JPS59100223U - Polarized light transmission infrared absorption spectrometer - Google Patents
Polarized light transmission infrared absorption spectrometerInfo
- Publication number
- JPS59100223U JPS59100223U JP1982195078U JP19507882U JPS59100223U JP S59100223 U JPS59100223 U JP S59100223U JP 1982195078 U JP1982195078 U JP 1982195078U JP 19507882 U JP19507882 U JP 19507882U JP S59100223 U JPS59100223 U JP S59100223U
- Authority
- JP
- Japan
- Prior art keywords
- infrared absorption
- polarized light
- light transmission
- polarizer
- absorption spectrometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案に係わる偏光透過法による赤外吸収スペ
クトルの測定器の一実施例の立面図、第２図は同じく上
面図、第３図は本考案によらないで通常の透過法で測定
したシリコンウェーハに５μｍの厚さにコーティングし
た窒化シリコンの赤外吸収スペクトルで第４図は本考案
による測定器で測定したスペクトルである。
１・・・スライ多゛−（取付板）、２・・・回転試料台
、３・・・固定板、４・・・偏光子、−５・・・試料固
定用ストッパー、６・・・試料固定用バネ、７・・・試
料。Fig. 1 is an elevational view of an embodiment of an infrared absorption spectrum measuring instrument using the polarized light transmission method according to the present invention, Fig. 2 is a top view of the same, and Fig. 3 is an ordinary transmission method not based on the present invention. Figure 4 shows the infrared absorption spectrum of silicon nitride coated on a silicon wafer to a thickness of 5 μm, measured using the measuring instrument according to the present invention. 1... Sliding plate (mounting plate), 2... Rotating sample stage, 3... Fixing plate, 4... Polarizer, -5... Stopper for fixing the sample, 6... Sample Fixing spring, 7...sample.
Claims (1)
て、測定に用いる赤外光成分のうち試料への入射面に対
し垂直振動成分の光だけを透過する偏光子を固定した取
付板および、偏光子に対し光源“とは反対側になるよう
に回転試料台を０．５〜１５ｃｍ離して固定板に取付け
、さらに偏光子を赤外吸収スペクトル測定装置の試料室
内の赤外光の焦点の位置に配置するよ−うにした事を特
徴とする偏光透過赤外吸収スペクトル測定器。An instrument for measuring infrared absorption spectra using a polarized light transmission method, comprising: a mounting plate fixed with a polarizer that transmits only the vertical vibration component of the infrared light component used for measurement with respect to the plane of incidence on the sample; Attach the rotating sample stage to the fixed plate at a distance of 0.5 to 15 cm so that it is on the opposite side of the polarizer from the light source, and then attach the polarizer to the focal point of the infrared light in the sample chamber of the infrared absorption spectrum measuring device. 1. A polarized light transmission infrared absorption spectrum measuring instrument characterized by being arranged at a certain position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982195078U JPS59100223U (en) | 1982-12-24 | 1982-12-24 | Polarized light transmission infrared absorption spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982195078U JPS59100223U (en) | 1982-12-24 | 1982-12-24 | Polarized light transmission infrared absorption spectrometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59100223U true JPS59100223U (en) | 1984-07-06 |
Family
ID=30419101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982195078U Pending JPS59100223U (en) | 1982-12-24 | 1982-12-24 | Polarized light transmission infrared absorption spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59100223U (en) |
-
1982
- 1982-12-24 JP JP1982195078U patent/JPS59100223U/en active Pending
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