JPS5854657A - Hermetically sealed parts - Google Patents

Abstract

PURPOSE:To enhance the hermetical sealability of a hermetically sealed part by employing as a stem forming material copper clad iron-nickel alloy. CONSTITUTION:A stem 1 which is made of an oxygen free copper 1' and a clad plate of iron-nickel alloy is opened with a plurality of lead wiring leading holes 2, through which lead wirings 3 are inserted so as not to contact with the clad, and is sealed with sealing glass 4. The wirings 3 are connected through lead wirings 6 to a crystal vibrator 6. This stem 1 is covered with a cap 7 and is hermetically sealed. In this manner, since the iron-nickel alloy has good plasticity and large thermal expansion coefficient, the difference of the copper 1' from a deforming resistor becomes small, and a cold pressing becomes smooth. Thus, the degree of the compression seal in the boundary between the glass 4 and the clad plate as well as between the glass 4 and the wirings 3 become large, with the result that the hermetically sealability can be enhanced.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to various hermetic sealing parts widely used in the electronic industry, and more particularly to hermetic sealing parts with improved hermetic sealability.

BACKGROUND ART Various hermetically sealed components containing electronic elements such as a single crystal oscillator diode-V17 autotransistor generally have a structure as shown in the figure.

The figure shows 1fR1- of hermetically sealed parts with a built-in crystal sensor tube.
In Figure 0, which is the longitudinal cross-section WG shown, it is an IH stem, and is usually composed of a pace made of oxygen-free steel 1' and a clad plate of Fe-Ni-Co alloy (copal, standard composition is Fe-29Ni-17co) 1'. , It is formed by applying a rounding process to a free-rolling board using a predetermined edging process.

A plurality of beam-V extraction holes 2 are bored in the center of the stem 1, and a lead 3 made of copal is usually inserted therein.
is inserted so that it does not come into contact with Clara r, and is sealed with glass 4.

A crystal resonator 6 is connected to the upper tip of the lead 3 via a lead @:5.

The glass sealing of 3 and 3 is generally performed in a similar manner. That is, the lily 3 is inserted into the lily I draw-out hole 2 of the stem 1 so as not to contact the clad plate, and then the stem recess (the rt part in the figure) is usually filled with hard glass powder. The entire glass is melted by passing it through a pair of furnaces, and the land plate and the leads are sealed together.

Reference numeral 7 denotes a cap that covers the above-mentioned stem, and is usually made of copper or metal in order to smoothly perform the cold pressure welding described later and to effectively shield electric current from the outside. Constructed of copper alloy. Nitrogen gas or the like at a predetermined pressure is sealed inside.

The two rung parts of cap 7 and stem 1 must be sealed airtightly. Conventionally, in this case, the #7 rung part is brazed or soldered. Ta. However, in this case, inconvenient situations such as damage to the crystal resonator due to vaporized wax and solder gas occur, and the two-zinda characteristics of the crystal resonator deteriorate.

For this reason, in recent years, a method has been widely adopted in which the wires, generally the seven land portions 8, are pressed at room temperature and cold welded to improve the secondary properties.

However, in this case, situations such as deformation or breakage of the 7 land portion or cracks in the sealing glass often occur during cold welding, resulting in a decrease in airtight sealing performance. There is.

As a result of extensive research in order to solve the above-mentioned problems, the inventors of the present invention have used oxygen-free copper clara (Fe) instead of oxygen-free copper clara (Fe) as the constituent material of the stem.
The present invention was developed based on the knowledge that the use of a -Ni alloy improves hermetic sealability during cold welding.

SUMMARY OF THE INVENTION An object of the present invention is to provide a hermetically sealed component having excellent cold weldability and therefore improved hermetic sealability.

The hermetic sealing component of the present invention includes a stem having a lead made of steel Clara iron-nickel alloy and sealed with glass; a cap which is crowned on the stem and whose base is cold pressure welded to the base; In the space between the wrinkled stem and the cap,
It is characterized in that an electronic element component connected to the -V is housed therein.

The F.-N1 alloy constituting Clara Vf according to the present invention has slightly lower hardness, tensile strength, and yield point, and slightly higher elongation than copper.

For example, F・-42Ni, which is one of the Fe-Ni alloys,
Table 1 shows the above-mentioned characteristic values of the alloy (alloy with composition ratio of Fe: 58% and Ni: 42%) and core a+-core (Fe-29Ni-17co alloy).

