JPS59119549A - Information recording member - Google Patents

Abstract

PURPOSE:To enable satisfactory forming of continuous spiral projected or recessed parts on an original plate by forming successively the 1st layer having energy absorptivity and gas liberation property and the 2nd layer consisting of an org. resin on a base plate thereby forming an information recording member to be formed with the projecting parts by irradiation of a laser beam. CONSTITUTION:The 1st layer 12 having energy absorptivity and gas liberating property is formed on a glass base plate 11, and the 2nd layer 13 of an org. resin is formed therein. The layer 12 contains preferably a low-melting metal, such as Te, Bi or the like, having <=600 deg.C melting point and any among C, N, H and O and can be formed by sputtering a target of a low-melting metal in vacuum by plasma of gas such as CH3, NH3, CO2 or H2. The layer 13 is preferably an org. resin which allows good transmission of a laser beam and has a low thermal deformation temp. and elongation, for which polytetrafluoroethylene, polycarbonate, etc. are used.

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to an information recording member in which convex portions are formed by irradiation with an energy beam such as a laser beam, specifically, a master disc for producing an information recording medium. Or it relates to an information recording member used as an information recording medium itself.

[Technical background of the invention and its problems]

In order to ensure stable tracking during recording and reproduction, in optical information recording media that can be loaded with 11 bits, that is, optical discs in which υ information signals are recorded and reproduced by laser beam irradiation. Because of the need to increase the recording density (track density), many media have continuous spiral-shaped protrusions or four parts formed on the recording layer that are optically distinguishable on the substrate (disk substrate). It is used. Conventionally, such a disk substrate on which continuous spiral-shaped protrusions or recesses are formed is produced by transferring the protrusions or recesses by electroforming or other methods from a master disk on which continuous spiral-shaped protrusions or four parts are formed. A stamper was made using the methane arm, and injection molding was performed using this methane arm.

It is manufactured by transferring the convex portion or four portions onto a disk substrate using methods such as compression molding or casting.

On the other hand, a master disc having concave or convex portions is generally manufactured by the following method. That is, a Cr film is deposited on a flat substrate such as glass, and a photoresist is applied thereon using a spinner. Next, while rotating this substrate, 1 μmφ
Exposure is performed in a continuous strip or spiral by irradiating a laser beam that has been narrowed down to a certain extent onto the photoresist while moving it in the radial direction of the substrate at a predetermined feed speed.

Then, further development and baking are performed to obtain a master disc.

However, with this master disk manufacturing method, it is difficult to form uniformly shaped convex portions or concave portions over the entire surface of the substrate. The shape of the convex portion or concave portion to be formed on the substrate, taking a convex portion as an example, is determined in order to enable stable tracking (,
The height of the wavelength is approximately 8000 m
It is required that the size of the board be about 800X and the width of about 1μm. Also, the size of the substrate is 30X from the point of view of recording capacity.
A diameter of about cn1φ or more is required. However, the spinner coating method is a technique that is normally used for coating films with a thickness of 1 to 2 μm or more, and it is difficult to form a uniform coating film of 1000 squares on the entire surface of a large-area substrate such as 30 Crnφ using this method. It is extremely difficult and partial peeling is unavoidable. Furthermore, even a slight amount of dust in the atmosphere that adheres to the substrate surface can cause serious coating unevenness. Furthermore, it is extremely difficult to uniformly develop such a thin photoresist over the entire area. Therefore, it was an impossible goal to produce a master disk in which the continuous grooves of the tracking groove and the irradial convex or concave portions were well formed using the photoresist method using spinner coating.

[Purpose of the invention]

An object of the present invention is to provide an information recording member that is suitable as a master material for manufacturing a master in which continuous spiral convex portions are uniformly and well-controlled over the entire surface.

[Summary of the invention]

The information recording member according to the present invention forms a convex portion by irradiation with an energy beam such as a laser beam, and comprises a first layer having energy absorbing properties and gas releasing properties on a substrate, and an organic resin. The information recording member having this structure is characterized by sequentially forming a second layer consisting of O When an energy beam, for example a laser beam, is applied, the laser beam passes through the second layer (or the third layer and the second layer if there is a third layer) and mostly reaches the first layer. The first layer absorbs the energy of the laser beam and is locally heated, thereby liberating and emitting gas, which is confined by the second layer. At this time, since the second layer, which is an organic resin, has a low heat distortion temperature and high ductility, it is easily deformed by the heat and gas pressure released by the first layer, and the Lede beam irradiation part becomes a convex part. .

