JPS59100555A - Airtight terminal and manufacture thereof - Google Patents

Abstract

PURPOSE:To improve durability, by inserting a lead wire through each inserting hole for the lead wire made of Kovar in an iron base havng the lead wire inserting holes, and sealing the wire by a glass comprising 10-70wt% of Kovar alloy sealing glass and 30-90wt% of iron sealing glass. CONSTITUTION:A base 1 has lead wire inserting holes 3, which are provided in said base 1 by an appropriate method. A lead wire 2 is inserted through each inserting hole 3. Said wire is sintered and sealed by a glass 4. The material of the base is iron, and the lead wire 2 is made of a Kovar material. As the sealing glass, a mixed glass comprising two components, i.e., 10-70% Kovar sealing glass and 30-90% iron sealing glass is used.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an airtight terminal that is housed in an airtight package that hermetically encapsulates circuit elements and the like, and a method for manufacturing the same.

This type of airtight package, as shown in FIG.
A circuit element 5 is attached to the inner end of the lead wire 2 of the airtight terminal T, which is inserted into the terminal T and sealed with an insulating material 4 such as glass.
etc., and cover with a cap 6 to airtightly encapsulate the circuit element 5 etc.

FIG. 2 is a cross-sectional view of such a steam can terminal T, and the same reference numerals as in FIG. 1 indicate the same parts.

- Conventionally, when the lead #2 is drilled with a base IK or sealed into the single-domain insertion hole 3, there are two methods that can be broadly classified. That is, the so-called matching method uses Kovar as the base material and lead wires, and seals them using Kovar sealing glass, which has the same expansion coefficient as the Kovar material, as the insulating glass, and the base material and lead wires. This is the so-called compression method, in which an iron material is used as the material and glass for iron sealing is used as the glass. According to the compression method, since glass and iron have different expansion coefficients, the iron material is compressed by the expansion of glass.

Since the hermetic terminal manufactured by the above-mentioned matching method uses hard copper material for the pace and lead wire, it has the advantage of being strong and durable, but has the disadvantage of being high-strength. On the other hand, airtight terminals manufactured by the compression method use iron as the base material and lead wire, so they have the advantage of being inexpensive, but since iron is soft, the lead wire in particular may wander. It had short ribs that were easy to use and lacked durability.

The invention was made in view of the above-mentioned points, and it is an object of the present invention to manufacture a good-looking hermetic terminal by taking advantage of the advantages of the compression method and the matching method.

It is an object of the present invention to provide a durable and inexpensive airtight terminal and a method for manufacturing the same.

To summarize the present invention, the airtight terminal according to the present invention is an airtight terminal in which a lead wire is inserted into the lead wire insertion hole of a pace having a lead wire insertion hole and sealed with glass.
The pace is an iron material, the lead wire is a copal material, and the sealing glass is a two-component mixed glass consisting of a copper alloy sealant glass of 10 to 70% by weight and an iron sealing glass of 30 to 90% by weight. It is characterized by:

According to the method for manufacturing an airtight terminal according to the present invention, a lead wire is inserted into the lead wire insertion hole of a pace having a lead wire insertion hole, and a sealing glass is filled, and the glass is melted and solidified. In the method for manufacturing an airtight terminal, the paste is made of iron, the front plate is made of copal, and the sealing glass is copal sealing glass 1.
It is characterized by being a legacy of two-component glass of 0 to 70 weight ratio and iron sealing glass (capital) to 90 weight ratio.

According to the airtight terminal of the invention, since inexpensive iron is used as the paste and Kovar is used for the lead wire, the cost of the airtight terminal can be reduced and it can be made to have excellent durability. .

According to the method for manufacturing an airtight terminal according to the Ushidafu invention, the sealing glass made of a mixture of copal sealing glass and iron sealing glass is used as the sealing glass, so that the sealing is performed in the vicinity of the lead wire, etc. There is an advantage in that it is possible to manufacture an airtight terminal whose lead wire is Kovar and whose lead wire is iron, without creating a glass crank, which maintains the original airtightness.

The present invention will be described in detail.

FIG. 2 is a cutaway diagram showing an example of the airtight terminal of the present invention. As is clear from FIG. A lead wire 2 is inserted through the lead wire insertion hole 3, and the lead wire 2 is sintered with glass 4 and made of -M.
It is worn.

In the airtight terminal T according to the present invention, the base material is iron, and the lead #2 is made of copper material.

Further, as the sealing glass, a two-component mixed glass consisting of 70% Kovar sealing glass and 90% iron sealing glass is used.

