JPS59121746A - Surface spectrometer - Google Patents

Abstract

PURPOSE:To obtain a simple and compact mass spectrometer that is suitable for use in a nuclear fusion device and such by providing a means that applies a magnetic field in parallel to the axial center of the hollow section of an anode and applying higher potential than that of first and third cathodes, to a second cathode. CONSTITUTION:Negative potential is applied to a second cathode 7 by a power supply 17 and much lower potential than that of the second cathode 7 is applied to a first cathode 5 by the power supplies 17 and 18 and to a third cathode 9 by the power supplies 17 and 19, respectively. A high temperature and density electron group is confined in the hollow section of an anode 3 and ionizes gas molecules. The ionized molecules move in the hollow section of the anode 3 by the force received from an electromagnetic field and a part of them hits the surface of a sample 10 in high energy by the potential difference applies to a third cathode 9. Since a sufficient amount of primary ions that are incident on the surface of the sample are obtained by low operation gas pressure and since the amount of the surface material sputtered from the sample surface is large, a differential exhaust system and such for the radiation of the primary ions are not required.

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to an apparatus for analyzing the surface of a solid, and in particular, a surface analysis apparatus for analyzing spatter and particles by bombarding the surface of a sample with ions. Regarding.

[Prior art and its problems] In recent years, surface analysis devices have become widespread in factories, research facilities, etc., and there are many types, and one suitable for the application is selected.

In nuclear fusion research, it is important to study plasma-wall interactions that supply impurities to the plasma. For this purpose, we need something that can analyze the isotopes of hydrogen, which are the most commonly used fuels, and helium, which is found in ashes. A secondary ion mass spectrometer is a surface analyzer that can analyze hydrogen, helium, etc.

In this method, a sample is irradiated with primary ions, and ions among particles sputtered from one surface are subjected to mass spectrometry. When a secondary ion mass spectrometer is attached to a nuclear fusion device and used for research on plasma-wall interactions,
Conventionally, there were two problems.

In addition to ions, a large amount of working gas (gas that should become negative ions) flows out from the ion source that generates primary ions for sample irradiation, but this working gas does not contaminate the fusion device a. Such measures are necessary.

Some countermeasures include differential pumping of the heel line of the ion beam, but this poses a problem in that the apparatus becomes large and complicated. This is the first problem.

10,000, the yield of secondary ions used in secondary ion mass spectrometry, that is, the number of secondary ions per negative ion, is very small, so secondary ion mass spectrometry has very high sensitivity. measurement device d is required. This is the second problem.

[Purpose of the invention]

The present invention has been made in view of the above circumstances, and its primary purpose is to provide a simple and compact mass spectrometer suitable for use in nuclear fusion devices, etc.+WJ
Second, it functions without the use of highly sensitive measuring equipment/i! [
An object of the present invention is to provide a quantitative spectrometer.

[Eye of Invention Kaname]

To achieve the above object, the present invention provides a vacuum container,
The anode and three cathodes housed in the vacuum container form a secondary ion generating section that generates ions of the surface substance of the sample, and the anode has a hollow mark (i11) that penetrates through both of the hollow parts. For the opening mark, a second cathode and a second cathode are arranged so as to cover each opening mark, and a through hole coaxial with the hollow mark of the anode is provided in the second cathode and the second cathode, A third hole for holding a sample to be surface analyzed is provided in the second through-hole, and a magnetic field is applied to the hollow part of the anode, which is physically parallel to the axis of the hollow part of the first anode. A means of applying is provided, and the first one is the highest, and the second one is higher than the first one, and the third one is higher than each of the 'gu'iji,'40Lj' + 71.
<Secondary ear used for surface analysis by means of providing C]
-7 generator was constructed.

〔Effect of the invention〕

According to the present invention, the sample is disposed at 7 facing the discharge space, and the potential distribution in the discharge space is changed so that the primary ions generated by the discharge collide with the sample surface with high energy, thereby reducing the surface material of the sample. In addition to increasing the amount of sputtering, the sample is irradiated with primary ions with commercial gas efficiency using a small and simple device that does not use a differential pumping system, and the neutral atoms that make up most of the particles of the sputtered sample surface material are removed from the discharge space. Since secondary ions can be generated by ionizing the electrons trapped in the Takabuchi and Takabuchi electrons, there is no need to use highly sensitive measurement equipment to detect secondary ions.

[Embodiments of the invention]

FIG. 1 is a longitudinal sectional view of the main parts of a surface analysis device showing one embodiment of the present invention. The vacuum vessel f1+ is connected to an exhaust system and a gas supply system (not shown) via a boat (2).

Inside the vacuum container (1) is a cylindrical anode (3) and a first anode (3) disposed close to and spaced from the anode (3) so as to cover the opening of the hollow (4) of the anode (3). A through hole (6) is provided in the center of the cathode (5) and the first cathode (5), and is arranged to cover the other opening of the hollow part (4) of the anode (3). , a through hole (8) coaxial with the hollow part (4) of the anode.
), the second cathode (9) is arranged spaced apart from and close to the second cathode (7), and has a through hole (8) in the second cathode.
This is the third cathode that holds the sample (Qf) placed in the holder (1υ) together with the holder (1υ). Also serves as a supply path.The first cathode (5)
The second cathode (7) and the third cathode (9) are supported by columns supported by a support part (not shown) inside the boat (2), and the first cathode (5) and the second cathode (7
) is supplied with power by the pillar. The anode (3) is supported by a grounded vacuum container (1) via a hoard (2) and is electrically grounded. A device for analyzing the mass of ions is arranged at a distance from and close to the first cathode (5).