Further, since the second layer is an organic resin, it also partially decomposes upon heating and releases gas. Therefore 3F'22 f'A
When a third layer made of a highly extensible metal is formed on top, the third layer is easily deformed by the gas pressure released by the first and second layers, resulting in the formation of large convex portions. Become.

〔Effect of the invention〕

According to this invention, unlike a photoresist that is applied by a spinner, the first layer, second layer, and third layer are all formed by a normal thin film forming method such as sintering or phosphorus vapor deposition. If it is possible to do so, it is possible to form a uniform film in a clean state free of impurities such as dust in the atmosphere and without the occurrence of peeling parts.

In addition, by trapping the gas emitted from the first layer by heating with a laser beam or the like into the second layer and even the third layer, the convex portion is formed using gas pressure, so the desired shape ( It is easy to obtain a convex portion (height, width). Therefore, it is possible to form convex portions uniformly and in good shape over the entire surface of the substrate.

Further, when the third layer is formed, the shape of the convex portion becomes semi-permanently stable since the third layer is made of a metal with high extensibility. At the same time, this third layer can also be used as an electrode when forming a cyst stamper from a master by electroforming.

[Embodiments of the invention]

FIG. 1 is a sectional view of an information recording member according to the first invention. It has a structure in which a first layer 12 having energy absorbing properties and gas releasing properties is formed on a glass substrate 11, and a second layer 13 made of an organic resin is formed thereon. The first layer 12 is made of so-called low melting point metals such as Te and Bi having a melting point of 600°C or less, and C, N and H.
, O is suitable.
This is done by treating the target of the low melting point metal with CH, l in a vacuum.
It can be formed by sputtering with a plasma of a gas such as NI(3, Co2. H2. For example, Te
A thin film with a composition ratio of Te50C50■■20 and a thickness of 100OX formed by tumbling TARDAT with CH4 gas plasma can absorb light energy of 8300X at one wavelength by 4 times.
0% absorption and 30% when heated to 150℃ or higher in air.
Outgassing occurs with a weight loss of %.

On the other hand, the second layer 13 can basically be made of any organic resin, but it is desirable that it transmits a laser beam well, has a low heat distortion temperature, and has excellent ductility. Polytetrafluoroethylene is a type of fat that satisfies these conditions.

, II + recarbonate, polypropylene, teriethylene, moon? Examples include polyvinyl chloride and nylon, each of which has a heat deformation temperature of 110°C.

130°C, 80°C, 70°C, 60°C, about 80'C, elongation rate is 80-250% and 100-130%, respectively.

200-400chi, 90-800chi, 300-400%
, reaching 300-400%. These thin films can be formed by sputtering the target of the +I'tt river with Ar or the like using ssolazma, or by a conventional thin film forming method such as -vacuum deposition. Alternatively, it can be formed by a method such as plasma polymerization of monomer gas.

? 'l'! To form the second layer 13 of organic resin as described above on the first layer 12, for example, 300X Au
When 719g of Au film is formed as a second layer and an Ar laser beam (wavelength 4500X) is irradiated on it, approximately 5
0% is reflected, and only about 18% of the total is absorbed by the first layer 12. On the other hand, if a transparent polytetrafluoroethylene film with a thickness of, for example, 200 mm is formed as the second scrap 13, the rate at which the laser beam is absorbed by the first layer 12 reaches about 50%.

The thickness of the second layer 13 made of organic resin is 50 to 10
Approximately 001 is appropriate. This is because, if the film thickness exceeds 0.000 m, the gas emitted from the first layer 12 will be absorbed within the second layer 13, and the desired convex portions with a height of 0.1 μm or more will not be formed. In addition, such 100O
Forming an organic resin film having a thickness of X uniformly over a large area becomes possible only by the thin film forming method using vacuum as described above.

Next, the first layer 12 of 3,500X Te, which is made of the information recording member having the structure shown in FIG.
50CII ■ 15N5 film now has a thickness of 20 as the second layer 13
0X polytetrafluoroethylene p was sequentially formed. T
e5oC3oH15N5 film CHI Te target
The tetrafluoroethylene film was formed by sputtering with a mixed gas plasma (mixing ratio 4:1) of 4 gas and Nf gas (mixing ratio 4:1), and the tetrafluoroethylene film to be prepared was formed by sputtering a target of the resin with Ar gas plasma. .In this case, the second '
It is important to form the rmxs in the same vacuum container immediately after forming the first layer 12 in order to avoid being affected by dust in the atmosphere.

