JPS59123146A - 磁界シ−ルド対物レンズ - Google Patents

磁界シ−ルド対物レンズ

Info

Publication number
JPS59123146A
JPS59123146A JP57234186A JP23418682A JPS59123146A JP S59123146 A JPS59123146 A JP S59123146A JP 57234186 A JP57234186 A JP 57234186A JP 23418682 A JP23418682 A JP 23418682A JP S59123146 A JPS59123146 A JP S59123146A
Authority
JP
Japan
Prior art keywords
magnetic
lens
magnetic field
gap
pole piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57234186A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0261093B2 (enrdf_load_stackoverflow
Inventor
Katsushige Tsuno
勝重 津野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP57234186A priority Critical patent/JPS59123146A/ja
Publication of JPS59123146A publication Critical patent/JPS59123146A/ja
Publication of JPH0261093B2 publication Critical patent/JPH0261093B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57234186A 1982-12-28 1982-12-28 磁界シ−ルド対物レンズ Granted JPS59123146A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57234186A JPS59123146A (ja) 1982-12-28 1982-12-28 磁界シ−ルド対物レンズ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57234186A JPS59123146A (ja) 1982-12-28 1982-12-28 磁界シ−ルド対物レンズ

Publications (2)

Publication Number Publication Date
JPS59123146A true JPS59123146A (ja) 1984-07-16
JPH0261093B2 JPH0261093B2 (enrdf_load_stackoverflow) 1990-12-19

Family

ID=16967020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57234186A Granted JPS59123146A (ja) 1982-12-28 1982-12-28 磁界シ−ルド対物レンズ

Country Status (1)

Country Link
JP (1) JPS59123146A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0261093B2 (enrdf_load_stackoverflow) 1990-12-19

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