JPS5846845B2 - 固体拡散法およびド−プ用組成物 - Google Patents

固体拡散法およびド−プ用組成物

Info

Publication number
JPS5846845B2
JPS5846845B2 JP48059432A JP5943273A JPS5846845B2 JP S5846845 B2 JPS5846845 B2 JP S5846845B2 JP 48059432 A JP48059432 A JP 48059432A JP 5943273 A JP5943273 A JP 5943273A JP S5846845 B2 JPS5846845 B2 JP S5846845B2
Authority
JP
Japan
Prior art keywords
semiconductor
solution
atoms
solvent
solid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48059432A
Other languages
English (en)
Japanese (ja)
Other versions
JPS4944667A (enrdf_load_stackoverflow
Inventor
パウル ポラツク ゴードン
レイ シヨーテス サミユエル
ゲイロード フイツシユ ジヨン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US00258173A external-priority patent/US3837873A/en
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of JPS4944667A publication Critical patent/JPS4944667A/ja
Publication of JPS5846845B2 publication Critical patent/JPS5846845B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP48059432A 1972-05-31 1973-05-29 固体拡散法およびド−プ用組成物 Expired JPS5846845B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00258173A US3837873A (en) 1972-05-31 1972-05-31 Compositions for use in forming a doped oxide film

Publications (2)

Publication Number Publication Date
JPS4944667A JPS4944667A (enrdf_load_stackoverflow) 1974-04-26
JPS5846845B2 true JPS5846845B2 (ja) 1983-10-19

Family

ID=22979414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48059432A Expired JPS5846845B2 (ja) 1972-05-31 1973-05-29 固体拡散法およびド−プ用組成物

Country Status (5)

Country Link
JP (1) JPS5846845B2 (enrdf_load_stackoverflow)
CS (1) CS172390B2 (enrdf_load_stackoverflow)
DD (1) DD103819A5 (enrdf_load_stackoverflow)
HU (1) HU165458B (enrdf_load_stackoverflow)
PL (1) PL87113B1 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE429064B (sv) * 1976-04-02 1983-08-08 Bofors Ab Slutfaskorrigering av roterande projektil
JPS5671933A (en) * 1979-11-19 1981-06-15 Toshiba Corp Impurity diffusion to semiconductor substrate

Also Published As

Publication number Publication date
JPS4944667A (enrdf_load_stackoverflow) 1974-04-26
DD103819A5 (enrdf_load_stackoverflow) 1974-02-12
HU165458B (enrdf_load_stackoverflow) 1974-08-28
CS172390B2 (enrdf_load_stackoverflow) 1976-12-29
PL87113B1 (enrdf_load_stackoverflow) 1976-06-30

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