは銅である。
(2a) is borosilicate alkali glass, (2b) is a Fe-Ni alloy, in this case a Fe-43%N1 alloy, (20) is a 5n-40%P1) alloy, and (3) is a metal example of copper. be.

石英ガラスiII上に薄板のホウケイ酸アルカリガラ7
、 (2a)をのせ、その上にFe−43%N1合金(
2b)をのせこれらを約800℃にて加熱焼成する。ホ
ウケイ酸アルカリガラス(2a)は石英ガラス(11及
びF、−43%N1合金(2b)となじみがよいのでこ
の加熱処理によりホウケイ酸アルカリガラス(2a)と
石英ガラス(11,及びホウケイ酸アルカリガラス(2
a)とFe−43%N1合金(2b)は十分な強度を有
して接合される。Fe−Ni系合金と金属をつける+ 
    ! のは、ハンダやろつ付けで比較的簡単に接合できるので
しかる後、所望の金属(31とF、−43%N1合金(
2b)を5n−40%Pb合金(2C)を用いたろう接
にて接合する。この様にして接合した場合1石英ガラス
(11,ポウケイ酸アルカリガラス(2a)、及びFe
−43%Ni、合金(2b)はともに熱膨張係数が小さ
く、温度変化のある環境においても密着性がよく十分な
せん断強度を有し、接合強度が増す。
Thin plate of borosilicate alkali glass 7 on quartz glass III
, (2a), and on top of that Fe-43%N1 alloy (
2b) is placed on top and baked at about 800°C. Alkali borosilicate glass (2a) is compatible with quartz glass (11 and F, -43%N1 alloy (2b), so by this heat treatment, alkali borosilicate glass (2a) and alkali borosilicate glass (11, and alkali borosilicate glass (2
a) and Fe-43%N1 alloy (2b) are joined with sufficient strength. Attach Fe-Ni alloy and metal+
! This is because it can be relatively easily joined by soldering or brazing, so after that, the desired metal (31 and F, -43%N1 alloy (
2b) are joined by soldering using a 5n-40% Pb alloy (2C). When bonded in this way, 1 quartz glass (11, porosilicate alkali glass (2a), and Fe
-43%Ni and alloy (2b) both have small coefficients of thermal expansion, have good adhesion and sufficient shear strength even in environments with temperature changes, and increase bonding strength.

上記実施例ではFe −43%N1 合金を用いたが。In the above example, Fe-43%N1 alloy was used.

他の割合のFe−Ni系合金でもよく、さらにN1の一
部がMnにおきかわったものでもよい。又。
A Fe--Ni alloy having a different proportion may be used, and a portion of N1 may be replaced with Mn. or.

薄板のホウケイ酸アルカリガラスが、粉末状のものであ
ってもよい。さらに所望の金属(3)とFe−43%N
1合金(2b)とを接合するのに5n−40%p1゜(
2C)合金を用いてろう接を行なったが、他の合金を用
いてもよい。
The thin plate of borosilicate alkali glass may be in powder form. Furthermore, the desired metal (3) and Fe-43%N
1 alloy (2b), 5n-40%p1゜(
2C) Although the alloy was used for brazing, other alloys may be used.

以上の様に、この発明によれば石英ガラスにホウケイ酸
アルカリガラスを介在させてFe−Ni系合金を付着し
加熱焼成して接合し1石英ガラスに接合した上記Fe−
Ni系合金と金属をハンダ付は又はろう付けにより接合
する石英ガラスと金属との接合方法であるので石英ガラ
スに直接金属をつけることは困難であるが、ホウケイ酸
アルカリガラスはFB−N1系合金及び石英ガラスとな
じみがよく9石英ガラスとFe−Ni系合金は比較的熱
膨張係数が近く温度の変化に対して密着性がよいので、
上記三者は強固に接合し、又Fe  Ni系合金と金属
をつけるのはハンダ付けやろう付けで比較的簡単に接合
できるので、温度変化のある環境でも石英ガラスと金属
の安定した強い接合が得られるという効果がある。
As described above, according to the present invention, an Fe-Ni alloy is attached to quartz glass with borosilicate alkali glass interposed therebetween, and the Fe-Ni alloy is bonded by heating and baking.
Since the method of joining silica glass and metal is to join Ni-based alloy and metal by soldering or brazing, it is difficult to attach metal directly to quartz glass, but borosilicate alkali glass is a FB-N1 alloy. 9Quartz glass and Fe-Ni alloy have relatively close coefficients of thermal expansion and good adhesion against temperature changes, so
The above three materials are strongly bonded, and the Fe-Ni alloy and metal can be joined relatively easily by soldering or brazing, so even in environments with temperature changes, stable and strong bonding between quartz glass and metal can be achieved. There is an effect that can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来法による石英ガラスと金属の接合状態を示
す断面図、第2図はこの発明の一実施例(3) により接合した石英ガラスと金属の接合状態を示す断面
図である。 図において(11は石英ガラス、(2)は接着剤、  
(2a)はホウケイ酸アルカリガラス、  (2b)は
FB−Nl系合金、(3)は金属である。 なお1図中、同一符号は同−又は相描部分を示す。 代理人 葛 野 信 − (4)
FIG. 1 is a cross-sectional view showing a state in which quartz glass and metal are joined by a conventional method, and FIG. 2 is a cross-sectional view showing a state in which quartz glass and metal are joined by an embodiment (3) of the present invention. In the figure (11 is quartz glass, (2) is adhesive,
(2a) is borosilicate alkali glass, (2b) is FB-Nl alloy, and (3) is metal. Note that in FIG. 1, the same reference numerals indicate the same or similar parts. Agent Shin Kuzuno - (4)

Claims (1)

【特許請求の範囲】[Claims] 石英ガラスにホウケイ酸アルカリガラスを介在させてF
e−J系合金を付着し加熱焼成して接合し1石英ガラス
に接合した上記Fe−Ni系合金と金属をハンダ付は又
はろう付けにより接合するようにした石英ガラスと金属
の接合方法。
F with borosilicate alkali glass interposed in quartz glass
1. A method for joining quartz glass and metal, in which the Fe--Ni alloy and the metal, which are bonded to quartz glass by adhering an e-J alloy and heating and baking them, are joined by soldering or brazing.
JP2713483A 1983-02-17 1983-02-17 Bonding of quartz glass to metal Pending JPS59152246A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2713483A JPS59152246A (en) 1983-02-17 1983-02-17 Bonding of quartz glass to metal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2713483A JPS59152246A (en) 1983-02-17 1983-02-17 Bonding of quartz glass to metal

Publications (1)

Publication Number Publication Date
JPS59152246A true JPS59152246A (en) 1984-08-30

Family

ID=12212575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2713483A Pending JPS59152246A (en) 1983-02-17 1983-02-17 Bonding of quartz glass to metal

Country Status (1)

Country Link
JP (1) JPS59152246A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015020143A (en) * 2013-07-23 2015-02-02 住友電気工業株式会社 Fluid separation material and fluid separation module

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015020143A (en) * 2013-07-23 2015-02-02 住友電気工業株式会社 Fluid separation material and fluid separation module

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