JPS5846577Y2 - Composite resonator holding container - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to the structure of a holding container for a composite vibrator in which a plurality of piezoelectric vibrators are housed and held in one container.

This type of holding container is used to hold multiple piezoelectric vibrators on their main surfaces (the widest surface).

A structure in which piezoelectric vibrators are arranged in parallel in a direction perpendicular to ) and supported by support wires is known.

By the way, in order to adjust the resonant frequency of the piezoelectric vibrator to a desired value, after forming the excitation electrode by lower deposition in advance and assembling the piezoelectric plate on the support wire, a separate electrode is prepared directly above the excitation electrode by lower deposition. A method of performing fine-tuned deposition through a fine-tuned deposition mask is commonly used.

Here, the reason why the fine adjustment deposition is positioned as accurately as possible directly above the excitation electrode deposited under the lower deposition is that if the lower deposition and the fine adjustment deposition are arranged unevenly, this may cause the piezoelectric vibration mode. The electrical constants (operating capacitance, operating inductance, etc.) of the resonator are affected by the generation of spurious signals and the electrical constants of the resonator.

).

In this case, even if the alignment can be done accurately during assembly (although it can be very difficult in practice)
Due to distortion of the support wire itself, mechanical stress, and the weight of the piezoelectric plate, misalignment often occurs during fine-tuning vapor deposition, and especially when mass-produced, the aforementioned deterioration of characteristics is unavoidable. Ta.

In addition, the number of piezoelectric vibrators held as a composite vibrator is 2.
There is no problem in the case of three or more piezoelectric vibrators, but if there are three or more piezoelectric vibrators, fixing all the piezoelectric vibrators to their respective support wires and then fine-tuning the vapor deposition will cause problems for the piezoelectric vibrators located in the middle. Since this is possible, the third and subsequent piezoelectric vibrators must be fixed to the support wire one by one and then finely adjusted and deposited.

As a result, even though they are called composite vibrators, those that hold three or more piezoelectric vibrators have had a very low production efficiency.

The purpose of the present invention was to solve the above-mentioned problems, and first of all, it is a complex vibration that allows fine adjustment vapor deposition to be accurately aligned to the area occupied by the excitation electrode deposited below. Provides a holding container for the child.

Another object of the present invention is to provide a piezoelectric vibrator held as a composite vibrator (in the present invention, the number of excitation electrodes may be arranged not only in one pair but also in two or more pairs).

) Even if the number of piezoelectric vibrators is large, all piezoelectric vibrators can be housed and held in one container and then finely adjusted and deposited continuously or simultaneously. Therefore, production efficiency can be greatly improved. The purpose of the present invention is to provide a holding container for the vibrator.

In order to achieve the above-mentioned objects, the present invention provides a structure in which an electric vibrator in which at least one pair or two or more pairs of excitation electrodes are arranged on the main surface of a piezoelectric plate is housed and held in one container. A recessed portion having dimensions such that the piezoelectric plate is placed on the main surface from a perpendicular direction is disposed in a planar manner in the container, and a cutout portion is provided in the bottom surface of the recessed portion facing the excitation electrode of the piezoelectric plate. The main structure is a holding container for a composite vibrator, which is characterized by:

Here, the piezoelectric plate is a plate-shaped piezoelectric material such as quartz, lithium niobate, lithium tantalate, and piezoelectric ceramic.

Hereinafter, the present invention will be explained in detail with reference to the drawings of embodiments.

FIG. 1A is a structural diagram showing an embodiment of a holding container for a composite vibrator according to the present invention, which accommodates and holds two piezoelectric vibrators in which two pairs of excitation electrodes are arranged.

The opening in the same figure is the A-A sectional view in A, C in the same figure is a layout diagram of the excitation electrodes and connection electrodes on both sides of the piezoelectric plate, and 2 in the same figure is the printed circuit board of the printed circuit board. A wiring diagram,
Also, E in the same figure is a circuit diagram of this embodiment.

The two piezoelectric plates 1 and 1' have similar structures (although they may have different structures, of course).
A similar structure is illustrated to facilitate understanding of the present invention.

