JPS59147206A - 物体形状検査装置 - Google Patents

物体形状検査装置

Info

Publication number
JPS59147206A
JPS59147206A JP58022285A JP2228583A JPS59147206A JP S59147206 A JPS59147206 A JP S59147206A JP 58022285 A JP58022285 A JP 58022285A JP 2228583 A JP2228583 A JP 2228583A JP S59147206 A JPS59147206 A JP S59147206A
Authority
JP
Japan
Prior art keywords
object shape
light beam
light
data
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58022285A
Other languages
English (en)
Japanese (ja)
Other versions
JPH023447B2 (cg-RX-API-DMAC10.html
Inventor
Masahito Nakajima
雅人 中島
Hiroyuki Tsukahara
博之 塚原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58022285A priority Critical patent/JPS59147206A/ja
Publication of JPS59147206A publication Critical patent/JPS59147206A/ja
Publication of JPH023447B2 publication Critical patent/JPH023447B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • H10W72/0711—
    • H10W72/075—
    • H10W72/07531—
    • H10W72/5363—
    • H10W72/5449—
    • H10W90/754—

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP58022285A 1983-02-14 1983-02-14 物体形状検査装置 Granted JPS59147206A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58022285A JPS59147206A (ja) 1983-02-14 1983-02-14 物体形状検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58022285A JPS59147206A (ja) 1983-02-14 1983-02-14 物体形状検査装置

Publications (2)

Publication Number Publication Date
JPS59147206A true JPS59147206A (ja) 1984-08-23
JPH023447B2 JPH023447B2 (cg-RX-API-DMAC10.html) 1990-01-23

Family

ID=12078472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58022285A Granted JPS59147206A (ja) 1983-02-14 1983-02-14 物体形状検査装置

Country Status (1)

Country Link
JP (1) JPS59147206A (cg-RX-API-DMAC10.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6093424A (ja) * 1983-10-28 1985-05-25 Kawasaki Heavy Ind Ltd 対象物体からこれと同形の物体を形成する方法及び装置
JPS60118399A (ja) * 1983-12-01 1985-06-25 Kawasaki Heavy Ind Ltd 対象物体からこれと同形の物体を形成する方法及び装置
JPH0239449A (ja) * 1988-07-28 1990-02-08 Matsushita Electric Ind Co Ltd ワイヤボンディングの検査方法
KR100424699B1 (ko) * 2002-05-01 2004-03-27 삼성테크윈 주식회사 라인 스캔 카메라의 자동 캘리브레이션 시스템

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51139355A (en) * 1975-04-05 1976-12-01 Opto Produkte Ag Method of and apparatus for optically exploring object and comparing shape with position thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51139355A (en) * 1975-04-05 1976-12-01 Opto Produkte Ag Method of and apparatus for optically exploring object and comparing shape with position thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6093424A (ja) * 1983-10-28 1985-05-25 Kawasaki Heavy Ind Ltd 対象物体からこれと同形の物体を形成する方法及び装置
JPS60118399A (ja) * 1983-12-01 1985-06-25 Kawasaki Heavy Ind Ltd 対象物体からこれと同形の物体を形成する方法及び装置
JPH0239449A (ja) * 1988-07-28 1990-02-08 Matsushita Electric Ind Co Ltd ワイヤボンディングの検査方法
KR100424699B1 (ko) * 2002-05-01 2004-03-27 삼성테크윈 주식회사 라인 스캔 카메라의 자동 캘리브레이션 시스템

Also Published As

Publication number Publication date
JPH023447B2 (cg-RX-API-DMAC10.html) 1990-01-23

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