JPS5858338U - semiconductor equipment - Google Patents

semiconductor equipment

Info

Publication number
JPS5858338U
JPS5858338U JP8462682U JP8462682U JPS5858338U JP S5858338 U JPS5858338 U JP S5858338U JP 8462682 U JP8462682 U JP 8462682U JP 8462682 U JP8462682 U JP 8462682U JP S5858338 U JPS5858338 U JP S5858338U
Authority
JP
Japan
Prior art keywords
bonding
semiconductor
semiconductor equipment
metal
support plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8462682U
Other languages
Japanese (ja)
Inventor
実 酒井
滝田 順一
赤羽根 克己
高星 淳
和島 幸一
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP8462682U priority Critical patent/JPS5858338U/en
Publication of JPS5858338U publication Critical patent/JPS5858338U/en
Pending legal-status Critical Current

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  • Die Bonding (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図、第2図は従来のインターナルバッファー電極の
固定構造図、第3図は、本考案によるイ  。 ンターナルバツファー電極の固定構造図、第4図、第5
図は、本考案によるインターナルバッファー電極の固定
構造の変形例を示す図面である。 1・・・銅カバー、2・・・インターナルバッファー電
極、3・・・接合表面安定材、4・・・銅ベース、5・
・・半田層、6・・・接合支持板、7・・・セラミック
シール、8・・・半導体接合基板、9・・・銅カバー凸
部、10・・・固定用小穴、11・・・インターナルバ
ッファー電極凸部、12・・・銅カバー凹部、13・・
・リード線。
Figures 1 and 2 are diagrams of the fixed structure of a conventional internal buffer electrode, and Figure 3 is a diagram of the fixed structure of the internal buffer electrode according to the present invention. Fixed structure diagram of internal buffer electrode, Figures 4 and 5
The figure is a diagram showing a modification of the internal buffer electrode fixing structure according to the present invention. DESCRIPTION OF SYMBOLS 1... Copper cover, 2... Internal buffer electrode, 3... Joint surface stabilizer, 4... Copper base, 5...
... Solder layer, 6... Bonding support plate, 7... Ceramic seal, 8... Semiconductor bonding board, 9... Copper cover convex portion, 10... Small hole for fixing, 11... Inter Null buffer electrode convex part, 12... Copper cover concave part, 13...
·Lead.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体接合基板を接合持板に固着し、該接合支持板を金
属製ベースに固着し、半導体接合基板と金属製カバーは
間に固着することなく両者に対して金属製中間緩衝物を
低抵抗接触させ、半導体接合基板に接合表面安定材が設
けられている半導体装置において、上記中間緩衝物と金
属製カバーの一部に互に嵌りあう部分を設けたことを特
徴とする半導体装置。
A semiconductor bonding substrate is fixed to a bonding support plate, the bonding support plate is fixed to a metal base, and a metal intermediate buffer is brought into low-resistance contact with the semiconductor bonding substrate and the metal cover without sticking between them. 1. A semiconductor device in which a semiconductor bonding substrate is provided with a bonding surface stabilizer, characterized in that a portion of the intermediate buffer and the metal cover are provided with portions that fit into each other.
JP8462682U 1982-06-09 1982-06-09 semiconductor equipment Pending JPS5858338U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8462682U JPS5858338U (en) 1982-06-09 1982-06-09 semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8462682U JPS5858338U (en) 1982-06-09 1982-06-09 semiconductor equipment

Publications (1)

Publication Number Publication Date
JPS5858338U true JPS5858338U (en) 1983-04-20

Family

ID=29879969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8462682U Pending JPS5858338U (en) 1982-06-09 1982-06-09 semiconductor equipment

Country Status (1)

Country Link
JP (1) JPS5858338U (en)

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