JPS5850744A - シリコンウエハ−の評価方法 - Google Patents

シリコンウエハ−の評価方法

Info

Publication number
JPS5850744A
JPS5850744A JP56147000A JP14700081A JPS5850744A JP S5850744 A JPS5850744 A JP S5850744A JP 56147000 A JP56147000 A JP 56147000A JP 14700081 A JP14700081 A JP 14700081A JP S5850744 A JPS5850744 A JP S5850744A
Authority
JP
Japan
Prior art keywords
oxygen
resistivity
wafer
sample
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56147000A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0472380B2 (OSRAM
Inventor
Masamichi Yoshida
正道 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56147000A priority Critical patent/JPS5850744A/ja
Publication of JPS5850744A publication Critical patent/JPS5850744A/ja
Publication of JPH0472380B2 publication Critical patent/JPH0472380B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P74/00—

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP56147000A 1981-09-19 1981-09-19 シリコンウエハ−の評価方法 Granted JPS5850744A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56147000A JPS5850744A (ja) 1981-09-19 1981-09-19 シリコンウエハ−の評価方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56147000A JPS5850744A (ja) 1981-09-19 1981-09-19 シリコンウエハ−の評価方法

Publications (2)

Publication Number Publication Date
JPS5850744A true JPS5850744A (ja) 1983-03-25
JPH0472380B2 JPH0472380B2 (OSRAM) 1992-11-18

Family

ID=15420310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56147000A Granted JPS5850744A (ja) 1981-09-19 1981-09-19 シリコンウエハ−の評価方法

Country Status (1)

Country Link
JP (1) JPS5850744A (OSRAM)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6092782A (ja) * 1983-10-24 1985-05-24 アクシユネツト　カンパニー ゴルフボール
JPS60163674A (ja) * 1984-02-07 1985-08-26 株式会社ブリヂストン ゴルフボ−ル
JPS6156668A (ja) * 1973-05-24 1986-03-22 アクシユネツト・カンパニ− 外周面にデインプルを有するゴルフボ−ルの製造方法
JPS61284264A (ja) * 1985-06-07 1986-12-15 住友ゴム工業株式会社 ゴルフボ−ル
JPS63309282A (ja) * 1987-04-27 1988-12-16 アクシュネット　カンパニー 多数ディンプルゴルフボール
US5127655A (en) * 1990-07-27 1992-07-07 Sumitomo Rubber Industries, Ltd. Golf ball

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6156668A (ja) * 1973-05-24 1986-03-22 アクシユネツト・カンパニ− 外周面にデインプルを有するゴルフボ−ルの製造方法
JPS6092782A (ja) * 1983-10-24 1985-05-24 アクシユネツト　カンパニー ゴルフボール
JPS60163674A (ja) * 1984-02-07 1985-08-26 株式会社ブリヂストン ゴルフボ−ル
JPS61284264A (ja) * 1985-06-07 1986-12-15 住友ゴム工業株式会社 ゴルフボ−ル
JPS63309282A (ja) * 1987-04-27 1988-12-16 アクシュネット　カンパニー 多数ディンプルゴルフボール
US5127655A (en) * 1990-07-27 1992-07-07 Sumitomo Rubber Industries, Ltd. Golf ball

Also Published As

Publication number Publication date
JPH0472380B2 (OSRAM) 1992-11-18

Similar Documents

Publication Publication Date Title
EP2295943B1 (en) radiation thermometer calibration
Grundbacher Causes of variation in serum IgE levels in normal populations
Wood et al. An investigation of the stability of thermistors
TW200804778A (en) Thermometer calibration by immersion in non-electrically conductive liquid
US20200088669A1 (en) Method for Operating a Sensor Device
GB277025A (en) Method of and means for determining the amount of a constituent in a mixture, more particularly of gases
GB2181298A (en) Platinum resistance thermometer and manufacture thereof
KR910003778A (ko) 실리콘 결정 평가 방법과 반도체 장치 제조방법
JPS5850744A (ja) シリコンウエハ−の評価方法
Pliskin et al. Properties of insulating thin films deposited by RF sputtering
JPH07260721A (ja) 環境センサの等価回路、臭い圧測定方法、臭い圧基準化方法、臭い検知装置、及び火災検知装置
Bloodworth et al. Use of thermistors for the measurement of soil moisture and temperature
CN105841846B (zh) Ntc热敏芯片的测试方法
WO2022216303A1 (en) Gas sensor calibration method
White Specific heats of silicates and platinum
Franke et al. Quantitative analysis of infrared reflection spectra from phosphosilicate glass films
Mangum Stability of small industrial platinum resistance thermometers
JPH0469531A (ja) 放射温度計による温度測定方法
US3726592A (en) Method and apparatus for detecting moisture
JPH01114727A (ja) 放射温度測定装置
CN108180879B (zh) 超薄二氧化硅薄膜样片的定值方法
Quintana et al. Polysilicon thin film developed on ultra-thin flexible glass for temperature sensor
JPH05273122A (ja) シリコン結晶中不純物の赤外吸収測定方法
Sakurai et al. Intercomparison of 12 standard platinum resistance thermometers between 13.8 K and 273.15 K
Volosnikov et al. RTD error correction in the diagnostics of its parameters state