JPS59102141U - イオン化装置 - Google Patents

イオン化装置

Info

Publication number
JPS59102141U
JPS59102141U JP20161182U JP20161182U JPS59102141U JP S59102141 U JPS59102141 U JP S59102141U JP 20161182 U JP20161182 U JP 20161182U JP 20161182 U JP20161182 U JP 20161182U JP S59102141 U JPS59102141 U JP S59102141U
Authority
JP
Japan
Prior art keywords
metal
ionization device
cathode
permanent magnet
airtight container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20161182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6331703Y2 (enrdf_load_stackoverflow
Inventor
荒牧 成光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP20161182U priority Critical patent/JPS59102141U/ja
Publication of JPS59102141U publication Critical patent/JPS59102141U/ja
Application granted granted Critical
Publication of JPS6331703Y2 publication Critical patent/JPS6331703Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
JP20161182U 1982-12-27 1982-12-27 イオン化装置 Granted JPS59102141U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20161182U JPS59102141U (ja) 1982-12-27 1982-12-27 イオン化装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20161182U JPS59102141U (ja) 1982-12-27 1982-12-27 イオン化装置

Publications (2)

Publication Number Publication Date
JPS59102141U true JPS59102141U (ja) 1984-07-10
JPS6331703Y2 JPS6331703Y2 (enrdf_load_stackoverflow) 1988-08-24

Family

ID=30427105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20161182U Granted JPS59102141U (ja) 1982-12-27 1982-12-27 イオン化装置

Country Status (1)

Country Link
JP (1) JPS59102141U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6331703Y2 (enrdf_load_stackoverflow) 1988-08-24

Similar Documents

Publication Publication Date Title
JPS59102141U (ja) イオン化装置
JPH0435392U (enrdf_load_stackoverflow)
JPS59107473U (ja) イオンビ−ム照射装置
JPS60113367U (ja) 蒸着用坩堝
JPS58184720U (ja) 電磁接触器の消弧装置
GB1528151A (en) Permanent magnets
JPS58182140U (ja) 蒸着装置
JPS59128140U (ja) 真空バルブ
JPH022895U (enrdf_load_stackoverflow)
JPS58195953U (ja) 電子ビ−ム管
JPS597551U (ja) マグネトロン
JPS5861461U (ja) スパツタリング装置
JPS5891179U (ja) 低エネルギ−荷電粒子線のスピン状態分析器
JPS6136953U (ja) 電子ビ−ム溶接機
JPS60162337U (ja) 真空遮断器
JPS58107550U (ja) 電子ビ−ム管
JPS60143770U (ja) 電子衝撃型蒸着装置
JPS5896700U (ja) 中性粒子入射装置
JPS58113955U (ja) 固定陽極型x線管
JPS59169352U (ja) スパツタリング装置の電極部構造
JPS5839013U (ja) 電磁石鉄心
JPS6140003U (ja) アイソレ−タの整合用コイルの形状
JPS60136464U (ja) 電子銃
JPS61214399A (ja) 中性粒子入射装置
JPS5873550U (ja) 電子ビ−ム管の集電極冷却装置