Next, as shown in FIG. 2(a), the substrate 11 is taken out from the vacuum container, placed and fixed on the rotating support table 21, and set at a linear speed of 4 fps. The second layer 13 was irradiated with an Ar laser beam 23 that was rotated in the free position and focused to 1 μn 1φ with a lens 22 while moving in the radial direction at a predetermined speed. However, the laser beam 23 is a continuously modulated beam, and the power is 4 at the film surface.
As a result of the laser beam 23 irradiation, the laser beam irradiated portion of the first layer 12 liberates and releases gas, and as a result, the second layer 12 of the laser beam irradiated portion 13
On the surface, uniform height 0.1 μm 1 width at the bottom 1 ttm
It was observed with a scanning electron microscope that a continuous spiral convex portion 24 was formed.

As a comparative example, a 300X Ti film was fabricated as the second layer and irradiated with a laser beam in the same manner as above. 8
Even when the power was increased to mW, only a convex portion with a height of 0.03 μm was formed. When the power of the laser beam was increased beyond this, the Ti film was destroyed.

As another example, a Te5oC3oI2o film with a thickness of 4000X is formed as the first layer 12 on a glass substrate 11 with a diameter of 30αφ, and a second layer of polycarbonate, polypropylene, zaryethylene, etc. with a thickness of 200X is formed thereon. Four types of information recording members were fabricated with polyvinyl chloride and nylon films formed respectively. The Te5oC5oH2o film was formed by sputtering Te terad with ClI4 gas plasma, and the organic resin film thereon was formed by vacuum evaporation. When these information recording members were irradiated with a laser beam in the same manner as before, continuous spiral convex portions with good shapes were formed in all of them.

The height of the laser beam and the convex portion is 4 mW - 0.09 μm when the second layer 13 is made of chili carbonate.

For polypropylene 3.5 mW -0.08 μm1
In the case of polyethylene, it was 3.5 mW - 0,08 µm; in the case of polyvinyl chloride, it was 3.5 mW - 0,07 µm; in the case of nylon, it was 4rnW - 0,07 µm.

Next, a process for producing an information recording medium having continuous spiral convex portions or four portions using the master disc shown in FIG. 2(b) will be explained. As shown in FIG. 3(a), an electrode 31 for electroforming is formed on the second layer 13 on which continuous spiral convex portions 24 are formed, as shown in FIG. 2(b).
After that, a metal plate 32 made of Ni or the like was formed by electroforming. The thickness of the metal plate 32 is approximately 300 μm.

Thereafter, by using the metal plate /////32 as an electrode and separating the upper part of the electrode 3 and the first layer 12 by electrolytic cleaning, the second layer is formed as shown in FIG. 3(b). A stamper f was manufactured, which consisted of an electrode 31 and a metal plate 32, each having four parts 33 in which the shape of the convex part 24 formed on the first part 13 was inverted and transferred. At this time, the electrode 3 was in close contact with the metal plate 32 extremely firmly, and no trace of the film material of the second layer 13 was observed on its surface. Further, the height of the four parts 33 on the surface of this stamper was 0.1 μm and the width was 1 μm.

Next, using this stun/'P, a third
As shown in Figure (C), the acrylic surface board 3
I made 4. On this substrate 34, a convex portion 35 in the form of a continuous spheroid with a height of 0.08 μm was formed uniformly over the entire surface. By forming a recording layer 36 on this disk substrate 34, an optical information recording medium is obtained.

In the above embodiment, an information recording medium was produced from the master disc shown in FIG. 2(b) via the stamper R, but it is also possible to use the master disc as it is as a stamper. An example thereof will be described below.

That is, the master disc shown in FIG. 2(b) is stamped and flattened, and a disc substrate 41 made of acrylic as shown in FIG. 4 is molded by a casting method.
was molded. The molding is made from acrylic shiratsuno, and 12
The heat treatment was performed at 0°C for 3 hours. After molding, the 4th disk substrate is placed in the 2nd Jf? 73'(,]?Litet2 fluoroethylene film), the surface of the peeled n(on the disk substrate 1) was extremely uniform, and a continuous spicil-shaped recess 42 with a depth of 0.1 μm was observed. No traces of the polytetrafluoroethylene film were observed on the peeled surface. When Gaisuf substrates were repeatedly molded from the same master using this method, four parts with almost the same shape remained even after 100 moldings. A transferred disk substrate was obtained. By forming a recording layer 43 on the thus obtained disk substrate 41, an optical information recording medium is completed. FIG. 5 shows information related to the second invention. A cross-sectional view of a recording member is shown.A first layer 52 having energy absorbing properties and gas releasing properties is formed on a glass substrate 51, and a H4(2
1 in that the layers 53 are sequentially formed, but in this embodiment, a third layer 54 made of a highly extensible metal is further formed on the second layer 53.