Although the invention does not impose any restrictions on the method of mass spectrometry of secondary ions, in this embodiment, zero ion velocity selection devices are used. o Yu is an ion detection device. The ion velocity selection device (131) consists of two mutually insulated conductor plates and a case that houses them. The ion detection device H uses a foundation cutlet. The ion velocity selection device Oy and the ion velocity selection device Oy Detection device (1・υ is
It has a current-carrying path inside.

A column (15
) is supported by Anode (3), first cathode (5),
The second gruesome (7), the fifth cathode (9), the ion velocity selection device (1:a) and the ion detection device (1) are all housed in the vacuum container (1).

A magnetic field generator is constituted by a coil (F) and a coil (θω) installed around the outer periphery of the vacuum vessel (II) along with a power source (not shown). A magnetic field is applied that is parallel to the ion velocity selector, and a substantially uniform magnetic field is applied to the ion velocity selector.

FIG. 2 is an explanatory diagram of the operation of the main parts of the surface analysis device of the present invention. Components common to those in FIG. 1 are designated by the same numerals 1 through 1 to avoid duplication of description. Although the coil Q61 is not shown in FIG. 2, the description will be made assuming that a magnetic field is applied to the anode during operation. In addition, a negative potential is given to the second cathode (7) by the power supply 0η, and the third cathode (9 ) has a power supply (1
By 71,01 Sonezawa Second 1st Savings (7) Den-i ☆
If you are given 5 cans, which is even lower, you will receive 1.

The present invention will be described in detail below with reference to FIGS. 1 and 2. -The gas 1 that should become the next ion, for example, alcon, is in the hoard (2) in this example, then in the vacuum container (1)
When the water is completely supplied, it is quickly transferred to the hollow part (4) of the anode. In the hollow part (4) of the Koyore, a crossed field discharge is generated by the applied magnetic field and the pressure between the two sides, fL, 7)'4, and the discharge is stably sustained for one period. Therefore, the potential of the second (7) cathode must be lower than the potential of the first cathode (5). 1. In the hollow part (4) of the
6? A group of electrons is trapped in the UA and ionizes gas molecules. A molecule that has not been ionized (for example, an atomic ion of argon) becomes positively (
The second gripping pole (7) moves through the hollow part (, 4) of the sample, and part of it moves toward the sample. Due to the RL phase difference, the primary ions collide with the surface of the sample (river) with high energy.The primary ions incident on the surface of the sample are In the present invention, differential pumping for primary ion irradiation is unsuitable, and the surface analysis device can be made smaller and easier to carry.

Conventional secondary ion mass spectrometry uses secondary ions, which contain only a very small amount of the neutral atoms that make up most of the sputtered particles, and therefore Broiling required a special, highly sensitive needle-side device. The present invention utilizes nearly all neutral atoms in the sputtered particles. Neutral atoms released from the sample surface due to ion bombardment cause a cross field discharge...
The electrons move in the group, a part of which is ionized and passes through the through hole (6) of the first cathode. The ion speed pi selection device 031 sets the voltage between the conductor plates and guides only ions with a predetermined speed to the ion detection device (14). Passing through the first gruesome through hole (6) 1-. , Ion velocity selection device (1; Ions that reach the entrance hole have a constant energy, so their mass can be found from their velocity. In other words, ion velocity selection device i￥tl, 1iOiq body flood)
Ion detection &i L# 0.
By obtaining a correspondence with the ion current detected by 11, it is possible to perform an in-plane analysis of sample 011). Clost field knowledge, 01 company Io 1 efficiently ionizes the middle atoms sputtered from the sample (10). The ion direct current of the device is much larger and there is no need to use a special sieving device.

[Other embodiments of the invention]

The working gas may be introduced from anywhere, for example from terminal QZ. It can be placed in the magnetic field generator, and does not need to be an air-core coil as shown in the embodiment. T-resistance analysis of ions is shown in Example 1. It does not have to be a quick selection type.

[Brief explanation of drawings]

No. 1 Show 1 shows an embodiment of the present invention/I Analyzing Whales I
Fig. 1 and Fig. 2 show the main part 4jl of the present invention.
J's explanatory diagram p). (1)...Vacuum container. (2)...Hoard of vacuum equipment. (3)...Anode. (4)...Hollow part of the anode. (5)...first cathode. (6)...through hole of first cathode. (7)...Second cathode 1, (8)...Second cathode through hole. (9)...Third cathode. (1t... sample. (16)... coil. αη, 0 hammer, (IL... power supply. Patent attorney Noriyuki Noriyuki (TL or 1 person) 0υ

Claims (1)

[Claims] (1) It is housed in a vacuum container to which a magnetic field is applied,
an anode having a hollow portion extending therethrough and having a fine point of the hollow portion arranged parallel to the magnetic field, the anode being spaced apart from and close to one end of the opening of the anode so as to cover the opening; a first cathode having a through hole in the axis direction of the anode; A second cathode having a through hole coaxial with the through hole provided in the first cathode, and a sample to be analyzed that is inserted into the through hole of the second cathode at a distance and is oriented in the direction of the use. an ion mass spectrometer for analyzing the mass of ion, which is provided at a distance from and close to the through-hole of the first cathode; and means for applying the highest potential to the anode. and means for applying a higher potential to the second cathode than the fourth position of each of the second and third cathodes.