JPS589782A - Cutting method by laser - Google Patents

Cutting method by laser

Info

Publication number
JPS589782A
JPS589782A JP56105556A JP10555681A JPS589782A JP S589782 A JPS589782 A JP S589782A JP 56105556 A JP56105556 A JP 56105556A JP 10555681 A JP10555681 A JP 10555681A JP S589782 A JPS589782 A JP S589782A
Authority
JP
Japan
Prior art keywords
hole
cutting
laser
laser beam
cut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56105556A
Other languages
Japanese (ja)
Other versions
JPS5950436B2 (en
Inventor
Minoru Kobayashi
実 小林
Susumu Hoshinouchi
星之内 進
Masayuki Kaneko
雅之 金子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP56105556A priority Critical patent/JPS5950436B2/en
Publication of JPS589782A publication Critical patent/JPS589782A/en
Publication of JPS5950436B2 publication Critical patent/JPS5950436B2/en
Expired legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/18Working by laser beam, e.g. welding, cutting or boring using absorbing layers on the workpiece, e.g. for marking or protecting purposes

Abstract

PURPOSE:To cut a small aquare hole of good dimensional accuracy by sticking a metallic plate having a specified through hole fast to a material to be worked and performing laser cutting. CONSTITUTION:Metallic plates 5 having through holes which are similar in shape with the hole to be cut in a material to be worked 2 are sttuck fast to the upper and rear surfaces of the material 2, and irradiated by an oscillated laser beam 1. The laser beam is oscillated in the through holes of the metallic plates 5 with locus 7 to perform laser cutting. When laser cutting of a small square hole is performed, thermally influenced part around cut part becomes remarkably small as the circumference of the cut part is sheltered by the metallic plates 5 having sufficient heat capacity and dimensional accuracy of cutting can be fully maintained.

Description

【発明の詳細な説明】 この発明は、小寸法の角穴をレーザビームにより精度よ
く切断するレーザ切断方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser cutting method for accurately cutting a small square hole using a laser beam.

第11?il−用すて従来のレーザ切断方法について説
明する。第1図において、(1)はレーザ発振器よ多出
力されるレーザビーム、(21け被加工物であり、小寸
法の角穴がレーザビーム(INCよシ形成されるもので
ある。(5a) (5b) (ise)は既に切断され
た被加工物121の切断線(4a) (4b) (4c
)は切断すべき形状の切断予定線を示す。なお、第1図
0)は、被加工物(2)の切断部を詳細に示した部分拡
大図であり、レーザビーム(11によセ切断する予定a
m(41より大きく切、断線C3)が現われている。
Eleventh? A conventional laser cutting method using IL-1 will be explained. In Fig. 1, (1) is a laser beam outputted by a laser oscillator (21 pieces), and a small square hole is formed by the laser beam (INC). (5a) (5b) (ise) is the cutting line of the workpiece 121 that has already been cut (4a) (4b) (4c
) indicates the planned cutting line of the shape to be cut. Note that FIG. 1 0) is a partially enlarged view showing the cutting part of the workpiece (2) in detail, and shows that it is scheduled to be cut by the laser beam (11).
m (cut larger than 41, broken line C3) appears.

次に従来のレーザ切断方法について説明する。Next, a conventional laser cutting method will be explained.

第1図(ARにおいて、レーンズ等により集束されたレ
ーザビーム(tiは、被加工物(21の表面で焦点會結
び、被加工物(21を瞬時に蒸発除去させる。したがっ
て被加工物(21,4るいはレーザビーム01を。
FIG. 1 (In AR, the laser beam (ti) focused by Lanes etc. is focused on the surface of the workpiece (21) and instantly evaporates and removes the workpiece (21, 4 or laser beam 01.