) Since the structure for holding the piezoelectric plates 1 and 1' is the same, the piezoelectric plate 1' and its holding structure will be explained using the reference numerals within 0.

The piezoelectric plate 1 (1') is a disc-shaped piezoelectric plate 1 as shown in Figure C, and has two divided excitation electrodes 2 on one side of the main surface.
and 3 (2' and 3') and a common excitation electrode 4 (4') form two pairs of excitation electrodes through a piezoelectric plate by lower deposition, and each excitation electrode 2, 3 and 4(
Respective connection electrodes 5, 6 and 7 (5', 6' and 7') extending from 2', 3' and 4') to the periphery of the piezoelectric plate are also formed at the same time as the lower deposition.

These connection electrodes 5, 6 and 7 (5', 6' and 7'
), the reason why it extends through the thickness surface (not shown) of the piezoelectric plate 1 (1') to the main surface at the opposite periphery is to improve the electrical connection with the lead wire described later.

The container 8 is made of an insulating material such as plastic, ceramic, epoxy resin, or glass, and when molded, a recess 9 ( 9 '), piezoelectric plate 1 (1')
) are provided with through holes 11 and 1 on the bottom surface of the recess 9 (9') facing the excitation electrodes 2 and 3 (2' and 3'), respectively.
3 (11' and 13'), and further includes a piezoelectric plate 1 (
In order to improve the stability of placing the piezoelectric plate 1 (1')
) is provided with a stepped surface 10 (10') that contacts the peripheral edge of the four parts 9 (9'), and this stepped surface 10 (10') has leader lines 17, 18 and 19 (21, 21, 22 and 23) are extended along the circumference of the piezoelectric plate 1 (1') longer than shown, or are arranged at evenly distributed positions.

Lead wires 17, 18 and 19 planted in the main body of the container 8
(21, 22 and 23) and connection electrodes 7, 5 and 6 (
7'.

5' and 6') means that the piezoelectric plate 1 (1') is connected to the recess 9 (9).
') and excitation electrodes 2 and 3 (2' and 3').
) and the through holes 11 and 13 (11' and 13') are aligned, respectively, and then electrically and mechanically connected by applying a conductive adhesive, soldering, etc.

Further, the container 8 has through holes 11 and 13 (11' and 13').
), and a passive element chamber 14 for accommodating a capacitor 15 as a passive element between the two four parts 9 and 9'.

The intermediate through-hole portion 12 (12') can be used as a mask for vapor deposition to adjust the degree of coupling when used in a multi-mode filter like this embodiment, and can be used as a mask for vapor deposition to adjust the degree of coupling. Not only in the case of a mode oscillator, but also in the case of a multi-mode filter, it is not necessary to provide it unless the degree of coupling is adjusted.

The container 15 is accommodated in the passive element chamber 14, filled with a filler 16, and fixed.

As a result, after fixing, fine adjustment vapor deposition described below can be performed, so that a composite vibrator having uniform characteristics can be obtained.

The printed circuit board 24 has leader lines 17, 18 and 19 (2
1, 22 and 23) and terminal 2 of capacitor 15
0 and 26 and installed on the bottom of the container 8.

By using the printed circuit board 24, the lead wire 17 can be used as an input terminal, the lead wire 23 can be used as an output terminal, and the lead wires 18 and 22 can be used as a ground terminal, as shown in the figure.

The fine adjustment vapor deposition of the piezoelectric plate 1 (1')
3 (11' and 13') as a mask for fine adjustment deposition, and set the desired resonance frequency directly above the lower-deposited excitation electrodes 2 and 3 (2' and 3').
Furthermore, the deposition is carried out for each excitation electrode successively or simultaneously in a vacuum evaporation apparatus.

During this fine adjustment vapor deposition, if the intermediate hole 12 (12') is provided, the intermediate hole 12 (12') is closed with a separately prepared shutter, and the bonding is When making adjustments, close the through holes 11 and 13 (11' and 13') in the same way as the previous shutter, and close the intermediate hole 12.
Using (12') as a coupling degree adjustment vapor deposition mask, an intermediate electrode is formed in the middle not in contact with the excitation electrodes 2 and 3 (2' and 3').

