JPS584925A - プレ−ト保持具 - Google Patents

プレ−ト保持具

Info

Publication number
JPS584925A
JPS584925A JP56091321A JP9132181A JPS584925A JP S584925 A JPS584925 A JP S584925A JP 56091321 A JP56091321 A JP 56091321A JP 9132181 A JP9132181 A JP 9132181A JP S584925 A JPS584925 A JP S584925A
Authority
JP
Japan
Prior art keywords
members
thin plate
edge
plate member
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56091321A
Other languages
English (en)
Japanese (ja)
Other versions
JPS623945B2 (enFirst
Inventor
Satoshi Araihara
新井原　聡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56091321A priority Critical patent/JPS584925A/ja
Publication of JPS584925A publication Critical patent/JPS584925A/ja
Publication of JPS623945B2 publication Critical patent/JPS623945B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP56091321A 1981-06-12 1981-06-12 プレ−ト保持具 Granted JPS584925A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56091321A JPS584925A (ja) 1981-06-12 1981-06-12 プレ−ト保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56091321A JPS584925A (ja) 1981-06-12 1981-06-12 プレ−ト保持具

Publications (2)

Publication Number Publication Date
JPS584925A true JPS584925A (ja) 1983-01-12
JPS623945B2 JPS623945B2 (enFirst) 1987-01-28

Family

ID=14023186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56091321A Granted JPS584925A (ja) 1981-06-12 1981-06-12 プレ−ト保持具

Country Status (1)

Country Link
JP (1) JPS584925A (enFirst)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0333744A (ja) * 1989-06-29 1991-02-14 Oki Electric Ind Co Ltd ホトマスクケース及びホトマスクの保管方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0333744A (ja) * 1989-06-29 1991-02-14 Oki Electric Ind Co Ltd ホトマスクケース及びホトマスクの保管方法

Also Published As

Publication number Publication date
JPS623945B2 (enFirst) 1987-01-28

Similar Documents

Publication Publication Date Title
DE69501135D1 (de) Elektrostatische Haltevorrichtung für Substrat in einen Bearbeitungskammer
DK285483D0 (da) Holder til montering af udstillingspaneler
JPS6444035A (en) Production using single wafer carrier
JPS618234A (ja) 電気部品を配向するヘツド及び方法
JPS6449002A (en) Bent optical fiber and manufacture thereof
MC2249A1 (fr) Procede pour la realisation d'un dispositif polyvalent de serrage destine a maintenir des objets sans les abimer,un tel dispositif et son procede d'utilisation
US2738486A (en) Universal mounting clip
JP2001176955A (ja) 傷つきやすい基板のためのばねクリップ
JPS584925A (ja) プレ−ト保持具
GB899997A (en) Improvements in or relating to methods of manufacturing semi-conductive devices
JPH1190746A (ja) 電子部品の製造方法
US5130747A (en) Carrier apparatus
ES279785U (es) Un dispositivo de contacto electrico.
JPS57192020A (en) Stacking tool for thin plate body
JPS5666054A (en) Holder for semiconductor substrate
GB818746A (en) Improvements in or relating to the securing of a wire to a soldering tag prior to soldering
JP3068908B2 (ja) 試料搬送装置
JPH04289862A (ja) レチクルとその支持方法
US2861820A (en) Resilient tube to plate connection
SU710625A1 (ru) Подложкодержатель дл устройств ионно- лучевого легировани
JPS5653453A (en) Electrophoretic box
TW393436B (en) Wafers transportation means and methods
JPH04150047A (ja) ウエハプローバ
JPH0369983A (ja) クリーニングブレード支持装置
GB861094A (en) Electric terminal construction