JPS5891407A - シリコン回折格子の製造方法 - Google Patents

シリコン回折格子の製造方法

Info

Publication number
JPS5891407A
JPS5891407A JP18907681A JP18907681A JPS5891407A JP S5891407 A JPS5891407 A JP S5891407A JP 18907681 A JP18907681 A JP 18907681A JP 18907681 A JP18907681 A JP 18907681A JP S5891407 A JPS5891407 A JP S5891407A
Authority
JP
Japan
Prior art keywords
etching
diffraction grating
silicon
mask
single crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18907681A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6314322B2 (enrdf_load_stackoverflow
Inventor
Tsuneaki Oota
太田　恒明
Michiharu Hosoya
細矢　路晴
Yoshio Kawai
義雄 川井
Takaaki Miyashita
高明 宮下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP18907681A priority Critical patent/JPS5891407A/ja
Publication of JPS5891407A publication Critical patent/JPS5891407A/ja
Publication of JPS6314322B2 publication Critical patent/JPS6314322B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP18907681A 1981-11-27 1981-11-27 シリコン回折格子の製造方法 Granted JPS5891407A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18907681A JPS5891407A (ja) 1981-11-27 1981-11-27 シリコン回折格子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18907681A JPS5891407A (ja) 1981-11-27 1981-11-27 シリコン回折格子の製造方法

Publications (2)

Publication Number Publication Date
JPS5891407A true JPS5891407A (ja) 1983-05-31
JPS6314322B2 JPS6314322B2 (enrdf_load_stackoverflow) 1988-03-30

Family

ID=16234899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18907681A Granted JPS5891407A (ja) 1981-11-27 1981-11-27 シリコン回折格子の製造方法

Country Status (1)

Country Link
JP (1) JPS5891407A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6180822A (ja) * 1984-09-27 1986-04-24 Nec Corp ブレ−ズド回折格子の作成方法
JPH0749403A (ja) * 1993-04-12 1995-02-21 Hughes Aircraft Co マイクロ光学素子の製造方法
US6517734B1 (en) * 2000-07-13 2003-02-11 Network Photonics, Inc. Grating fabrication process using combined crystalline-dependent and crystalline-independent etching
JP2003075622A (ja) * 2001-09-05 2003-03-12 Toshiba Corp 回折格子、回折格子の加工方法及び光学要素

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6180822A (ja) * 1984-09-27 1986-04-24 Nec Corp ブレ−ズド回折格子の作成方法
JPH0749403A (ja) * 1993-04-12 1995-02-21 Hughes Aircraft Co マイクロ光学素子の製造方法
US6517734B1 (en) * 2000-07-13 2003-02-11 Network Photonics, Inc. Grating fabrication process using combined crystalline-dependent and crystalline-independent etching
JP2003075622A (ja) * 2001-09-05 2003-03-12 Toshiba Corp 回折格子、回折格子の加工方法及び光学要素

Also Published As

Publication number Publication date
JPS6314322B2 (enrdf_load_stackoverflow) 1988-03-30

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