JPS62122311A - Piezoelectric resonator with built-in capacitor - Google Patents

Piezoelectric resonator with built-in capacitor

Info

Publication number
JPS62122311A
JPS62122311A JP26199785A JP26199785A JPS62122311A JP S62122311 A JPS62122311 A JP S62122311A JP 26199785 A JP26199785 A JP 26199785A JP 26199785 A JP26199785 A JP 26199785A JP S62122311 A JPS62122311 A JP S62122311A
Authority
JP
Japan
Prior art keywords
substrate
capacitor
electrode
piezoelectric
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26199785A
Other languages
Japanese (ja)
Inventor
Takashi Yoshinaga
義永 喬士
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP26199785A priority Critical patent/JPS62122311A/en
Publication of JPS62122311A publication Critical patent/JPS62122311A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To facilitate the external fine adjustment of a capacitance by laminating a capacitor substrate, a piezoelectric substrate and an insulation substrate and locating an electrode formed to one major surface of the capacitor substrate and an external connection electrode of the insulation substrate to the outer face so as to attain miniaturization. CONSTITUTION:The capacitor substrate 2, the piezoelectric substrate 3 and the insulation substrate 4 are laminated and incorporated by applying an adhesives 19 so as not to disturb the vibration of the resonator element E. Connection parts 20-22 are formed and an electrode 5 of the capacitor substrate 2, a lead electrode 10b of the piezoelectric substrate 3 and an electrode 16 of the insulation substrate 4 are connected by the connection part 20. The connection part 21 connects a common electrode 7 on the capacitor substrate 2 and an electrode 17 on the insulation substrate 4, and the connection part 22 connects an electrode 6 of the capacitor substrate 2, a lead electrode 11b of the piezoelectric substrate 3 and an electrode 18 of the insulation substrate 14. The electrodes 5, 7 of the capacitor substrate 2 constitute a capacitor C1 and the electrodes 6, 7 constitute a capacitor C2 and the center part of the piezoelectric substrate 3 constitutes the resonator element E.

Description

【発明の詳細な説明】 一二一の1 ノ 本発明は、高周波発振回路等に用いられるコンデンサ内
蔵形圧電共振子に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a piezoelectric resonator with a built-in capacitor used in high frequency oscillation circuits and the like.

匡皮些伎直 コンデンサ内蔵形圧電共振子は、例えば、コルピッツ形
発振回路等の高周波発振回路に用いられている。このよ
うな圧電共振子の一例としては、第8図に示す回路構成
のものがある。この圧電共振子1は、1個の共振子エレ
メントEと2個のコンデンサC1、C2とを有するもの
である。
A piezoelectric resonator with a built-in capacitor is used, for example, in a high-frequency oscillation circuit such as a Colpitts-type oscillation circuit. An example of such a piezoelectric resonator is one having a circuit configuration shown in FIG. This piezoelectric resonator 1 has one resonator element E and two capacitors C1 and C2.

このような従来の圧電共振子の構造は、第9図に示すよ
うに、1枚のアルミナ基板31の両面に電極32を印刷
し、基板31の一方の主表面に誘電体33を印刷し、こ
の誘電体33の上に2個の電極34.35を印刷して2
個のコンデンサを形成し、電極34.35上に短冊状の
共振子エレメント36を半田付けし、これらをケース3
7で覆うようにされたものであり、外部との接続は、基
板31の裏面に形成され、電極32.34.35とそれ
ぞれ接続された電極32 a % 34 a 135a
によってなされている。
As shown in FIG. 9, the structure of such a conventional piezoelectric resonator is as follows: electrodes 32 are printed on both sides of a single alumina substrate 31, a dielectric material 33 is printed on one main surface of the substrate 31, Two electrodes 34 and 35 are printed on this dielectric material 33.
A rectangular resonator element 36 is soldered onto the electrodes 34 and 35, and these capacitors are connected to the case 3.
7, and connections with the outside are formed on the back surface of the substrate 31 and connected to electrodes 32, 34, and 35, respectively.
It is done by.

