JPS58112908U - X-ray film thickness device - Google Patents
X-ray film thickness deviceInfo
- Publication number
- JPS58112908U JPS58112908U JP1041782U JP1041782U JPS58112908U JP S58112908 U JPS58112908 U JP S58112908U JP 1041782 U JP1041782 U JP 1041782U JP 1041782 U JP1041782 U JP 1041782U JP S58112908 U JPS58112908 U JP S58112908U
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- sample
- ray film
- thickness device
- rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
１ 第１図は軸合せ用具図でａは上面図、ｂは正面図
、第２図はこの考案による螢光Ｘ線装置の構成図、第３
図は螢光Ｘ線スペクトラム図である。
１・・・位置表示板、２・・・基板、３・・・十字線、
４・・・Ｘ線管、５・・・コリメータ、６・・・検出器
、７・・・光学スコープ。1. Fig. 1 is a diagram of the alignment tool, a is a top view, b is a front view, Fig. 2 is a configuration diagram of the fluorescent X-ray apparatus according to this invention, and Fig. 3 is a diagram of the alignment tool.
The figure is a fluorescent X-ray spectrum diagram. 1... Position display board, 2... Board, 3... Cross line,
4...X-ray tube, 5...collimator, 6...detector, 7...optical scope.
Claims (1)
より試料の膜厚を測定する装置において、各元素ごとの
薄板を重合させて切断して基板に装着し、上端部に十字
線が形成されている軸合せ用具を備え、この軸合せ用具
で、試料の測定点を決める光学スコープの光軸とＸ線管
よりのＸ線軸を一致せしめるようにしたことを特徴とす
るＸ線膜厚装置。In a device that measures the film thickness of a sample by irradiating the sample with X-rays and detecting the fluorescent X-rays generated, a thin plate for each element is polymerized and cut, mounted on a substrate, and a cross is marked on the top edge. An X-ray device comprising an alignment tool on which a line is formed, and the alignment tool aligns the optical axis of an optical scope for determining a measurement point on a sample with the axis of X-rays emitted from an X-ray tube. Film thickness device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1041782U JPS58112908U (en) | 1982-01-28 | 1982-01-28 | X-ray film thickness device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1041782U JPS58112908U (en) | 1982-01-28 | 1982-01-28 | X-ray film thickness device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58112908U true JPS58112908U (en) | 1983-08-02 |
Family
ID=30023066
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1041782U Pending JPS58112908U (en) | 1982-01-28 | 1982-01-28 | X-ray film thickness device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58112908U (en) |
-
1982
- 1982-01-28 JP JP1041782U patent/JPS58112908U/en active Pending
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