JPS59122540U - 差圧検出装置 - Google Patents

差圧検出装置

Info

Publication number
JPS59122540U
JPS59122540U JP1517983U JP1517983U JPS59122540U JP S59122540 U JPS59122540 U JP S59122540U JP 1517983 U JP1517983 U JP 1517983U JP 1517983 U JP1517983 U JP 1517983U JP S59122540 U JPS59122540 U JP S59122540U
Authority
JP
Japan
Prior art keywords
pressure
pedestal
recess
semiconductor element
ventilation hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1517983U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0129552Y2 (enExample
Inventor
山内　治男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP1517983U priority Critical patent/JPS59122540U/ja
Publication of JPS59122540U publication Critical patent/JPS59122540U/ja
Application granted granted Critical
Publication of JPH0129552Y2 publication Critical patent/JPH0129552Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1517983U 1983-02-04 1983-02-04 差圧検出装置 Granted JPS59122540U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1517983U JPS59122540U (ja) 1983-02-04 1983-02-04 差圧検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1517983U JPS59122540U (ja) 1983-02-04 1983-02-04 差圧検出装置

Publications (2)

Publication Number Publication Date
JPS59122540U true JPS59122540U (ja) 1984-08-17
JPH0129552Y2 JPH0129552Y2 (enExample) 1989-09-08

Family

ID=30146515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1517983U Granted JPS59122540U (ja) 1983-02-04 1983-02-04 差圧検出装置

Country Status (1)

Country Link
JP (1) JPS59122540U (enExample)

Also Published As

Publication number Publication date
JPH0129552Y2 (enExample) 1989-09-08

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