JPS59163950U

JPS59163950U - Optical element inspection equipment

Info

Publication number: JPS59163950U
Application number: JP1983058839U
Authority: JP
Inventors: 白玉　公一; 青木　茂夫
Original assignee: 日本電気株式会社
Priority date: 1983-04-20
Filing date: 1983-04-20
Publication date: 1984-11-02

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図は従来の光学素子の反射率の測定方法の１例を示
すブロック図、第２図は本発明による光学素子測定器の
正面図である。１・・・・・・入射光、２・・・・・・反射光、１０・
・・・・・先受素子、−１１・・・・・・光源、１２．
１３・・・・・・検出器、２１〜２４・・・・・・回転
軸、３０〜３４・・・・・・剛体部材、１０１〜１０３
・・・・・・剛体部材の中心軸。FIG. 1 is a block diagram showing an example of a conventional method for measuring reflectance of an optical element, and FIG. 2 is a front view of an optical element measuring instrument according to the present invention. 1... Incident light, 2... Reflected light, 10.
. . . Priority receiving element, -11 . . . Light source, 12.
13...Detector, 21-24... Rotating shaft, 30-34... Rigid member, 101-103
・・・・・・Center axis of rigid member.

Claims

[Scope of utility model registration request]

first and second rigid members that engage with the first shaft;
a third rigid member engaged with the first rigid member at a second axis parallel to the axis of a fourth rigid member engaged with said second rigid member at a third axis; and a fourth rigid member engaged with said third and fourth rigid members and equidistant from said second and third axes and said axes thereof. a fifth rigid member that engages with the first axis and the fourth axis, respectively, and is formed such that the distance between the first axis and the fourth axis is variable. and a detector fixed to the first and second rigid members, respectively, and the device to be tested is arranged on a plane including an axis connecting the first axis and the fourth axis and the first axis. Optical element inspection equipment that installs and measures surfaces.