JPS5872059A - 半導体装置、流量計及びその製造方法 - Google Patents
半導体装置、流量計及びその製造方法Info
- Publication number
- JPS5872059A JPS5872059A JP17647382A JP17647382A JPS5872059A JP S5872059 A JPS5872059 A JP S5872059A JP 17647382 A JP17647382 A JP 17647382A JP 17647382 A JP17647382 A JP 17647382A JP S5872059 A JPS5872059 A JP S5872059A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- semiconductor
- item
- predetermined
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 172
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 239000000758 substrate Substances 0.000 claims description 74
- 229910000889 permalloy Inorganic materials 0.000 claims description 30
- 238000006243 chemical reaction Methods 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 21
- 238000009413 insulation Methods 0.000 claims description 17
- 238000005530 etching Methods 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 6
- 230000002265 prevention Effects 0.000 claims description 6
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims 1
- 235000017491 Bambusa tulda Nutrition 0.000 claims 1
- 206010010356 Congenital anomaly Diseases 0.000 claims 1
- 206010019468 Hemiplegia Diseases 0.000 claims 1
- 240000007594 Oryza sativa Species 0.000 claims 1
- 235000007164 Oryza sativa Nutrition 0.000 claims 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims 1
- 244000082204 Phyllostachys viridis Species 0.000 claims 1
- 239000011425 bamboo Substances 0.000 claims 1
- 230000004888 barrier function Effects 0.000 claims 1
- 239000000428 dust Substances 0.000 claims 1
- 235000009566 rice Nutrition 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 42
- 239000007789 gas Substances 0.000 description 36
- 230000008859 change Effects 0.000 description 19
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 16
- 229910052581 Si3N4 Inorganic materials 0.000 description 14
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 14
- 239000012530 fluid Substances 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 230000008901 benefit Effects 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 229910052697 platinum Inorganic materials 0.000 description 8
- 239000010409 thin film Substances 0.000 description 8
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 235000009508 confectionery Nutrition 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 235000006693 Cassia laevigata Nutrition 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 241000735631 Senna pendula Species 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 229910021357 chromium silicide Inorganic materials 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000026041 response to humidity Effects 0.000 description 1
- 229940124513 senna glycoside Drugs 0.000 description 1
- 239000011540 sensing material Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 235000014347 soups Nutrition 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Landscapes
- Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US31026181A | 1981-10-09 | 1981-10-09 | |
| US310345 | 1981-10-09 | ||
| US310262 | 1981-10-09 | ||
| US310344 | 1981-10-09 | ||
| US310264 | 1981-10-09 | ||
| US310263 | 1981-10-09 | ||
| US310261 | 1981-10-09 |
Related Child Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19123589A Division JPH0361830A (ja) | 1989-07-24 | 1989-07-24 | 圧力センサ |
| JP2264897A Division JP2547356B2 (ja) | 1981-10-09 | 1990-10-02 | センサ |
| JP6176190A Division JP2553022B2 (ja) | 1981-10-09 | 1994-07-06 | 半導体装置およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5872059A true JPS5872059A (ja) | 1983-04-28 |
| JPH0352028B2 JPH0352028B2 (enrdf_load_stackoverflow) | 1991-08-08 |
Family
ID=23201691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17647382A Granted JPS5872059A (ja) | 1981-10-09 | 1982-10-08 | 半導体装置、流量計及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5872059A (enrdf_load_stackoverflow) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6050419A (ja) * | 1983-08-26 | 1985-03-20 | イノバス | サ−マル質量流量計 |
| JPS6188532A (ja) * | 1984-10-01 | 1986-05-06 | ハネウエル・インコーポレーテツド | 集積半導体デバイスとその製造方法 |
| JPS62203051A (ja) * | 1986-03-01 | 1987-09-07 | Ricoh Seiki Kk | ガス検出装置 |
| JPS62282270A (ja) * | 1986-01-07 | 1987-12-08 | ソ−ン イ−エムアイ ピ−エルシ− | 流れ感知装置 |
| JPS63145954A (ja) * | 1986-07-29 | 1988-06-18 | Sharp Corp | 感湿素子 |
| JPH04295768A (ja) * | 1991-03-25 | 1992-10-20 | Yamatake Honeywell Co Ltd | 流体検出装置 |
| JPH04295767A (ja) * | 1991-03-25 | 1992-10-20 | Yamatake Honeywell Co Ltd | 流体検出装置 |
| US6591683B1 (en) | 2000-07-13 | 2003-07-15 | Mitsubishi Denki Kabushiki Kaisha | Pressure sensor |
| US6619130B1 (en) | 2000-07-31 | 2003-09-16 | Mitsubishi Denki Kabushiki Kaisha | Pressure sensor |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0894561A (ja) * | 1994-09-26 | 1996-04-12 | Fuji Electric Co Ltd | ガスセンサおよびその製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49113665A (enrdf_load_stackoverflow) * | 1973-02-07 | 1974-10-30 | ||
| JPS5618381A (en) * | 1979-07-25 | 1981-02-21 | Ricoh Kk | Electric heater |
-
1982
- 1982-10-08 JP JP17647382A patent/JPS5872059A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49113665A (enrdf_load_stackoverflow) * | 1973-02-07 | 1974-10-30 | ||
| JPS5618381A (en) * | 1979-07-25 | 1981-02-21 | Ricoh Kk | Electric heater |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6050419A (ja) * | 1983-08-26 | 1985-03-20 | イノバス | サ−マル質量流量計 |
| JPS6188532A (ja) * | 1984-10-01 | 1986-05-06 | ハネウエル・インコーポレーテツド | 集積半導体デバイスとその製造方法 |
| JPS62282270A (ja) * | 1986-01-07 | 1987-12-08 | ソ−ン イ−エムアイ ピ−エルシ− | 流れ感知装置 |
| JPS62203051A (ja) * | 1986-03-01 | 1987-09-07 | Ricoh Seiki Kk | ガス検出装置 |
| JPS63145954A (ja) * | 1986-07-29 | 1988-06-18 | Sharp Corp | 感湿素子 |
| JPH04295768A (ja) * | 1991-03-25 | 1992-10-20 | Yamatake Honeywell Co Ltd | 流体検出装置 |
| JPH04295767A (ja) * | 1991-03-25 | 1992-10-20 | Yamatake Honeywell Co Ltd | 流体検出装置 |
| US6591683B1 (en) | 2000-07-13 | 2003-07-15 | Mitsubishi Denki Kabushiki Kaisha | Pressure sensor |
| US6619130B1 (en) | 2000-07-31 | 2003-09-16 | Mitsubishi Denki Kabushiki Kaisha | Pressure sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0352028B2 (enrdf_load_stackoverflow) | 1991-08-08 |
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