、tlく L ″  1,11占 一般に、発振周波数が約6MHz以上となると、共振子
エレメントEが厚みすべり振動のものであると、セラミ
ック等の圧電基板の厚さを厚みたて振動のものに比べ薄
くしなければならなず1.圧型基板か加工の途中で割れ
やすくなるという問題がある。それ故、発振周波数が約
6MHz以上の場合には、圧電共振子の共振子エレメン
トとしては、厚みたて振動のものを用いるのが好ましい
が、前述の従来の圧電共振子の構造では寸法が大きくな
ってしまい、回路を小形化することができなかった。
Generally speaking, when the oscillation frequency is about 6 MHz or higher, if the resonator element E is of thickness-shear vibration, the thickness of the piezoelectric substrate such as ceramic is increased to one of thickness-shear vibration. 1. There is a problem that the piezoelectric substrate is easily broken during processing. Therefore, when the oscillation frequency is about 6 MHz or more, the resonator element of the piezoelectric resonator should be made thinner. Although it is preferable to use a piezoelectric resonator that vibrates vertically, the conventional piezoelectric resonator structure described above has large dimensions, making it impossible to miniaturize the circuit.

また、高周波発振回路の発振周波数の精度を高いものと
するためには、例示の圧電共振子1の場合では、コンデ
ンサCLC2の容量を高精度に調整して製造しなければ
ならない。このコンデンサ容量の微調整は、レーザトリ
ミング等によって電極面積を調節することによって行う
ことができる。しかしながら、上記のような従来の圧電
共振子では、コンデンサC1、C2の部分は、共振子エ
レメント36によって覆われてしまい、且つ、それらは
ケース37内に収納されてしまっているので、製造後に
コンデンサ容量の微調整をすることができないため、コ
ンデンサ容量の精度を高くすることができなかった。
Furthermore, in order to increase the accuracy of the oscillation frequency of the high-frequency oscillation circuit, in the case of the illustrated piezoelectric resonator 1, the capacitance of the capacitor CLC2 must be adjusted with high precision when manufacturing. Fine adjustment of this capacitor capacity can be performed by adjusting the electrode area by laser trimming or the like. However, in the conventional piezoelectric resonator as described above, the capacitors C1 and C2 are covered by the resonator element 36 and housed in the case 37, so the capacitors cannot be removed after manufacturing. Since it is not possible to finely adjust the capacitance, it has not been possible to increase the accuracy of the capacitor capacitance.

史には、従来の圧電共振子では、各電極及び誘電体33
の寸法か側限されるので、大きなコンデンサ容量値を得
ることかできなかった。
Historically, in conventional piezoelectric resonators, each electrode and dielectric 33
Since the dimensions of the capacitor were limited, it was not possible to obtain a large capacitor value.

本発明は、このような問題点に鑑みてなされたものてあ
り、厚みたて振動の共振子エレメントを使用しても寸法
の増加を可及的に小さくすることができ、製造後に於い
てもコンデンサ容量の微調整を容易におこなうことがで
きるコンデンサ内蔵形圧電共振子を提供することを目的
としている。
The present invention has been made in view of these problems, and even if a thick vertical vibration resonator element is used, the increase in dimensions can be minimized, and even after manufacturing. The object of the present invention is to provide a piezoelectric resonator with a built-in capacitor that allows fine adjustment of capacitor capacity.

u■占t ′1  こめの− 上記目的を達成するため、本発明のコンデンサ内蔵形共
振子は、両方の主表面に電極が形成され、コンデンサを
構成するコンデンサ基板、両方の1表面に電極が形成さ
れ、共振子エレメントを構成する圧電基板、及び少なく
とも一方の主表面に外部接続用の電極が形成された絶縁
基板が積層され、該積層体の外面側には該コンデンサ基
板の一方の主表面に形成された電極及び該絶縁基板の外
部接続用電極が位置するようにされていることを特徴と
している。
In order to achieve the above object, the capacitor built-in resonator of the present invention has electrodes formed on both main surfaces, and a capacitor substrate constituting the capacitor, and an electrode formed on one surface of both. A piezoelectric substrate formed to form a resonator element and an insulating substrate having an electrode for external connection formed on at least one main surface are laminated, and one main surface of the capacitor substrate is formed on the outer surface of the laminate. The electrode formed on the insulating substrate and the external connection electrode of the insulating substrate are located therein.