The reason why such a special sealing glass is used is that when the lead wire 2 made of copal material as described above is sintered and sealed to the iron paste 1 using a compression type iron receiving glass, the lead wire 2 is sintered and sealed to the iron paste 1. This is because radial cracks occur on the glass, whereas when sintered and sealed with Kovar sealing glass, linear glass cranks occur more than Pace 1. Such a rank significantly impairs airtightness, increases fF, and has a leakage value of 1, OX 1010.
-7at cc/see is exceeded, and the insulation property deteriorates, making it impossible to put it to practical use.

The above-mentioned Co/Z-J sealing glass used in accordance with the present invention may be any glass that has been conventionally coated with the copal material of this type of airtight terminal T. An example could be borosilicate glass. - However, the glass for iron sealing is not limited to the present invention, and any glass that has been conventionally used for the main iron material of airtight terminals may be used. For example, soda barium glass can be used.

111J Mixture of copal sealing glass and iron sealing glass - Keishi, As mentioned above, copal sealing glass lO ~ 70% iron sealing glass 30-90, but copal sealing glass is 70% If it exceeds 90 degrees, a boat-shaped glass crank will occur near Pace 1, while if the iron sealing glass exceeds 90 degrees, radial glass cracks will occur near the lead rock passage.

The reed paste 1 is made of iron, but may be plated with nickel or the like in consideration of airtightness, notes, etc.

Furthermore, as the copal material of the lead wire 2, its surface v
It may also be one in which a black film is formed. By forming such an oxide film, airtightness and thermal shock resistance are improved.

Next, a method for manufacturing an airtight terminal according to the present invention will be explained.

12 pieces, a glass powder bed containing 10 to 70% glass for copal sealing and 30 to 90% glass for iron sealing layer is mixed, and the blade is heated above the glass softening point to melt and mix. In the present invention, the softening point is about 1000°C.

Next, the glass pieces are cooled and crushed into granules of about 80 meshes or more, and then press-molded into the desired shape.

Optional [Preliminary sintering at 600 to 750°C, binder removal, and lead wire insertion hole 3 of Pace 1 made of iron are filled with leads M & 2 made of copal material, which is glass for shooting, and the desired temperature is set to P9r. Sinter and seal.

, Hereinafter, embodiments of the present invention will be described.

EXAMPLE Borosilicate glass Soda barium glass 8I layer glass was used to seal PACE 1vc lead #I2.

The lead wire 2 is made by etching copal material to mycelium, then annealing it at 700 to 950°C, and then oxidizing it to form an oxide film (hereinafter referred to as A), and after etching, annealing at 700 to 950°C. An air fj terminal was manufactured using both of the terminals which were subjected to the treatment and no oxide film was formed (hereinafter referred to as B).

The lead wire 2 of the manufactured airtight terminal T is Il! Lead #M2 along the lB line at a pulling speed of #170 mm/min.
The material was pulled until it could be pulled out, and the limit value was measured.

#As a consideration, the mechanical percentage of the hermetic terminals (designated as C and D, respectively) manufactured by the conventional compression method (iron pace-iron lead wire) and matching method (co-ru-pace-cono-le lead wire) Note was measured.

The results are summarized in Table 1.

Table 1 (Pulling speed K 170 mK/m1n) The pullout @ limit value of the airtight terminals A and H according to the present invention is not only that of the conventional airtight terminal C (compression type) but also that of the airtight terminal D (matching type). It was better than that. This is thought to be because, unlike conventional matching systems, the expansion coefficients of the paste material, lead wire, and glass are different, so that the lead i2 is under some pressure.

In addition, when manufacturing the airtight terminal according to the present invention, when removing residual strain, it is sufficient to perform a tempering process and a strain relief process.

As explained above, according to the present invention, since iron is used as the paste material and copper material is used as the lead wire, the advantage is that an airtight terminal with excellent durability can be manufactured at a lower cost than in the past. There is.

[Brief explanation of the drawing]

FIG. 1 is a partial sectional view of the airtight package, and FIG. 2 is a sectional view of the airtight terminal T. 1...Base, 2...Lead scarlet, 3...Lead wire insertion hole, 4...Glass. Applicant's Representative Masaaki Ame Figure 1 Figure 2

Claims (1)

[Claims] 1. An airtight terminal in which a lead wire is inserted into the lead scarlet insertion hole of a base having an IJ-wire insertion hole and sealed with glass, wherein the base is made of iron and the lead wire is made of iron. ζ, which is made of copal, and the sealing glass is manufactured from two-component thread glass of copal alloy sealing glass of 10 to 70 parts (weight%, the same hereinafter) and iron sealing glass of 30 to 90 parts; An airtight terminal characterized by. 2. A lead wire made of copal material is inserted into the lead eyelid insertion hole made of iron material, and a sealing glass made of the following two-component glass is inserted. A method for producing an airtight terminal, which is characterized by filling the glass with nIJ and heating it to form a bath, and then solidifying it; Konol Sokin Sealing Glass 10-70% Iron Sealing Glass 30 ~90%.