要求される切断予定線(41の形状に合わせて移動させ
ると、切断が達成される。この際、切断部(3a)と隣
接する切断部(3b)の間隔が、著しく近接する場合K
id、切断部(5a)と切断部(5b)とで挾まれる部
分が溶は落ちたり、熱影響により表面が変色し、かつ材
質vC叢化會及はしてしまっていた。また、一般にレー
ザ切断によシ切断できる巾は0.2n〜0.6a程度で
あるため第1図(B)に示すように切断予定41(41
が矩形で巾が1.0寵程度の場合に、切断予定線(41
K沿ってレーザビームを移動させると、切断部(3)の
形状は、コーナ部で熱飽和の影響により丸みができ、ま
た直線部では波状になシ寸法精度を充分保つことができ
ないという問題があった。
Cutting is achieved by moving it according to the shape of the required cutting line (41). At this time, if the distance between the cutting part (3a) and the adjacent cutting part (3b) is extremely close, K
id, the portion sandwiched between the cut portion (5a) and the cut portion (5b) was melted, the surface was discolored due to the influence of heat, and the material vC clustered. In addition, since the width that can be generally cut by laser cutting is about 0.2n to 0.6a, the cutting schedule 41 (41
is rectangular and the width is about 1.0 mm, the planned cutting line (41
When the laser beam is moved along K, the shape of the cut section (3) becomes rounded at the corners due to thermal saturation, and the straight section becomes wavy, making it impossible to maintain sufficient dimensional accuracy. there were.

従って、従来のレーザ切断方法によると、小寸法の角穴
や、近接した部分の切断に対して充分な寸法精度が得ら
れないため、切断後に機械的な再加工1)施した如、あ
る%Aはレーザビームの出力制御や被加工物の移動速度
制御などの複雑な制御を施す必要があり、加工工程・加
工時間を増加させたり、加工装置を複雑なものKしてい
た。
Therefore, according to the conventional laser cutting method, sufficient dimensional accuracy cannot be obtained for cutting small square holes or adjacent parts. Method A requires complex control such as laser beam output control and workpiece movement speed control, which increases the processing steps and processing time and complicates the processing equipment.

この発明は上記のような従来の方法の欠点を除去するた
めになされたもので、被加工物のレーザビームが照射さ
れる表面上に、加工形状と同一の形状の貫通孔f有する
金属板を密着させてレーザ切断を行なうようにしたもの
であシ。
This invention was made in order to eliminate the drawbacks of the conventional methods as described above, and a metal plate having a through hole f having the same shape as the processing shape is placed on the surface of the workpiece to be irradiated with the laser beam. It is designed so that laser cutting can be performed while the parts are in close contact with each other.

皐好な加工精度を有するレーザ切断方法を提供摩ること
を目的としている。
The aim is to provide a laser cutting method with excellent processing accuracy.

以下、この発明の一実施例を図について説明する。第2
図(A)は各構成部品の配置、第2図0)はレーザビー
ムの動きを示す。すなわち、第2図(A)においてt(
5a)ij被加工物(21のレーザビーム(11照射面
に密着された金属板であり、切断す  ”べき形状と同
一の形状である貫通孔(61を有する。
An embodiment of the present invention will be described below with reference to the drawings. Second
Figure (A) shows the arrangement of each component, and Figure 2 (0) shows the movement of the laser beam. That is, in FIG. 2(A), t(
5a) The workpiece (21) is a metal plate that is in close contact with the irradiation surface of the laser beam (11), and has a through hole (61) having the same shape as the shape to be cut.

また(5b)は被加工物(21の裏面に密着された金属
板である。被加工物(21に対して金属板(5a) (
Sb)の貫通孔(6)は同じ部分に配置されるりまた。
Further, (5b) is a metal plate closely attached to the back surface of the workpiece (21).The metal plate (5a) (
The through holes (6) of Sb) are arranged in the same part.

第2図P)[おいて(7)は貫通孔(6)の間隔内にお
けるレーザビーム(!1の動きを示す。
In FIG. 2P), (7) shows the movement of the laser beam (!1) within the spacing of the through-hole (6).