実−」L」1 第1図は、本発明のコンデンサ内蔵形圧電共振子の一実
施例の分解斜視図である。本実施例の圧電共振子1は、
第8図に示す回路構成のものであり、第3図のコンデン
サ基板2、第4図の圧電基板3、第5図の絶縁基板4が
積層されたものである。尚、第3図乃至第5図では、(
a)は各基板の平面図、(b)は底面図を示している。
Fig. 1 is an exploded perspective view of an embodiment of a piezoelectric resonator with a built-in capacitor according to the present invention. The piezoelectric resonator 1 of this embodiment is
It has the circuit configuration shown in FIG. 8, in which the capacitor substrate 2 of FIG. 3, the piezoelectric substrate 3 of FIG. 4, and the insulating substrate 4 of FIG. 5 are laminated. In addition, in Figures 3 to 5, (
(a) shows a plan view of each substrate, and (b) shows a bottom view.

コンデンサ基板2に於いては、方形状のセラミック板の
一方の主表面2aの端部に2個の電極5.6が、他方の
主表面2bの中央部には1個の共通電極7がスクリーン
印刷によってそれぞれ形成されており、対向している電
極5の一部と電極7の一部とによってコンデンサが構成
され、電極6の一部と電極7の一部とによってコンデン
サが構成されるようにされている。また、電極5.6が
形成されている側の端部には凹部8.9がそれぞれ設け
られている。
In the capacitor substrate 2, two electrodes 5.6 are provided at the end of one main surface 2a of a rectangular ceramic plate, and one common electrode 7 is provided at the center of the other main surface 2b. They are each formed by printing, and a capacitor is formed by a part of the electrode 5 and a part of the electrode 7 facing each other, and a capacitor is formed by a part of the electrode 6 and a part of the electrode 7. has been done. Furthermore, recesses 8.9 are provided at the ends on the side where the electrodes 5.6 are formed.

圧電基板3は、方形状の圧電セラミック板の雨上表面3
 a 13 bのそれぞれの中央部に電極10.11が
対向して形成されたものであり、公知のエネルギーとじ
こめ型厚みたて振動の共振子エレメントを構成している
。両型l5ii10.11は、引き出し電極部10ax
llaを介して、雨上表面の端部に形成された接続用電
極部10b1 flbに接続されており、接続用電極部
tab、ttbが形成されていない側の基板3の端面に
は凹部12が設けられている。
The piezoelectric substrate 3 is a top surface 3 of a rectangular piezoelectric ceramic plate.
Electrodes 10 and 11 are formed facing each other at the center of each of the electrodes a 13 b, and constitute a known energy confinement type thick vertical vibration resonator element. For both types l5ii10.11, the extraction electrode part 10ax
The recess 12 is connected to the connection electrode part 10b1 flb formed at the end of the rain surface through the lla, and the recess 12 is formed on the end surface of the substrate 3 on the side where the connection electrode parts tab and ttb are not formed. It is provided.

方形状のガラスエポキシ樹脂の絶縁板である絶縁基板4
に於いては、前述のコンデンサ基板2の四部8.9に対
応する位置に凹部13.14か設けられ、圧電基板3の
凹部12に対応する位置には凹部15が設けられている
。基板4の一方の主表面4bには、3個の外部接続用の
電極16〜18が形成されており、電極16は四部14
の側面、電極17は凹部15の側面、電極18は凹部1
3の側面にもそれぞれ延伸して形成されている。
Insulating substrate 4 which is a rectangular glass epoxy resin insulating plate
In this case, recesses 13.14 are provided at positions corresponding to the four portions 8.9 of the capacitor substrate 2, and recesses 15 are provided at positions corresponding to the recesses 12 of the piezoelectric substrate 3. Three external connection electrodes 16 to 18 are formed on one main surface 4b of the substrate 4, and the electrode 16 is connected to the four parts 14.
, electrode 17 is on the side of recess 15 , electrode 18 is on the side of recess 1
It is also extended and formed on the side surfaces of 3, respectively.

