JPS5886509U - 表面検査装置 - Google Patents

表面検査装置

Info

Publication number
JPS5886509U
JPS5886509U JP18127581U JP18127581U JPS5886509U JP S5886509 U JPS5886509 U JP S5886509U JP 18127581 U JP18127581 U JP 18127581U JP 18127581 U JP18127581 U JP 18127581U JP S5886509 U JPS5886509 U JP S5886509U
Authority
JP
Japan
Prior art keywords
lens system
light source
convergent lens
source device
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18127581U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6316964Y2 (en:Method
Inventor
実 勝山
公一 釘宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP18127581U priority Critical patent/JPS5886509U/ja
Publication of JPS5886509U publication Critical patent/JPS5886509U/ja
Application granted granted Critical
Publication of JPS6316964Y2 publication Critical patent/JPS6316964Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP18127581U 1981-12-04 1981-12-04 表面検査装置 Granted JPS5886509U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18127581U JPS5886509U (ja) 1981-12-04 1981-12-04 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18127581U JPS5886509U (ja) 1981-12-04 1981-12-04 表面検査装置

Publications (2)

Publication Number Publication Date
JPS5886509U true JPS5886509U (ja) 1983-06-11
JPS6316964Y2 JPS6316964Y2 (en:Method) 1988-05-13

Family

ID=29978606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18127581U Granted JPS5886509U (ja) 1981-12-04 1981-12-04 表面検査装置

Country Status (1)

Country Link
JP (1) JPS5886509U (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020521143A (ja) * 2017-05-24 2020-07-16 サントル ナシオナル ドゥ ラ ルシェルシェ シアンティフィクＣｅｎｔｒｅ Ｎａｔｉｏｎａｌ Ｄｅ Ｌａ Ｒｅｃｈｅｒｃｈｅ Ｓｃｉｅｎｔｉｆｉｑｕｅ 反射面の曲率を測定する方法及び関連する光学デバイス

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020521143A (ja) * 2017-05-24 2020-07-16 サントル ナシオナル ドゥ ラ ルシェルシェ シアンティフィクＣｅｎｔｒｅ Ｎａｔｉｏｎａｌ Ｄｅ Ｌａ Ｒｅｃｈｅｒｃｈｅ Ｓｃｉｅｎｔｉｆｉｑｕｅ 反射面の曲率を測定する方法及び関連する光学デバイス

Also Published As

Publication number Publication date
JPS6316964Y2 (en:Method) 1988-05-13

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