JPS5888834A - 磁気記録媒体の製造方法 - Google Patents
磁気記録媒体の製造方法Info
- Publication number
- JPS5888834A JPS5888834A JP18756081A JP18756081A JPS5888834A JP S5888834 A JPS5888834 A JP S5888834A JP 18756081 A JP18756081 A JP 18756081A JP 18756081 A JP18756081 A JP 18756081A JP S5888834 A JPS5888834 A JP S5888834A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- magnetic recording
- recording medium
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 11
- 238000001816 cooling Methods 0.000 claims abstract description 5
- 230000001590 oxidative effect Effects 0.000 claims abstract 2
- 238000007740 vapor deposition Methods 0.000 claims description 9
- 229920000642 polymer Polymers 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 abstract description 12
- 238000005260 corrosion Methods 0.000 abstract description 9
- 230000007797 corrosion Effects 0.000 abstract description 9
- 239000000463 material Substances 0.000 abstract description 7
- 238000000151 deposition Methods 0.000 abstract description 3
- 238000012544 monitoring process Methods 0.000 abstract description 2
- 238000004299 exfoliation Methods 0.000 abstract 1
- 229910044991 metal oxide Inorganic materials 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 36
- 238000000034 method Methods 0.000 description 13
- 239000010408 film Substances 0.000 description 10
- 230000008020 evaporation Effects 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 8
- 239000011241 protective layer Substances 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- -1 Polyethylene terephthalate Polymers 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 229910000521 B alloy Inorganic materials 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 235000006708 antioxidants Nutrition 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 150000004671 saturated fatty acids Chemical class 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical class N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 229910003145 α-Fe2O3 Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/85—Coating a support with a magnetic layer by vapour deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18756081A JPS5888834A (ja) | 1981-11-20 | 1981-11-20 | 磁気記録媒体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18756081A JPS5888834A (ja) | 1981-11-20 | 1981-11-20 | 磁気記録媒体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5888834A true JPS5888834A (ja) | 1983-05-27 |
| JPH0319621B2 JPH0319621B2 (enrdf_load_stackoverflow) | 1991-03-15 |
Family
ID=16208214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18756081A Granted JPS5888834A (ja) | 1981-11-20 | 1981-11-20 | 磁気記録媒体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5888834A (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5841443A (ja) * | 1981-09-04 | 1983-03-10 | Fuji Photo Film Co Ltd | 磁気記録媒体の製法 |
-
1981
- 1981-11-20 JP JP18756081A patent/JPS5888834A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5841443A (ja) * | 1981-09-04 | 1983-03-10 | Fuji Photo Film Co Ltd | 磁気記録媒体の製法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0319621B2 (enrdf_load_stackoverflow) | 1991-03-15 |
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