The gas in the container 8 is filled with a desired gas such as nitrogen gas, and the container 8 is covered with a case 25 made of an insulating material such as metal or plastic as shown in the opening, and sealed by soldering or applying adhesive.

Although the number of piezoelectric plates shown in the above embodiment was two,
Even if the number is three or more, the present invention is not limited in any way.

Figure 3A is a structural diagram showing an embodiment of the present invention in which the number of piezoelectric plates is three; the opening of the figure is a printed wiring diagram of the Phnom I board; It is a circuit diagram of an example.

The components up to the second in this embodiment are the same as those in the previous embodiment, and the third component is indicated by marking the corresponding reference numerals.

Note that the capacitor as a passive element is denoted by 15'.

15'', and 15''', having respective terminals 32 and 33 degrees 27 and outputs 34 and 31 and 35, and a passive component chamber 14'.

Fillers 16', 16'' and 14'' and 14''
6''' are respectively filled and fixed.

Those skilled in the art will easily understand that the functions and effects of this embodiment can be applied in the same way as those of the embodiments shown above without further explanation.

As something that was not shown in the previous embodiment, in this embodiment, a passive element chamber and a passive element (a capacitor in the embodiment) housed therein are also installed on one side of the recess.
Such an arrangement can of course be applied to the previous embodiments as well.

In addition to the capacitor shown in the embodiment, the passive element may also be a resistor, a coil, a combination thereof (series/parallel connection), or the like.

The shape of the piezoelectric plate is not limited to circular, but may be square or any other shape.

As for the excitation electrodes, those skilled in the art will easily understand that the present invention is applicable to not only a single electrode but also three or more pairs of electrodes arranged in addition to two pairs of electrodes.

Thus, according to the composite vibrator holding container according to the present invention,
First, when performing fine-tuned vapor deposition on the through-hole portion, it is possible to reduce the thickness of the through-hole portion at close range (as with the lower vapor deposition mask).

), it can be used as a mask for fine-tuning evaporation, and it also serves as a reference position mark when aligning with the facing excitation electrode.Furthermore, the piezoelectric plate can be housed in each recess of the container and attached individually in a static state. Therefore, it is possible to uniformly and finely adjust the deposition directly above the excitation electrode which has been deposited on the bottom without manufacturing variations.

Furthermore, this fine-tuned vapor deposition also forms a metal film on the container, providing a shielding effect.

Furthermore, according to the present invention, even if the number of piezoelectric vibrators as well as the number of excitation electrodes increases, all the piezoelectric vibrators can be accommodated and held in each recess of the container and then microscopically deposited continuously or simultaneously within the vacuum evaporation equipment. Since controlled deposition can be performed, the low production efficiency of conventional composite vibrators can be significantly improved.

Regarding the machining accuracy of the recessed part, there is an advantage that the recessed part can be machined with very high precision due to the presence of the through-hole part.

[Brief explanation of drawings]

FIG. 1A is a structural diagram showing an embodiment of a holding container for a composite vibrator according to the present invention. FIG. 5C is a diagram showing the arrangement of excitation electrodes and connection electrodes on the mold surface; FIG. FIG. 2A is a structural diagram showing another embodiment of the present invention, the opening of the figure is a printed wiring diagram of a printed circuit board in this embodiment, and FIG. 2C is a circuit diagram of this embodiment. 1.1', 1'...Piezoelectric plate, 2, 3, 4.2'
, 3', 4', 2'', 3'', 4''... Excitation electrode, 8, 8'... Container, 9.9', 9''...
... recess, 11, 13° 11', 13', 11",
13”...Through hole part.

Claims (1)

[Scope of utility model registration request] In a structure in which a plurality of piezoelectric vibrators each having one pair or two or more pairs of excitation electrodes arranged on the main surface of a piezoelectric plate are housed and held in one container, the piezoelectric plate is A composite vibrator characterized in that a recess having a size to be placed is disposed in a plane in the container, and a cutout is provided in the bottom face of the recess facing the excitation electrode of the piezoelectric plate. holding container.