また第3図は、金属板(5)に設けられた貫通孔(6)
の断面の一例を示すものであり1貫通孔(6)の幅は、
被加工物(21との密着部で最も狭くなって2沙るもの
である。
Figure 3 also shows the through hole (6) provided in the metal plate (5).
The width of one through hole (6) is as follows.
It is narrowest at the part where it comes in close contact with the workpiece (21).

次に、この発明方法について説明する。先ず。Next, the method of this invention will be explained. First.

12図(A)に示すように被加工物(2)の表・裏面に
As shown in Figure 12 (A), on the front and back surfaces of the workpiece (2).

被加工物(2〉の切断すべき形状と同一の貫通孔(6)
を有する金属板(54密着させ、振動させたレーザビー
ム(11を照射する。レーザビーム(里)は金属板(5
)の貫通孔(6)の間隔内を、第2図CB)K示すよう
な軌跡をもって振動させ、レーザ切断を行なう0 このような方法により小寸法の角穴のレーザ切断を行な
うと、切断部周囲が充分な熱容量をもった金属板(5)
で遮蔽されていることになる大め、切断部外周の熱影響
部が著しく少なくなり。
A through hole (6) that has the same shape as the workpiece (2) to be cut.
The metal plate (54) having a
) is vibrated within the interval between the through holes (6) with a trajectory as shown in Figure 2 CB)K to perform laser cutting. When laser cutting a small square hole using this method, the cut portion Metal plate with sufficient surrounding heat capacity (5)
The heat-affected zone around the periphery of the cutting part is significantly reduced.

また切断の寸法精度が充分維持できるようKなる。In addition, K is set so that the dimensional accuracy of cutting can be maintained sufficiently.

また、第3図に示すように、金属板(5)の貫通孔(6
)の断面を、金属板(5)が被加工物(2)と密着す・
渇部分で最も狭くなる形状にすることにより。
In addition, as shown in FIG. 3, the through hole (6) of the metal plate (5)
), the metal plate (5) is in close contact with the workpiece (2).
By creating a shape that is narrowest at the dry end.

声通孔(6)の端部にレーザビーム(璽)が充分照射さ
れることにな凱切断の寸法精度′がより向上する効果が
得られる。
Since the end portion of the voice hole (6) is sufficiently irradiated with the laser beam (seal), the effect of further improving the dimensional accuracy of the cutter can be obtained.

なお、上記実施例では矩形状の切断について説明したが
、加工部位が近接している被加工物であれば、他の加工
形状に対しても同様の効果を奏する。
In the above embodiment, rectangular cutting has been described, but the same effect can be achieved for other machining shapes as long as the workpieces are machined in close proximity.

以上のように、この発明方法によれば、所定の貫通孔を
有し充分表熱容量を有する金属板を被加工物表面に密着
させてし・−ザ切断を行なっているので、レーザ加工に
よる熱影響部が少なくなり1寸法精度の良好な切断品質
が得られる効果がある。
As described above, according to the method of the present invention, a metal plate having a predetermined through hole and sufficient surface heat capacity is brought into close contact with the surface of the workpiece, and laser cutting is performed. The effect is that the affected area is reduced and good cutting quality with one dimension accuracy can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来のレーザ□切断方法を説明するための図、
第2図はこの発明の一実施例によるレーザ切断方法を説
明するための図、第3図はこの発明の他の実施例を示す
金属板の断面側面図′Cある。 0、ル−ザビーム、(21被加工物、(5)金属板、(
6)貫通孔。 なお図中、同一符号は同一、又は相当部分を示す・ 出願人 工業技術院長 石板誠−
Figure 1 is a diagram for explaining the conventional laser □ cutting method.
FIG. 2 is a diagram for explaining a laser cutting method according to one embodiment of the present invention, and FIG. 3 is a cross-sectional side view 'C of a metal plate showing another embodiment of the present invention. 0, Ruther beam, (21 workpiece, (5) metal plate, (
6) Through hole. In the figures, the same reference numerals indicate the same or corresponding parts. Applicant: Makoto Ishiita, Director of the Agency of Industrial Science and Technology.

