JPS5857705B2 - ケイコウジフンタンシヨウホウ オヨビ ソノソウチ - Google Patents
ケイコウジフンタンシヨウホウ オヨビ ソノソウチInfo
- Publication number
- JPS5857705B2 JPS5857705B2 JP48046627A JP4662773A JPS5857705B2 JP S5857705 B2 JPS5857705 B2 JP S5857705B2 JP 48046627 A JP48046627 A JP 48046627A JP 4662773 A JP4662773 A JP 4662773A JP S5857705 B2 JPS5857705 B2 JP S5857705B2
- Authority
- JP
- Japan
- Prior art keywords
- coordinates
- magnetic particle
- value
- reference value
- screen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP48046627A JPS5857705B2 (ja) | 1973-04-26 | 1973-04-26 | ケイコウジフンタンシヨウホウ オヨビ ソノソウチ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP48046627A JPS5857705B2 (ja) | 1973-04-26 | 1973-04-26 | ケイコウジフンタンシヨウホウ オヨビ ソノソウチ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS49134390A JPS49134390A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-12-24 |
JPS5857705B2 true JPS5857705B2 (ja) | 1983-12-21 |
Family
ID=12752515
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP48046627A Expired JPS5857705B2 (ja) | 1973-04-26 | 1973-04-26 | ケイコウジフンタンシヨウホウ オヨビ ソノソウチ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5857705B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0429802U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1990-06-30 | 1992-03-10 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5994006A (ja) * | 1983-10-26 | 1984-05-30 | Hitachi Ltd | 外観検査装置 |
-
1973
- 1973-04-26 JP JP48046627A patent/JPS5857705B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0429802U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1990-06-30 | 1992-03-10 |
Also Published As
Publication number | Publication date |
---|---|
JPS49134390A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-12-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3990981B2 (ja) | 基板を検査するための方法及び装置 | |
JP4095860B2 (ja) | 欠陥検査方法及びその装置 | |
US4876457A (en) | Method and apparatus for differentiating a planar textured surface from a surrounding background | |
JP4230566B2 (ja) | 欠陥統合処理装置および欠陥統合処理方法 | |
KR101146081B1 (ko) | 마이크로-검사 입력을 이용한 매크로 결함 검출 방법 및시스템 | |
CN118501177A (zh) | 一种化成箔的外观缺陷检测方法及系统 | |
JP2000329683A (ja) | ベルトコンベアで搬送されるばら物の粒度検知方法 | |
JPH0521180B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
JPS5857705B2 (ja) | ケイコウジフンタンシヨウホウ オヨビ ソノソウチ | |
JPH04147045A (ja) | 表面検査装置 | |
JPH03175343A (ja) | 外観検査による欠陥抽出方法 | |
JPH11352073A (ja) | 異物検査方法および装置 | |
JP2638121B2 (ja) | 表面欠陥検査装置 | |
JPS6347642A (ja) | 表面探傷における欠陥種類弁別方法 | |
JPH11132743A (ja) | 画像信号処理による欠陥検査装置 | |
JPH0587782B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
JPH1010053A (ja) | 表面欠陥検査装置 | |
JP2001066128A (ja) | 表面検査装置及び表面検査方法 | |
JPH0731131B2 (ja) | 周期性パタ−ンの斑検査方法 | |
KR940003791B1 (ko) | 폭측정장치 | |
JPH0682724B2 (ja) | ウエハ欠陥検査装置 | |
JPH0413953A (ja) | 電子部品用成形品の不良検査前処理装置 | |
JP6035375B1 (ja) | 欠陥検査装置、及び欠陥検査方法 | |
RU2777718C1 (ru) | Способ неразрушающего оптико-визуального контроля изделий методом машинного зрения | |
KR100564871B1 (ko) | 초소형반복패턴의검사방법및장치 |