JPS5892746U - 半導体圧力変換器 - Google Patents

半導体圧力変換器

Info

Publication number
JPS5892746U
JPS5892746U JP18624881U JP18624881U JPS5892746U JP S5892746 U JPS5892746 U JP S5892746U JP 18624881 U JP18624881 U JP 18624881U JP 18624881 U JP18624881 U JP 18624881U JP S5892746 U JPS5892746 U JP S5892746U
Authority
JP
Japan
Prior art keywords
pressure transducer
substrate
semiconductor pressure
diaphragm
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18624881U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6246277Y2 (en, 2012
Inventor
山内　治男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP18624881U priority Critical patent/JPS5892746U/ja
Publication of JPS5892746U publication Critical patent/JPS5892746U/ja
Application granted granted Critical
Publication of JPS6246277Y2 publication Critical patent/JPS6246277Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
JP18624881U 1981-12-16 1981-12-16 半導体圧力変換器 Granted JPS5892746U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18624881U JPS5892746U (ja) 1981-12-16 1981-12-16 半導体圧力変換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18624881U JPS5892746U (ja) 1981-12-16 1981-12-16 半導体圧力変換器

Publications (2)

Publication Number Publication Date
JPS5892746U true JPS5892746U (ja) 1983-06-23
JPS6246277Y2 JPS6246277Y2 (en, 2012) 1987-12-12

Family

ID=29988026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18624881U Granted JPS5892746U (ja) 1981-12-16 1981-12-16 半導体圧力変換器

Country Status (1)

Country Link
JP (1) JPS5892746U (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59150480A (ja) * 1983-02-04 1984-08-28 Toshiba Corp 半導体圧力変換装置
JP2013002942A (ja) * 2011-06-16 2013-01-07 Honda Motor Co Ltd 力覚センサチップ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54131892A (en) * 1978-04-05 1979-10-13 Hitachi Ltd Semiconductor pressure converter

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54131892A (en) * 1978-04-05 1979-10-13 Hitachi Ltd Semiconductor pressure converter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59150480A (ja) * 1983-02-04 1984-08-28 Toshiba Corp 半導体圧力変換装置
JP2013002942A (ja) * 2011-06-16 2013-01-07 Honda Motor Co Ltd 力覚センサチップ

Also Published As

Publication number Publication date
JPS6246277Y2 (en, 2012) 1987-12-12

Similar Documents

Publication Publication Date Title
JPS5892746U (ja) 半導体圧力変換器
JPS58124444U (ja) 導電性粘着テ−プ
JPS5892745U (ja) 半導体圧力変換器
JPS62126836U (en, 2012)
JPS6018537U (ja) チツプコンデンサ
JPS59177949U (ja) 半導体装置
JPS6133521U (ja) 短冊型圧電振動子
JPS59179352U (ja) 半導体圧力センサ
JPS5936696U (ja) 圧電振動子
JPS59164241U (ja) セラミツクパツケ−ジ
JPS6122369U (ja) 半導体圧力センサ
JPS6144541U (ja) 半導体容量形圧力センサ
JPS59122537U (ja) シリコンダイアフラム形圧力変換器
JPS5821836U (ja) 圧力センサ
JPS5933397U (ja) 圧電発音体
JPS59111059U (ja) 圧電バイモルフ素子
JPS5936131U (ja) 感圧素子
JPS6118628U (ja) 圧電振動部品
JPS6087128U (ja) 薄型入力装置
JPS60195002U (ja) 簡易電極
JPS6118634U (ja) 表面弾性波装置
JPS63132475U (en, 2012)
JPS5933643U (ja) 感圧素子
JPS59125130U (ja) フイルタ
JPS60102226U (ja) 導電性粘着テ−プまたはシ−ト