このような構成のコンデンサ基板2、圧電基板3、及び
絶縁基板4は、共振子エレメントEの振動を阻害しない
ように接着剤19が塗布されて(第6図及び第7図参照
)、この順序に積層され一体化される。この積層体の外
面の所定個所には、スパッタリングおよび半田ディッピ
ングにより3個の接続部20〜22が形成され、第6図
及び第7図に示されているように、接続部20によりコ
ンデンサ基板2の電極5、圧電基板3の引き出し電極部
10b1及び絶縁基板4の電極16が接続され、接続部
21によりコンデンサ基板2の共通電極7と絶縁基板4
の電極17とが接続され、接続部22によりコンデンサ
基板2の電極6、圧電基板3の引き出し電極部11b1
及び絶縁基板4の電極18が接続されている。尚、本実
施例に於いては、各基板には、凹部8.9.12〜15
が設けられているので、各電極間の接続をより確実に行
うことができる。なお、積層体の外面の所定個所にスパ
ッタリングし、その上に半田を付着させるときエッヂが
存在してこれらの膜厚が薄(なりがちであるのでバレル
研磨などしてエッヂにRをつけてもよい。
The capacitor substrate 2, piezoelectric substrate 3, and insulating substrate 4 having such a structure are coated with an adhesive 19 so as not to inhibit the vibration of the resonator element E (see FIGS. 6 and 7), and are arranged in this order. are laminated and integrated. Three connection parts 20 to 22 are formed at predetermined locations on the outer surface of this laminate by sputtering and solder dipping, and as shown in FIGS. 6 and 7, the connection parts 20 connect the capacitor substrate 2 to The electrode 5 of the piezoelectric substrate 3, the extraction electrode portion 10b1 of the piezoelectric substrate 3, and the electrode 16 of the insulating substrate 4 are connected, and the common electrode 7 of the capacitor substrate 2 and the insulating substrate 4 are connected by the connecting portion 21.
The connecting portion 22 connects the electrode 17 of the capacitor substrate 2 to the electrode 6 of the capacitor substrate 2 and the lead-out electrode portion 11b1 of the piezoelectric substrate 3.
and the electrode 18 of the insulating substrate 4 are connected. In this embodiment, each substrate has recesses 8.9.12 to 15.
Since this is provided, the connection between each electrode can be made more reliably. Note that when sputtering is performed on a predetermined location on the outer surface of the laminate and the solder is attached onto it, there are edges and the film thickness tends to be thin (so even if the edges are rounded by barrel polishing etc. good.

斯くして得られる本実施例の圧電共振子1に於いてはコ
ンデンサ基板2の電極5と電極7とによって第8図のコ
ンデンサC1を、電極6と電極7とによってコンデンサ
C2を構成し、圧電基板3の中央部は共振子エレメント
Eを構成しているので、その回路構成は、第8図に示す
ものとなり、接続部20が端子T1に、接続部21が端
TFT3に、接続部22が端子T2に対応している。
In the thus obtained piezoelectric resonator 1 of this embodiment, the electrodes 5 and 7 of the capacitor substrate 2 constitute the capacitor C1 in FIG. 8, and the electrodes 6 and 7 constitute the capacitor C2. Since the center part of the substrate 3 constitutes a resonator element E, its circuit configuration is as shown in FIG. It corresponds to terminal T2.

従って、このように積層されて構成された圧電共振子1
は、接続部20〜22を外部の回路と接続することによ
って、例えばコルピンッ形発振回路を構成するようにす
ることができる。
Therefore, the piezoelectric resonator 1 configured by laminating in this way
For example, a Kolpin type oscillation circuit can be constructed by connecting the connecting portions 20 to 22 with an external circuit.

