JPS59121745A - 表面分析装置 - Google Patents

表面分析装置

Info

Publication number
JPS59121745A
JPS59121745A JP57227414A JP22741482A JPS59121745A JP S59121745 A JPS59121745 A JP S59121745A JP 57227414 A JP57227414 A JP 57227414A JP 22741482 A JP22741482 A JP 22741482A JP S59121745 A JPS59121745 A JP S59121745A
Authority
JP
Japan
Prior art keywords
sample
anode
cathode
hollow part
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57227414A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0355934B2 (enrdf_load_stackoverflow
Inventor
Katsuhiro Kageyama
影山　賀都鴻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP57227414A priority Critical patent/JPS59121745A/ja
Publication of JPS59121745A publication Critical patent/JPS59121745A/ja
Publication of JPH0355934B2 publication Critical patent/JPH0355934B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57227414A 1982-12-28 1982-12-28 表面分析装置 Granted JPS59121745A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57227414A JPS59121745A (ja) 1982-12-28 1982-12-28 表面分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57227414A JPS59121745A (ja) 1982-12-28 1982-12-28 表面分析装置

Publications (2)

Publication Number Publication Date
JPS59121745A true JPS59121745A (ja) 1984-07-13
JPH0355934B2 JPH0355934B2 (enrdf_load_stackoverflow) 1991-08-26

Family

ID=16860464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57227414A Granted JPS59121745A (ja) 1982-12-28 1982-12-28 表面分析装置

Country Status (1)

Country Link
JP (1) JPS59121745A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0355934B2 (enrdf_load_stackoverflow) 1991-08-26

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