JPS587973Y2 - 電子顕微鏡におけるビ−ム電流測定装置 - Google Patents
電子顕微鏡におけるビ−ム電流測定装置Info
- Publication number
- JPS587973Y2 JPS587973Y2 JP1976134032U JP13403276U JPS587973Y2 JP S587973 Y2 JPS587973 Y2 JP S587973Y2 JP 1976134032 U JP1976134032 U JP 1976134032U JP 13403276 U JP13403276 U JP 13403276U JP S587973 Y2 JPS587973 Y2 JP S587973Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample holder
- hole
- beam current
- electron beam
- aperture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976134032U JPS587973Y2 (ja) | 1976-10-05 | 1976-10-05 | 電子顕微鏡におけるビ−ム電流測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976134032U JPS587973Y2 (ja) | 1976-10-05 | 1976-10-05 | 電子顕微鏡におけるビ−ム電流測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5351171U JPS5351171U (enrdf_load_stackoverflow) | 1978-05-01 |
| JPS587973Y2 true JPS587973Y2 (ja) | 1983-02-12 |
Family
ID=28742984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976134032U Expired JPS587973Y2 (ja) | 1976-10-05 | 1976-10-05 | 電子顕微鏡におけるビ−ム電流測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS587973Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60260353A (ja) * | 1984-06-07 | 1985-12-23 | Oki Electric Ind Co Ltd | サ−マルヘツド |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5444537Y2 (enrdf_load_stackoverflow) * | 1974-07-26 | 1979-12-21 | ||
| JPS5147363A (enrdf_load_stackoverflow) * | 1974-10-21 | 1976-04-22 | Nippon Electron Optics Lab | |
| JPS529366A (en) * | 1975-07-11 | 1977-01-24 | Hitachi Ltd | Sample equipment for electron microscopes, etc |
-
1976
- 1976-10-05 JP JP1976134032U patent/JPS587973Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5351171U (enrdf_load_stackoverflow) | 1978-05-01 |
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