JPS59121335A - フオトマスクの検査方法及び装置 - Google Patents
フオトマスクの検査方法及び装置Info
- Publication number
- JPS59121335A JPS59121335A JP57233078A JP23307882A JPS59121335A JP S59121335 A JPS59121335 A JP S59121335A JP 57233078 A JP57233078 A JP 57233078A JP 23307882 A JP23307882 A JP 23307882A JP S59121335 A JPS59121335 A JP S59121335A
- Authority
- JP
- Japan
- Prior art keywords
- pixels
- pixel
- photomask
- coordinates
- octagon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 17
- 239000004020 conductor Substances 0.000 claims description 55
- 238000007689 inspection Methods 0.000 claims description 25
- 238000005259 measurement Methods 0.000 claims description 22
- 238000001514 detection method Methods 0.000 claims description 12
- 239000000615 nonconductor Substances 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000007547 defect Effects 0.000 description 22
- 238000010586 diagram Methods 0.000 description 9
- 230000002950 deficient Effects 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- 235000014121 butter Nutrition 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
- G03F1/84—Inspecting
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57233078A JPS59121335A (ja) | 1982-12-28 | 1982-12-28 | フオトマスクの検査方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57233078A JPS59121335A (ja) | 1982-12-28 | 1982-12-28 | フオトマスクの検査方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59121335A true JPS59121335A (ja) | 1984-07-13 |
| JPS6412383B2 JPS6412383B2 (enrdf_load_stackoverflow) | 1989-02-28 |
Family
ID=16949451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57233078A Granted JPS59121335A (ja) | 1982-12-28 | 1982-12-28 | フオトマスクの検査方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59121335A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010083530A (ja) * | 2008-09-30 | 2010-04-15 | Takashi Iizuka | 脈動防止具付きペットボトル |
-
1982
- 1982-12-28 JP JP57233078A patent/JPS59121335A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010083530A (ja) * | 2008-09-30 | 2010-04-15 | Takashi Iizuka | 脈動防止具付きペットボトル |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6412383B2 (enrdf_load_stackoverflow) | 1989-02-28 |
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