JPH0135469B2 - - Google Patents
Info
- Publication number
- JPH0135469B2 JPH0135469B2 JP57227437A JP22743782A JPH0135469B2 JP H0135469 B2 JPH0135469 B2 JP H0135469B2 JP 57227437 A JP57227437 A JP 57227437A JP 22743782 A JP22743782 A JP 22743782A JP H0135469 B2 JPH0135469 B2 JP H0135469B2
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- anode
- hole
- sample
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 150000002500 ions Chemical class 0.000 claims description 49
- 238000005211 surface analysis Methods 0.000 claims description 9
- 239000007789 gas Substances 0.000 description 10
- 238000001514 detection method Methods 0.000 description 7
- 125000004429 atom Chemical group 0.000 description 5
- 230000007935 neutral effect Effects 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000004927 fusion Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000004949 mass spectrometry Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- -1 argon Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000010187 selection method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57227437A JPS59121746A (ja) | 1982-12-28 | 1982-12-28 | 表面分析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57227437A JPS59121746A (ja) | 1982-12-28 | 1982-12-28 | 表面分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59121746A JPS59121746A (ja) | 1984-07-13 |
| JPH0135469B2 true JPH0135469B2 (enrdf_load_stackoverflow) | 1989-07-25 |
Family
ID=16860844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57227437A Granted JPS59121746A (ja) | 1982-12-28 | 1982-12-28 | 表面分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59121746A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03266346A (ja) * | 1990-03-14 | 1991-11-27 | Toshiba Corp | イオン生成装置 |
-
1982
- 1982-12-28 JP JP57227437A patent/JPS59121746A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59121746A (ja) | 1984-07-13 |
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