発1目と復未− 以上の説明より明らかなように、本発明のコンデンサ内
蔵形共振子に於いては、厚みたて振動の共振子エレメン
トを使用することができ、コンデンサの容量値の調整は
、外部に露出している電極(」−述の実施例では、電極
5又は電極6)の一部をレーザトリミング等により削り
取るようにすることによって容易に行うことができ、し
かも、小形化が可能である。
First oscillation and recovery - As is clear from the above explanation, in the capacitor built-in resonator of the present invention, a thick vertical vibration resonator element can be used, and the capacitance value of the capacitor can be adjusted. This can be easily achieved by cutting off a part of the externally exposed electrode (in the embodiment described above, electrode 5 or electrode 6) by laser trimming or the like, and furthermore, miniaturization is possible. It is possible.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例の分解斜視図、第2図はその
斜視図、第3図(a)はコンデンサ基板の平面図、第3
図(b)はその底面図、第4図(a)は圧電基板の平面
図、第4図(b)はその底面図、第5図(a)は絶縁基
板の平面図、第5図(b)はその底面図、第6図は第2
図のA−A線に沿う拡大端面図、第7図は第2図のB−
B線に沿う拡大端面図、第8図はコンデンサ内蔵形圧電
共振子の回路図、第9図は従来の圧電共振子の構造の説
明図である。 1・・・圧電共振子、2・・・コンデンサ基板、3・・
・圧電λλ板、4・・・絶縁基板、C1、C2・・・コ
ンデンサ、E・・・共振子エレメント。 特許出願人  株式会社 村田製作所 第1図 第3図 (a)          (b) 4a    15            40   
1)第6図 第7図
FIG. 1 is an exploded perspective view of an embodiment of the present invention, FIG. 2 is a perspective view thereof, FIG. 3(a) is a plan view of a capacitor board, and FIG.
FIG. 4(b) is a bottom view of the piezoelectric substrate, FIG. 4(b) is a bottom view of the piezoelectric substrate, FIG. 5(a) is a plan view of the insulating substrate, and FIG. b) is its bottom view, Fig. 6 is the second
An enlarged end view taken along line A-A in the figure, Figure 7 is B- in Figure 2.
FIG. 8 is an enlarged end view taken along line B, FIG. 8 is a circuit diagram of a piezoelectric resonator with a built-in capacitor, and FIG. 9 is an explanatory diagram of the structure of a conventional piezoelectric resonator. 1... Piezoelectric resonator, 2... Capacitor board, 3...
- Piezoelectric λλ plate, 4... Insulating substrate, C1, C2... Capacitor, E... Resonator element. Patent applicant Murata Manufacturing Co., Ltd. Figure 1 Figure 3 (a) (b) 4a 15 40
1) Figure 6 Figure 7

Claims (1)

【特許請求の範囲】[Claims]  両方の主表面に電極が形成され、コンデンサを構成す
るコンデンサ基板、両方の主表面に電極が形成され、共
振子エレメントを構成する圧電基板、及び少なくとも一
方の主表面に外部接続用の電極が形成された絶縁基板が
積層され、該積層体の外面側には該コンデンサ基板の一
方の主表面に形成された電極及び該絶縁基板の外部接続
用電極が位置するようにされていることを特徴とするコ
ンデンサ内蔵形圧電共振子。
A capacitor substrate with electrodes formed on both main surfaces to form a capacitor, a piezoelectric substrate with electrodes formed on both main surfaces to form a resonator element, and an electrode for external connection formed on at least one main surface. insulating substrates are stacked, and an electrode formed on one main surface of the capacitor substrate and an external connection electrode of the insulating substrate are located on the outer surface of the laminate. A piezoelectric resonator with a built-in capacitor.
JP26199785A 1985-11-21 1985-11-21 Piezoelectric resonator with built-in capacitor Pending JPS62122311A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26199785A JPS62122311A (en) 1985-11-21 1985-11-21 Piezoelectric resonator with built-in capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26199785A JPS62122311A (en) 1985-11-21 1985-11-21 Piezoelectric resonator with built-in capacitor

Publications (1)

Publication Number Publication Date
JPS62122311A true JPS62122311A (en) 1987-06-03

Family

ID=17369577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26199785A Pending JPS62122311A (en) 1985-11-21 1985-11-21 Piezoelectric resonator with built-in capacitor

Country Status (1)

Country Link
JP (1) JPS62122311A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6312926U (en) * 1986-04-07 1988-01-28
JPH01179514A (en) * 1988-01-11 1989-07-17 Toyo Commun Equip Co Ltd Piezoelectric resonator incorporating component of oscillation circuit
JPH0397310A (en) * 1989-09-09 1991-04-23 Murata Mfg Co Ltd Piezoelectric resonance component
JPH03145812A (en) * 1989-11-01 1991-06-21 Murata Mfg Co Ltd Electronic component

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6312926U (en) * 1986-04-07 1988-01-28
JPH01179514A (en) * 1988-01-11 1989-07-17 Toyo Commun Equip Co Ltd Piezoelectric resonator incorporating component of oscillation circuit
JPH0397310A (en) * 1989-09-09 1991-04-23 Murata Mfg Co Ltd Piezoelectric resonance component
JPH03145812A (en) * 1989-11-01 1991-06-21 Murata Mfg Co Ltd Electronic component

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