The third layer 54 is made of Au HTi + Cr P P
t + Pd e Ag y Ta e Mo t Zr
Suitable materials include one or more of the following, and these metal targets are sputtered with Ar gas plasma, or
It can be formed by a thin film forming method such as vacuum evaporation of the metal. The first layer 52 and the second layer 53 may be the same as those in the previous embodiment.

The process of producing a master disc using the information recording member having the structure shown in FIG. 5 is almost the same as the previous embodiment, and one embodiment is as follows. A 4000X thick Te50C3 [1”2
A polytetrafluoroethylene film having a thickness of rool was sequentially formed as the 0 film and the second layer 53. “50C!1OH20
The film was formed by sputtering 50% Te with CH4 gas plasma, and the polytetrafluoroethylene film was formed by sputtering the resin target with Ar gas plasma. Next, an Al1 film having a thickness of 300X was formed as the third layer 54 by sputtering AII quota with Ar gas plasma in the same vacuum chamber after the formation of the second layer 53.

Next, take out the board 51 from inside the empty container, and take it out from the empty container.
) as shown in FIG.
The Ar laser beam 63 was rotated at m1 sec and focused to 1 μmφ by a lens 62, and while moving in the radial direction, the third layer 54 was irradiated with a controlled t4 power of 6 mW at the film surface.

As a result, as shown in FIG. 5(b), on the surface of the third layer 54 in the area irradiated with the laser beam, a continuous spiral-shaped protrusion with a height of 0.1 μm and a bottom width of 1 μm is formed. It was confirmed that 64 was formed.

Next, Ni electroforming is performed on the master disk shown in FIG. 6(b) using the third layer 54 as an electrode for electroforming, and the Nl plate and the
54 as 't'<<, the substrate 51 and the first
When the films of the layer 52 and the second layer 53 were peeled off, a stamper consisting of the Ni plate and the Au film of the third layer 54 firmly adhered to the surface of the Ni plate was obtained. At this time, no trace of the material of the second layer 53 was observed on the Au film, and the height was 0.1 μm1.
On the other hand, as a comparative example, a 300× thick concave portion was formed on the first layer 52 without intervening a layer made of organic resin. When an Au film was formed as a second layer and this was similarly exposed to a laser beam, a convex portion was formed, but the height of the convex portion remained unchanged no matter how the conditions such as linear velocity, armature, etc. were changed. It was not possible to make it 0.02 μm or more. In addition, when a stamp/f was manufactured from this master in the same manner as before, even if the first layer was peeled off by electrolytic cleaning, the surface of the stamper was exposed to the laser beam, etc. thickness 4000mm
Te5oC3oN of X. A H1o film is formed by sintering with a mixed gas zimmer of CH4 and NH3 as a Te target, and then a polycarbonate film with a thickness of 80X is continuously deposited in the same vacuum chamber. was formed by sputtering with Ar gas plasma.

Subsequently, a Ti film with a thickness of 400X was deposited in the same deep purple container.
The target was formed by sputtering with Ar and Ma.

Next, the substrate 51 on which all three layers were formed was taken out from the vacuum container and exposed to laser beams in the same manner as in FIG. 6. However, the linear speed is 2.8m/9ee, the radar beam is a semiconductor laser beam with a wavelength of 8200X, and the nokwa is 1
It was set to 0 mW. When the surface of the master disc produced in this way was observed using a scanning electron microscope, it was found that the entire surface had a height of 0.09 μm.
A convex portion in the shape of a continuous spiral with a uniform shape and a width of 1.1 zxm at the bottom was formed.

Further, a T layer with a thickness of 400^ is formed as a first layer 52 on the substrate 5.
e5oC3oN,. ■,. y,, The same result can be obtained in a chorus using an information recording member in which a polytetrafluoroethylene film with a thickness of 100× is formed as the second layer 53, and a Cr l Pt l Pd l Ag film is formed as the third layer. It was possible to produce a master disc on which continuous grooves and irradial convex portions with good shapes were formed. The height of each convex part is 0
．． 09, 0.08, 0.08.

The width at the bottom of 0.07 μm was 1 μm in each case.

It is also possible to manufacture an information recording medium by using the master disk shown in FIG. 6(b) as it is as the stand 4.

To explain one example, first, an acrylic ultraviolet curing resin is applied onto the master disc, and then a pre-formed flat acrylic substrate and a glass substrate are laminated, and ultraviolet rays of 80W/Gano intensity are applied from the upper glass plate side. was irradiated for 27 seconds to cure the ultraviolet curable resin layer. Next, when the acrylic substrate was peeled off from the master, the ultraviolet curing resin layer was adhered to the acrylic substrate extremely firmly, and the third layer 5 was on the surface.
No trace of the Au film of No. 4 was observed.

