JPS5889805A - 磁気バブルメモリ素子作成法 - Google Patents

磁気バブルメモリ素子作成法

Info

Publication number
JPS5889805A
JPS5889805A JP56187702A JP18770281A JPS5889805A JP S5889805 A JPS5889805 A JP S5889805A JP 56187702 A JP56187702 A JP 56187702A JP 18770281 A JP18770281 A JP 18770281A JP S5889805 A JPS5889805 A JP S5889805A
Authority
JP
Japan
Prior art keywords
reticle
wafer
bubble memory
memory element
magnetic bubble
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56187702A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0213392B2 (enrdf_load_stackoverflow
Inventor
Niwaji Majima
庭司 間島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56187702A priority Critical patent/JPS5889805A/ja
Publication of JPS5889805A publication Critical patent/JPS5889805A/ja
Publication of JPH0213392B2 publication Critical patent/JPH0213392B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)
JP56187702A 1981-11-25 1981-11-25 磁気バブルメモリ素子作成法 Granted JPS5889805A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56187702A JPS5889805A (ja) 1981-11-25 1981-11-25 磁気バブルメモリ素子作成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56187702A JPS5889805A (ja) 1981-11-25 1981-11-25 磁気バブルメモリ素子作成法

Publications (2)

Publication Number Publication Date
JPS5889805A true JPS5889805A (ja) 1983-05-28
JPH0213392B2 JPH0213392B2 (enrdf_load_stackoverflow) 1990-04-04

Family

ID=16210658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56187702A Granted JPS5889805A (ja) 1981-11-25 1981-11-25 磁気バブルメモリ素子作成法

Country Status (1)

Country Link
JP (1) JPS5889805A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143785A (en) * 1981-02-27 1982-09-06 Hitachi Ltd Magnetic bubble memory element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143785A (en) * 1981-02-27 1982-09-06 Hitachi Ltd Magnetic bubble memory element

Also Published As

Publication number Publication date
JPH0213392B2 (enrdf_load_stackoverflow) 1990-04-04

Similar Documents

Publication Publication Date Title
US3967002A (en) Method for making high density magnetic bubble domain system
CA1071761A (en) Method for making multilayer devices using only a single critical masking step
JPH0130408B2 (enrdf_load_stackoverflow)
JPS5889805A (ja) 磁気バブルメモリ素子作成法
JPS5821808B2 (ja) 磁気バブルドメイン装置の製造方法
Broers Choices for tomorrow's chips
JPS6233580B2 (enrdf_load_stackoverflow)
JPS62147728A (ja) 露光方法
JPS5933690A (ja) 磁気バブルメモリ素子
JPH0355910B2 (enrdf_load_stackoverflow)
JPS6235102B2 (enrdf_load_stackoverflow)
JPS61123083A (ja) 磁気バブルメモリ素子
JPS6117066B2 (enrdf_load_stackoverflow)
JPS5940388A (ja) コンテイギユアスデイスク・バブル素子
JPS6118276B2 (enrdf_load_stackoverflow)
JPS63129592A (ja) 磁気バブルメモリチツプの製造方法
JPS58159289A (ja) 磁気バブルメモリ素子およびその製造方法
JPS6019159B2 (ja) 磁気バブル素子製作用ホトマスク
JPS59121681A (ja) イオン注入バブルデバイスのブロツクレプリケ−タ
JPS5827914B2 (ja) バブルメモリチツプパタ−ン欠陥修正方法
JPS6061979A (ja) 磁気バブルメモリ素子
JPS59160880A (ja) 磁気バブルメモリデバイス
JPS61296593A (ja) 磁気バブルメモリ素子
JPS6369089A (ja) 磁気バブルメモリ素子
JPS62209826A (ja) 微細パタ−ンの製造方法