JPS5862544A - 欠陥検査装置 - Google Patents

欠陥検査装置

Info

Publication number
JPS5862544A
JPS5862544A JP16144181A JP16144181A JPS5862544A JP S5862544 A JPS5862544 A JP S5862544A JP 16144181 A JP16144181 A JP 16144181A JP 16144181 A JP16144181 A JP 16144181A JP S5862544 A JPS5862544 A JP S5862544A
Authority
JP
Japan
Prior art keywords
light
foreign matter
light receiving
scattered light
foreign
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16144181A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0343581B2 (enrdf_load_stackoverflow
Inventor
Shoichi Tanimoto
昭一 谷元
Kazunori Imamura
今村　和則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP16144181A priority Critical patent/JPS5862544A/ja
Priority to US06/343,552 priority patent/US4468120A/en
Publication of JPS5862544A publication Critical patent/JPS5862544A/ja
Publication of JPH0343581B2 publication Critical patent/JPH0343581B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP16144181A 1981-02-04 1981-10-09 欠陥検査装置 Granted JPS5862544A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP16144181A JPS5862544A (ja) 1981-10-09 1981-10-09 欠陥検査装置
US06/343,552 US4468120A (en) 1981-02-04 1982-01-28 Foreign substance inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16144181A JPS5862544A (ja) 1981-10-09 1981-10-09 欠陥検査装置

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP63039615A Division JPS63241343A (ja) 1988-02-24 1988-02-24 欠陥検査装置
JP63039614A Division JPS63241342A (ja) 1988-02-24 1988-02-24 欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS5862544A true JPS5862544A (ja) 1983-04-14
JPH0343581B2 JPH0343581B2 (enrdf_load_stackoverflow) 1991-07-03

Family

ID=15735169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16144181A Granted JPS5862544A (ja) 1981-02-04 1981-10-09 欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS5862544A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61260632A (ja) * 1985-05-15 1986-11-18 Hitachi Ltd 異物検査装置
JPS63186132A (ja) * 1987-01-29 1988-08-01 Nikon Corp 異物検査装置
US5255089A (en) * 1992-03-26 1993-10-19 International Business Machines Corporation Portable particle detector assembly

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56115945A (en) * 1980-02-18 1981-09-11 Hitachi Electronics Eng Co Ltd Detecting device for defect of panel plate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56115945A (en) * 1980-02-18 1981-09-11 Hitachi Electronics Eng Co Ltd Detecting device for defect of panel plate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61260632A (ja) * 1985-05-15 1986-11-18 Hitachi Ltd 異物検査装置
JPS63186132A (ja) * 1987-01-29 1988-08-01 Nikon Corp 異物検査装置
US5255089A (en) * 1992-03-26 1993-10-19 International Business Machines Corporation Portable particle detector assembly

Also Published As

Publication number Publication date
JPH0343581B2 (enrdf_load_stackoverflow) 1991-07-03

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