JPS5863960U - 平面研削装置 - Google Patents

平面研削装置

Info

Publication number
JPS5863960U
JPS5863960U JP1981159468U JP15946881U JPS5863960U JP S5863960 U JPS5863960 U JP S5863960U JP 1981159468 U JP1981159468 U JP 1981159468U JP 15946881 U JP15946881 U JP 15946881U JP S5863960 U JPS5863960 U JP S5863960U
Authority
JP
Japan
Prior art keywords
carrier
grinding device
surface grinding
periphery
workpiece mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1981159468U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6125976Y2 (enrdf_load_stackoverflow
Inventor
新井 初雪
Original Assignee
スピ−ドフアム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by スピ−ドフアム株式会社 filed Critical スピ−ドフアム株式会社
Priority to JP1981159468U priority Critical patent/JPS5863960U/ja
Publication of JPS5863960U publication Critical patent/JPS5863960U/ja
Application granted granted Critical
Publication of JPS6125976Y2 publication Critical patent/JPS6125976Y2/ja
Granted legal-status Critical Current

Links

JP1981159468U 1981-10-26 1981-10-26 平面研削装置 Granted JPS5863960U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981159468U JPS5863960U (ja) 1981-10-26 1981-10-26 平面研削装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981159468U JPS5863960U (ja) 1981-10-26 1981-10-26 平面研削装置

Publications (2)

Publication Number Publication Date
JPS5863960U true JPS5863960U (ja) 1983-04-28
JPS6125976Y2 JPS6125976Y2 (enrdf_load_stackoverflow) 1986-08-05

Family

ID=29951922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981159468U Granted JPS5863960U (ja) 1981-10-26 1981-10-26 平面研削装置

Country Status (1)

Country Link
JP (1) JPS5863960U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6125976Y2 (enrdf_load_stackoverflow) 1986-08-05

Similar Documents

Publication Publication Date Title
JPS5863960U (ja) 平面研削装置
JPS5968605U (ja) 制振用複合鋼板
JPS60103648U (ja) 両面ラツピング装置
JPS5847459U (ja) ラツプ盤
JPS5997858U (ja) 工作物駆動装置
JPS6124147U (ja) 平面研摩装置
JPS598760U (ja) 両頭平面研削盤用といし
JPS58106141U (ja) 両面研摩装置
JPS60105649U (ja) 歯車の焼入用治具
JPS5855844U (ja) ダブルキヤリア方式のラツプ盤
JPS6084251U (ja) 遊星回転式研摩装置
JPS598755U (ja) 被研磨部材の貼着板
JPS6097252U (ja) 片面精密研磨装置構造
JPS5919258U (ja) 被研磨部材の貼着板
JPS6030540U (ja) ウェ−ハ積載テ−ブルの冷却装置
JPS5840360U (ja) 難切断材料用超砥粒内周刃
JPS60186067U (ja) 液塗工用具
JPS5867686U (ja) 吸着ヘツド
JPS615544U (ja) 工作機械のテ−ブル装置
JPS5870863U (ja) 平面ラツプ盤の修正定盤
JPS60129141U (ja) 半導体装置
JPS59100556U (ja) ポリシング装置用キヤリヤ
JPS60194455U (ja) ワ−ク支持装置
JPS58161906U (ja) 薄板ワ−ク移送用シユ−ト
JPS58117327U (ja) 被加工物固定用治具