JPS59121746A - 表面分析装置 - Google Patents

表面分析装置

Info

Publication number
JPS59121746A
JPS59121746A JP57227437A JP22743782A JPS59121746A JP S59121746 A JPS59121746 A JP S59121746A JP 57227437 A JP57227437 A JP 57227437A JP 22743782 A JP22743782 A JP 22743782A JP S59121746 A JPS59121746 A JP S59121746A
Authority
JP
Japan
Prior art keywords
cathode
anode
ion
hole
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57227437A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0135469B2 (enrdf_load_stackoverflow
Inventor
Katsuhiro Kageyama
影山　賀都鴻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP57227437A priority Critical patent/JPS59121746A/ja
Publication of JPS59121746A publication Critical patent/JPS59121746A/ja
Publication of JPH0135469B2 publication Critical patent/JPH0135469B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP57227437A 1982-12-28 1982-12-28 表面分析装置 Granted JPS59121746A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57227437A JPS59121746A (ja) 1982-12-28 1982-12-28 表面分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57227437A JPS59121746A (ja) 1982-12-28 1982-12-28 表面分析装置

Publications (2)

Publication Number Publication Date
JPS59121746A true JPS59121746A (ja) 1984-07-13
JPH0135469B2 JPH0135469B2 (enrdf_load_stackoverflow) 1989-07-25

Family

ID=16860844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57227437A Granted JPS59121746A (ja) 1982-12-28 1982-12-28 表面分析装置

Country Status (1)

Country Link
JP (1) JPS59121746A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5150010A (en) * 1990-03-14 1992-09-22 Kabushiki Kaisha Toshiba Discharge-in-magnetic-field type ion generating apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5150010A (en) * 1990-03-14 1992-09-22 Kabushiki Kaisha Toshiba Discharge-in-magnetic-field type ion generating apparatus

Also Published As

Publication number Publication date
JPH0135469B2 (enrdf_load_stackoverflow) 1989-07-25

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