JPS587973Y2 - 電子顕微鏡におけるビ−ム電流測定装置 - Google Patents

電子顕微鏡におけるビ−ム電流測定装置

Info

Publication number
JPS587973Y2
JPS587973Y2 JP1976134032U JP13403276U JPS587973Y2 JP S587973 Y2 JPS587973 Y2 JP S587973Y2 JP 1976134032 U JP1976134032 U JP 1976134032U JP 13403276 U JP13403276 U JP 13403276U JP S587973 Y2 JPS587973 Y2 JP S587973Y2
Authority
JP
Japan
Prior art keywords
sample holder
hole
beam current
electron beam
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976134032U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5351171U (enrdf_load_stackoverflow
Inventor
幹夫 成瀬
久雄 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1976134032U priority Critical patent/JPS587973Y2/ja
Publication of JPS5351171U publication Critical patent/JPS5351171U/ja
Application granted granted Critical
Publication of JPS587973Y2 publication Critical patent/JPS587973Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1976134032U 1976-10-05 1976-10-05 電子顕微鏡におけるビ−ム電流測定装置 Expired JPS587973Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976134032U JPS587973Y2 (ja) 1976-10-05 1976-10-05 電子顕微鏡におけるビ−ム電流測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976134032U JPS587973Y2 (ja) 1976-10-05 1976-10-05 電子顕微鏡におけるビ−ム電流測定装置

Publications (2)

Publication Number Publication Date
JPS5351171U JPS5351171U (enrdf_load_stackoverflow) 1978-05-01
JPS587973Y2 true JPS587973Y2 (ja) 1983-02-12

Family

ID=28742984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976134032U Expired JPS587973Y2 (ja) 1976-10-05 1976-10-05 電子顕微鏡におけるビ−ム電流測定装置

Country Status (1)

Country Link
JP (1) JPS587973Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60260353A (ja) * 1984-06-07 1985-12-23 Oki Electric Ind Co Ltd サ−マルヘツド

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444537Y2 (enrdf_load_stackoverflow) * 1974-07-26 1979-12-21
JPS5147363A (enrdf_load_stackoverflow) * 1974-10-21 1976-04-22 Nippon Electron Optics Lab
JPS529366A (en) * 1975-07-11 1977-01-24 Hitachi Ltd Sample equipment for electron microscopes, etc

Also Published As

Publication number Publication date
JPS5351171U (enrdf_load_stackoverflow) 1978-05-01

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