JPS59142453A - イオンセンサ - Google Patents
イオンセンサInfo
- Publication number
- JPS59142453A JPS59142453A JP58015658A JP1565883A JPS59142453A JP S59142453 A JPS59142453 A JP S59142453A JP 58015658 A JP58015658 A JP 58015658A JP 1565883 A JP1565883 A JP 1565883A JP S59142453 A JPS59142453 A JP S59142453A
- Authority
- JP
- Japan
- Prior art keywords
- ion
- film
- sensitive
- insulating film
- gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008878 coupling Effects 0.000 claims abstract description 4
- 238000010168 coupling process Methods 0.000 claims abstract description 4
- 238000005859 coupling reaction Methods 0.000 claims abstract description 4
- 239000012528 membrane Substances 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 16
- 230000005669 field effect Effects 0.000 claims description 13
- 239000000758 substrate Substances 0.000 abstract description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 12
- 229910052710 silicon Inorganic materials 0.000 abstract description 12
- 239000010703 silicon Substances 0.000 abstract description 12
- 229910052594 sapphire Inorganic materials 0.000 abstract description 8
- 239000010980 sapphire Substances 0.000 abstract description 8
- 150000002500 ions Chemical class 0.000 description 42
- 239000010408 film Substances 0.000 description 28
- 239000010409 thin film Substances 0.000 description 7
- 239000013078 crystal Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- -1 CDS Chemical class 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Molecular Biology (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58015658A JPS59142453A (ja) | 1983-02-02 | 1983-02-02 | イオンセンサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58015658A JPS59142453A (ja) | 1983-02-02 | 1983-02-02 | イオンセンサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59142453A true JPS59142453A (ja) | 1984-08-15 |
| JPH0421815B2 JPH0421815B2 (enrdf_load_stackoverflow) | 1992-04-14 |
Family
ID=11894828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58015658A Granted JPS59142453A (ja) | 1983-02-02 | 1983-02-02 | イオンセンサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59142453A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60186749A (ja) * | 1984-03-05 | 1985-09-24 | Agency Of Ind Science & Technol | イオン選択性電界効果トランジスタ |
| JPH03127252U (enrdf_load_stackoverflow) * | 1990-04-02 | 1991-12-20 | ||
| JP2006242900A (ja) * | 2005-03-07 | 2006-09-14 | Mitsubishi Chemicals Corp | センサユニット及び反応場セルユニット並びに分析装置 |
| US8072008B2 (en) | 2005-06-14 | 2011-12-06 | Mitsumi Electric Co., Ltd. | Biosensor having ultra fine fiber |
-
1983
- 1983-02-02 JP JP58015658A patent/JPS59142453A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60186749A (ja) * | 1984-03-05 | 1985-09-24 | Agency Of Ind Science & Technol | イオン選択性電界効果トランジスタ |
| JPH03127252U (enrdf_load_stackoverflow) * | 1990-04-02 | 1991-12-20 | ||
| JP2006242900A (ja) * | 2005-03-07 | 2006-09-14 | Mitsubishi Chemicals Corp | センサユニット及び反応場セルユニット並びに分析装置 |
| US8072008B2 (en) | 2005-06-14 | 2011-12-06 | Mitsumi Electric Co., Ltd. | Biosensor having ultra fine fiber |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0421815B2 (enrdf_load_stackoverflow) | 1992-04-14 |
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