JPS5911443U - probe card - Google Patents
probe cardInfo
- Publication number
- JPS5911443U JPS5911443U JP10613982U JP10613982U JPS5911443U JP S5911443 U JPS5911443 U JP S5911443U JP 10613982 U JP10613982 U JP 10613982U JP 10613982 U JP10613982 U JP 10613982U JP S5911443 U JPS5911443 U JP S5911443U
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- probes
- opening
- fixed
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のプローブカードの部分断面図、第２図は
チップ中央部に電極を有する集積回路を測定する場合に
おける従′来のプローブカードの部 ・分断面図、第
３図は探針のコンタクト部の電極面上のずれを示す説明
図、第４図は本考案に係るプローブカードの一実施例を
裏面から見た概略斜視図、第５図は本考案に係るプロー
ブカードの一実施例の部分断面図、第６図は本考案に係
るプローブカードのブレード形へめ実施例を示す部分断
面図である。
４０・・・・・・プローブカード、４１・・ニブリント
基板、４４・・・・・・開口部、４７・・・・・・ベー
ス部材、４８゜６２・・・・・・スリーブ、４ｉ・・・
・・・絶縁性合成樹脂、５０．６４・・・・・・探針、
５３・・・・・・コンタクト部、６１・・・・・・ブレ
ード。
４６ ４４
１ （５，２
ＷＬ竪
（Ｊ （’
手′＝４（ヱ−）・−Figure 1 is a partial cross-sectional view of a conventional probe card, Figure 2 is a cross-sectional view of a conventional probe card used when measuring an integrated circuit that has an electrode in the center of the chip, and Figure 3 is a cross-sectional view of a probe card. FIG. 4 is a schematic perspective view of an embodiment of the probe card according to the present invention viewed from the back, and FIG. 5 is an illustration of an embodiment of the probe card according to the present invention. Example Partial Sectional View FIG. 6 is a partial cross-sectional view showing a blade-shaped convex embodiment of a probe card according to the present invention. 40... Probe card, 41... Niblint board, 44... Opening, 47... Base member, 48° 62... Sleeve, 4i...・
... Insulating synthetic resin, 50.64 ... Probe,
53...Contact part, 61...Blade. 46 44 1 (5,2 WL vertical (J ('hand'=4(ヱ-)・-
Claims (2)
針が放射状に配置固定された集積回路測定用のプロニブ
カードにおいて、前記複数個の探針は前記開口部の周縁
に配設固定された複数個の金属性スリーブにそれぞれ嵌
入されており、前記金属性スリーブのゴ端より前記開口
部の内方へ延在する探針の突出部の長さがすべての探針
について等しくなるように金属製スリーブ内に於て合成
樹脂で接着されたものであることを特徴とするプローブ
カード。(1) In a professional nib card for integrated circuit measurement, in which a plurality of probes are arranged and fixed radially on the back side of an opening in a printed circuit board, the plurality of probes are arranged and fixed on the periphery of the opening. each of the probes is fitted into a plurality of metal sleeves such that the length of the protrusion of the probe extending inward from the end of the metal sleeve to the inside of the opening is equal for all the probes. A probe card characterized in that it is bonded with synthetic resin inside a metal sleeve.
接着されているリング状のベース部材に絶縁性合成樹脂
で固定されたものであることを特徴とする実用新案登録
請求の範囲第１項記載のプローブカード。 −（３）前記複数個の金属性スリーブはプリント配線に
一端を半田付けして配設されている複数個の金属製ブレ
ードの他端に半田付固定されたものであることを特徴と
する実用新案登録請求の範囲第１項記載のプローブカー
ド。(2) The plurality of metal sleeves are fixed with an insulating synthetic resin to a ring-shaped base member that is fitted and adhered to the opening. The probe card described in item 1. - (3) Practical use characterized in that the plurality of metal sleeves are fixed by soldering to the other ends of a plurality of metal blades which are arranged by soldering one end to the printed wiring. A probe card according to claim 1 of patent registration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10613982U JPS5911443U (en) | 1982-07-12 | 1982-07-12 | probe card |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10613982U JPS5911443U (en) | 1982-07-12 | 1982-07-12 | probe card |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5911443U true JPS5911443U (en) | 1984-01-24 |
| JPS6221008Y2 JPS6221008Y2 (en) | 1987-05-28 |
Family
ID=30248502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10613982U Granted JPS5911443U (en) | 1982-07-12 | 1982-07-12 | probe card |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5911443U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63108634U (en) * | 1987-01-07 | 1988-07-13 |
-
1982
- 1982-07-12 JP JP10613982U patent/JPS5911443U/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63108634U (en) * | 1987-01-07 | 1988-07-13 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6221008Y2 (en) | 1987-05-28 |
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