Claims (1)

【特許請求の範囲】 0) 被加工物にレーザビームを照射して切断を行なう
方法において、切断すべき形状と同一形状の貫通孔を有
する金属板を、前記被加工物のレーザビーム照射面上に
密着さ、せた状態でレーザビームを照射し、被加工物の
切断を行なうこと全特徴とするレーザ切断方法。 (21金属板をレーザビーム照射面の裏面に密着させた
ことを特徴とする特許請求の範囲第01項記載のレーザ
切断方法。 (3)  金属板に設けられた貫通孔の間隔が被加ニー
物面に接する部分で最も狭くなることを特徴とする特許
請求の範囲第01項記載のレーザ切断方法。 − (41金属tlK設けられた貫通孔の間隔が1.0m以
内であることを特徴とする特許請求の範囲第01項、第
(2:項、まfCは第(31項記載のレーザ切断方法。 (5;  金属板の平面上に振動させたレーザビームを
照射することを特徴とする特許請求の範囲第(0項、第
(21項、第(3)項、第(41項のいずれかに記載の
レーザ切断方法。
[Claims] 0) In a method of cutting a workpiece by irradiating it with a laser beam, a metal plate having a through hole having the same shape as the shape to be cut is placed on the laser beam irradiation surface of the workpiece. A laser cutting method characterized by cutting the workpiece by irradiating the laser beam with the workpiece in close contact with the workpiece. (21) The laser cutting method according to claim 01, characterized in that the metal plate is brought into close contact with the back surface of the laser beam irradiation surface. (3) The distance between the through holes provided in the metal plate is The laser cutting method according to claim 01, characterized in that the laser cutting method is narrowest at the part in contact with the object surface. Claim No. 01, No. (2: No. 31) is a laser cutting method according to No. 31. A laser cutting method according to any one of claims 0, 21, 3, and 41.
JP56105556A 1981-07-08 1981-07-08 Laser cutting method Expired JPS5950436B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56105556A JPS5950436B2 (en) 1981-07-08 1981-07-08 Laser cutting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56105556A JPS5950436B2 (en) 1981-07-08 1981-07-08 Laser cutting method

Publications (2)

Publication Number Publication Date
JPS589782A true JPS589782A (en) 1983-01-20
JPS5950436B2 JPS5950436B2 (en) 1984-12-08

Family

ID=14410821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56105556A Expired JPS5950436B2 (en) 1981-07-08 1981-07-08 Laser cutting method

Country Status (1)

Country Link
JP (1) JPS5950436B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6255621B1 (en) * 2000-01-31 2001-07-03 International Business Machines Corporation Laser cutting method for forming magnetic recording head sliders
USRE43400E1 (en) 2000-09-20 2012-05-22 Electro Scientific Industries, Inc. Laser segmented cutting, multi-step cutting, or both
KR101172028B1 (en) * 2010-04-02 2012-08-07 한국과학기술원 Substrate separation method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6255621B1 (en) * 2000-01-31 2001-07-03 International Business Machines Corporation Laser cutting method for forming magnetic recording head sliders
USRE39001E1 (en) 2000-01-31 2006-03-07 Electro Scientific Industries, Inc. Laser cutting method for forming magnetic recording head sliders
USRE43400E1 (en) 2000-09-20 2012-05-22 Electro Scientific Industries, Inc. Laser segmented cutting, multi-step cutting, or both
USRE43487E1 (en) 2000-09-20 2012-06-26 Electro Scientific Industries, Inc. Laser segmented cutting
USRE43605E1 (en) 2000-09-20 2012-08-28 Electro Scientific Industries, Inc. Laser segmented cutting, multi-step cutting, or both
KR101172028B1 (en) * 2010-04-02 2012-08-07 한국과학기술원 Substrate separation method

Also Published As

Publication number Publication date
JPS5950436B2 (en) 1984-12-08

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