JPS5861270A - 化学的蒸着炉 - Google Patents

化学的蒸着炉

Info

Publication number
JPS5861270A
JPS5861270A JP15816681A JP15816681A JPS5861270A JP S5861270 A JPS5861270 A JP S5861270A JP 15816681 A JP15816681 A JP 15816681A JP 15816681 A JP15816681 A JP 15816681A JP S5861270 A JPS5861270 A JP S5861270A
Authority
JP
Japan
Prior art keywords
tubular body
vapor deposition
chemical vapor
materials
sealed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15816681A
Other languages
English (en)
Japanese (ja)
Other versions
JPS619388B2 (enExample
Inventor
Chikara Hayashi
林　主税
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP15816681A priority Critical patent/JPS5861270A/ja
Publication of JPS5861270A publication Critical patent/JPS5861270A/ja
Publication of JPS619388B2 publication Critical patent/JPS619388B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation by radiant heating of the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP15816681A 1981-10-06 1981-10-06 化学的蒸着炉 Granted JPS5861270A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15816681A JPS5861270A (ja) 1981-10-06 1981-10-06 化学的蒸着炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15816681A JPS5861270A (ja) 1981-10-06 1981-10-06 化学的蒸着炉

Publications (2)

Publication Number Publication Date
JPS5861270A true JPS5861270A (ja) 1983-04-12
JPS619388B2 JPS619388B2 (enExample) 1986-03-22

Family

ID=15665707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15816681A Granted JPS5861270A (ja) 1981-10-06 1981-10-06 化学的蒸着炉

Country Status (1)

Country Link
JP (1) JPS5861270A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007061180A (ja) * 2005-08-29 2007-03-15 Hamamatsu Kagaku Gijutsu Kenkyu Shinkokai 訓練装置
JP2007268146A (ja) * 2006-03-31 2007-10-18 Matsushita Electric Works Ltd 運動補助装置
JP2018534426A (ja) * 2015-11-19 2018-11-22 サフラン・セラミックス 蒸着法により１本または複数のヤーンをコーティングする装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007061180A (ja) * 2005-08-29 2007-03-15 Hamamatsu Kagaku Gijutsu Kenkyu Shinkokai 訓練装置
JP2007268146A (ja) * 2006-03-31 2007-10-18 Matsushita Electric Works Ltd 運動補助装置
JP2018534426A (ja) * 2015-11-19 2018-11-22 サフラン・セラミックス 蒸着法により１本または複数のヤーンをコーティングする装置

Also Published As

Publication number Publication date
JPS619388B2 (enExample) 1986-03-22

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