The thickness of the ultraviolet curing resin layer on the acrylic substrate is 100μm
There is a uniform continuous stain 4 with a depth of 0.1 μm on its surface.
A four-round concave portion was formed.

By forming a recording layer on a disk substrate made of an acrylic substrate to which the ultraviolet curable resin layer thus obtained is adhered, an optical information recording medium is obtained.

The information recording member according to the present invention can be used not only as a master disc but also as an optical information recording medium itself. An example of this will be described below. 4 of 12mφ as board 5 in Figure 5? A Te5 substrate with a thickness of 3000× is used as the first layer 52 on it.
oC5oH2° cavity is formed, and the thickness is 20° as the second layer 53.
0X, J9 Litetrafluoroethylene film is formed, and the third
A Cr film with a thickness of 100× was formed as the layer 54 to obtain an optical information recording medium. Rade beam exposure was performed on this medium in the same manner as the master production process shown in FIG.

However, the rotational speed of the medium was constant at 1800 rpm, and the wavelength of the Rede beam was 8200X.

The power was 15 mW at the membrane surface. In addition, the radar beam was subjected to arm-to-arm modulation according to the information signal to be recorded. This l
/-The beam exposure creates a discontinuous spiral (convex part) on the surface of the medium whose length changes according to the information signal.
pit rows) were formed. The height of the convex shape is 0.2
The width at the bottom of μm1 was 1 μm.

When the medium on which information was recorded in the form of a pit string was rotated at the same speed of 1800 rpm as during recording, and the presence or absence of convex portions was detected using a continuous laser beam of 1 mW, playback was performed.
The S/N of the reproduced signal was 38 dB, which was a relatively good value.

This invention can be carried out in many other variations, for example, by exposing the master disc with a laser beam that is modulated with continuous pulses (instead of forming circular convex portions, using an information signal) to provide information. By forming a pit row according to the signal, molding a disk substrate by injection molding using this master disc or the Stannosen manufactured from this, and forming a reflective film such as an At film on it, a playback-only optical It is also possible to obtain a digital information recording medium.

[Brief explanation of the drawing]

Fig. 1 is a sectional view of the information recording member according to the first invention, Fig. 2 (,) (b) is a diagram showing the process of manufacturing a master disc from the information recording member of Fig. 1, and Fig. 3 ( a) (b)
(C) is a diagram showing the process of producing the information recording Y body from the master disc in Figure 2 (b) via the stamper;
i+'ν1 A diagram of one information recorder produced using the master disc in Figure (b) as a stamper, Figure 5 is a sectional view of the information recording member according to the second invention, Figures 6 (a) (b) 5 is a diagram showing the process of making a master disc from the information recording member shown in FIG. 5. FIG. 1... Substrate, 12... First layer, 13... Second layer, 21... Rotating support base, 22... Lens, 23...
Laser beam, 24... Convex portion, 3... Electrode for RI, 32... Gold R plate, 33... Concave portion, 34... Disc substrate, 35... Convex portion, 36...・Recording layer, 4 layers
...Disc substrate, 42...Concave portion, 43...Recording layer, 51...Substrate, 52...First layer, 53...Second
Layer, 54... Third layer, 61... Rotating support base, 62...
... Lens, 63... Laser beam, 64... Convex portion. Figure 1 Figure 2 (b) Figure 3 (b) Figure 4 41 4j Figure 5 I:ll. (b)

Claims (7)

[Claims] (1) In an information recording member that forms a convex portion by irradiation with an energy beam, a first layer having energy absorption and gas release properties and a second layer made of an organic resin are sequentially deposited on a substrate. An information recording member characterized by being formed by forming. (2) The first layer is made of metal with a melting point of 600°C or less, C1N,
H, and one or more of 0 ('i'i information u1
−] Recording materials. (3) The second layer is polytetrafluoroethylene, polycarbonate, polypropylene, polyethylene, νj? The information recording member according to claim 1, characterized in that the member contains at least -Nlf of ringed vinyl and nylon. (4) The second layer is formed by a film forming process in a vacuum container [Claim 1]
Information recording member described in section. (5) Information recording according to claim 1, characterized in that the second layer is formed continuously in the vacuum container used for forming the first layer after the formation of the first layer. Parts for use. (6) In an information recording member that forms a convex shape when irradiated with an energy beam, a first layer having energy absorbing properties and gas releasing properties, a second layer made of an organic resin, and a highly extensible metal are disposed on a substrate. An information recording member characterized by sequentially forming a third layer consisting of: (7) The third layer is Au, TI, Cr, Pt
, Pd #Agl'pa + MOr Zr.