JPS59138345A - プロ−ブカ−ド - Google Patents

プロ−ブカ−ド

Info

Publication number
JPS59138345A
JPS59138345A JP58011997A JP1199783A JPS59138345A JP S59138345 A JPS59138345 A JP S59138345A JP 58011997 A JP58011997 A JP 58011997A JP 1199783 A JP1199783 A JP 1199783A JP S59138345 A JPS59138345 A JP S59138345A
Authority
JP
Japan
Prior art keywords
ring
intermediate member
probe
substrate
probing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58011997A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6331934B2 (enExample
Inventor
Katsumi Tanimoto
谷本　勝美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP58011997A priority Critical patent/JPS59138345A/ja
Publication of JPS59138345A publication Critical patent/JPS59138345A/ja
Publication of JPS6331934B2 publication Critical patent/JPS6331934B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP58011997A 1983-01-27 1983-01-27 プロ−ブカ−ド Granted JPS59138345A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58011997A JPS59138345A (ja) 1983-01-27 1983-01-27 プロ−ブカ−ド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58011997A JPS59138345A (ja) 1983-01-27 1983-01-27 プロ−ブカ−ド

Publications (2)

Publication Number Publication Date
JPS59138345A true JPS59138345A (ja) 1984-08-08
JPS6331934B2 JPS6331934B2 (enExample) 1988-06-27

Family

ID=11793221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58011997A Granted JPS59138345A (ja) 1983-01-27 1983-01-27 プロ−ブカ−ド

Country Status (1)

Country Link
JP (1) JPS59138345A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224363U (enExample) * 1985-07-26 1987-02-14
US5166605A (en) * 1991-08-02 1992-11-24 General Electric Company Controlled impedance test fixture for planar electronic device
US5315237A (en) * 1990-08-06 1994-05-24 Tokyo Electron Limited Touch sensor unit of prober for testing electric circuit and electric circuit testing apparatus using the touch sensor unit
JP2007155735A (ja) * 2005-12-05 2007-06-21 Feinmetall Gmbh 被験電気部品を検査するための電気的接触装置および電気的検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54173673U (enExample) * 1978-05-29 1979-12-07
JPS5793543A (en) * 1980-12-03 1982-06-10 Nec Corp Measuring system for semiconductor element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54173673U (enExample) * 1978-05-29 1979-12-07
JPS5793543A (en) * 1980-12-03 1982-06-10 Nec Corp Measuring system for semiconductor element

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224363U (enExample) * 1985-07-26 1987-02-14
US5315237A (en) * 1990-08-06 1994-05-24 Tokyo Electron Limited Touch sensor unit of prober for testing electric circuit and electric circuit testing apparatus using the touch sensor unit
US5166605A (en) * 1991-08-02 1992-11-24 General Electric Company Controlled impedance test fixture for planar electronic device
JP2007155735A (ja) * 2005-12-05 2007-06-21 Feinmetall Gmbh 被験電気部品を検査するための電気的接触装置および電気的検査装置

Also Published As

Publication number Publication date
JPS6331934B2 (enExample) 1988-06-27

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