JPH0355934B2 - - Google Patents
Info
- Publication number
- JPH0355934B2 JPH0355934B2 JP57227414A JP22741482A JPH0355934B2 JP H0355934 B2 JPH0355934 B2 JP H0355934B2 JP 57227414 A JP57227414 A JP 57227414A JP 22741482 A JP22741482 A JP 22741482A JP H0355934 B2 JPH0355934 B2 JP H0355934B2
- Authority
- JP
- Japan
- Prior art keywords
- anode
- cathode
- hollow part
- ion
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000002500 ions Chemical class 0.000 description 47
- 239000007789 gas Substances 0.000 description 10
- 238000005211 surface analysis Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 125000004429 atom Chemical group 0.000 description 5
- 230000007935 neutral effect Effects 0.000 description 5
- 230000004927 fusion Effects 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 3
- 238000004949 mass spectrometry Methods 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- -1 argon Chemical class 0.000 description 1
- 238000001739 density measurement Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010187 selection method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57227414A JPS59121745A (ja) | 1982-12-28 | 1982-12-28 | 表面分析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57227414A JPS59121745A (ja) | 1982-12-28 | 1982-12-28 | 表面分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59121745A JPS59121745A (ja) | 1984-07-13 |
| JPH0355934B2 true JPH0355934B2 (enrdf_load_stackoverflow) | 1991-08-26 |
Family
ID=16860464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57227414A Granted JPS59121745A (ja) | 1982-12-28 | 1982-12-28 | 表面分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59121745A (enrdf_load_stackoverflow) |
-
1982
- 1982-12-28 JP JP57227414A patent/JPS59121745A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59121745A (ja) | 1984-07-13 |
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