JPS59115649U - 半導体基板立替装置 - Google Patents

半導体基板立替装置

Info

Publication number
JPS59115649U
JPS59115649U JP967283U JP967283U JPS59115649U JP S59115649 U JPS59115649 U JP S59115649U JP 967283 U JP967283 U JP 967283U JP 967283 U JP967283 U JP 967283U JP S59115649 U JPS59115649 U JP S59115649U
Authority
JP
Japan
Prior art keywords
jig
semiconductor substrate
processing
substrate replacement
replacement equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP967283U
Other languages
English (en)
Japanese (ja)
Other versions
JPS635229Y2 (enrdf_load_stackoverflow
Inventor
恵二 渡辺
孝治 井上
Original Assignee
九州日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 九州日本電気株式会社 filed Critical 九州日本電気株式会社
Priority to JP967283U priority Critical patent/JPS59115649U/ja
Publication of JPS59115649U publication Critical patent/JPS59115649U/ja
Application granted granted Critical
Publication of JPS635229Y2 publication Critical patent/JPS635229Y2/ja
Granted legal-status Critical Current

Links

JP967283U 1983-01-25 1983-01-25 半導体基板立替装置 Granted JPS59115649U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP967283U JPS59115649U (ja) 1983-01-25 1983-01-25 半導体基板立替装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP967283U JPS59115649U (ja) 1983-01-25 1983-01-25 半導体基板立替装置

Publications (2)

Publication Number Publication Date
JPS59115649U true JPS59115649U (ja) 1984-08-04
JPS635229Y2 JPS635229Y2 (enrdf_load_stackoverflow) 1988-02-12

Family

ID=30141127

Family Applications (1)

Application Number Title Priority Date Filing Date
JP967283U Granted JPS59115649U (ja) 1983-01-25 1983-01-25 半導体基板立替装置

Country Status (1)

Country Link
JP (1) JPS59115649U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5526612A (en) * 1978-08-11 1980-02-26 Nitto Electric Ind Co Ltd Manufacturing of carrier tape useful for ic
JPS5758763U (enrdf_load_stackoverflow) * 1980-09-24 1982-04-07

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5526612A (en) * 1978-08-11 1980-02-26 Nitto Electric Ind Co Ltd Manufacturing of carrier tape useful for ic
JPS5758763U (enrdf_load_stackoverflow) * 1980-09-24 1982-04-07

Also Published As

Publication number Publication date
JPS635229Y2 (enrdf_load_stackoverflow) 1988-02-12

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