As is clear from the table, F.-42Ni alloy has higher plasticity than copper, and therefore, when a clad plate is constructed with oxygen-free steel, there is a difference in deformation resistance between the clad plate and the oxygen-free steel. becomes smaller.

This suggests that cold pressure welding can be performed smoothly as a whole.

In addition, the inventors have developed oxygen-free steel Clara' Fe-42N
When the thermal expansion coefficients of the No. 1 alloy and the oxygen-free steel copal alloy were comparatively measured, the results shown in Table 2 were obtained.

Table 2 As is clear from Table 2, oxygen-free steel Clara yy-42
Compared to N1 alloy wire and oxygen-free copper Kuratsureko Pearl,
Its coefficient of thermal expansion is very hot.

Therefore, when the stem l is made of this material and subjected to the glass sealing treatment as described above, the glass is compressed by the above material compared to the case of oxygen-free steel Clatzrekopar, and as a result, the glass and the cladding plate are Glass handle-V
The degree of compression seal at the boundary of the stem is large, and the airtightness of the stem can be improved.

Such an acid-free steel Clara)i'Fe-Ni alloy can be manufactured as follows. That is, first, a foil of oxygen-free steel having a predetermined thickness and a foil of Fe--Ni alloy having a predetermined composition ratio and a predetermined thickness are cold-rolled and welded according to a conventional method. Then, the obtained plate is diffusion annealed at an appropriate temperature of 400 to 800°C to obtain an appropriate plate thickness (for example, 0.3 stroke).
It is a clarage board.

The hermetic sealing component of the present invention has a stem made of the above-mentioned oxygen-free steel Clara'Fe-Ni alloy. In this case, the material constituting +7-f may be any material as long as its coefficient of thermal expansion is smaller than that of glass, but it is usually preferable to use copal or a Fe-Ni alloy.

Hard glass is usually preferred as the glass6.
Also, cap wire steel or copper alloy is used.

In the hermetically sealed component of the present invention configured as described above, firstly, the hermetic sealability between the stem and the glass and between the glass and the lead is improved. When the flange part of the stem and the cap is cold welded, the stem material is highly plastic, so the cold welding can be carried out smoothly, and the flange part will not be damaged and the entire system will be intact. Improves hermetic sealability.

Furthermore, since the stem contains oxygen-free steel, the effectiveness of external electrical shielding is also maintained.

For example, a stem is made using an oxygen steel clad Fe-42N1 alloy plate (thickness Q, 31B), and it is cold-welded with a copper cap to create an airtight sealing part with a built-in crystal oscillator as shown in the figure. 50,000 pieces were made. +7-%1 is Copal, which uses hard glass as the sealing glass.Of the 50,000 parts manufactured, damage to the flange part was observed, and an airtight sealing test was conducted, and one defective product was found. It was exhausting.

On the other hand, 50,000 hermetically sealed parts were manufactured with the same specifications using oxygen-free steel copal alloy as the constituent material of the stem. At this time, several companies had 5 defective products.

In this way, the oxygen-free steel clad Fe-4 according to the present invention
When the 2N1 alloy is used as a stem material, the defective rate of hermetically sealed parts is reduced and manufacturing reliability during cold welding is improved, which expands its industrial value.

[Brief explanation of drawings]

The figure shows an IE inside a crystal resonator, which is one of the hermetically sealed parts of the present invention.
11Ji is a vertical cross-sectional view of an example. 1,... Stem, 1'...Oxygen-free copper, lI・-F・-
N1 alloy, 2...Lee r insertion hole, 3...Lead, 4...
...Sealing glass, 5...Lee R wire, 6...Crystal resonator, 7...Cap-8...Cold pressure welding part (flange part)

Claims (2)

[Claims] (1) A stem comprising a paste made of a copper-plated V iron-nickel alloy and a lead sealed with glass; a good cap that is attached to the stem and whose base is cold pressure welded to the paste;
A hermetically sealed component in which an electronic element component connected to the lead is housed in a space between a stem and a cap. (2) Claim 1: Lee V is made of iron-nickel-cobalt alloy or iron-nickel alloy, and the cap is made of copper or copper alloy! Ill! The hermetically sealed part described in item 1.