JPS5846542A - 電界放出型液体金属アルミニウムイオン銃及びその製造方法 - Google Patents
電界放出型液体金属アルミニウムイオン銃及びその製造方法Info
- Publication number
- JPS5846542A JPS5846542A JP56142529A JP14252981A JPS5846542A JP S5846542 A JPS5846542 A JP S5846542A JP 56142529 A JP56142529 A JP 56142529A JP 14252981 A JP14252981 A JP 14252981A JP S5846542 A JPS5846542 A JP S5846542A
- Authority
- JP
- Japan
- Prior art keywords
- needle
- emitter
- boride
- conductive
- ion gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910001338 liquidmetal Inorganic materials 0.000 title claims description 29
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 229910052782 aluminium Inorganic materials 0.000 title claims description 6
- 238000000034 method Methods 0.000 claims abstract description 11
- 238000005498 polishing Methods 0.000 claims abstract description 9
- 229910052751 metal Inorganic materials 0.000 claims description 46
- 239000002184 metal Substances 0.000 claims description 46
- 239000000463 material Substances 0.000 claims description 13
- 238000006243 chemical reaction Methods 0.000 claims description 12
- 239000002131 composite material Substances 0.000 claims description 10
- 238000002844 melting Methods 0.000 claims description 8
- 230000008018 melting Effects 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 5
- 239000011159 matrix material Substances 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000003754 machining Methods 0.000 claims description 3
- 238000009760 electrical discharge machining Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 abstract description 33
- 238000010884 ion-beam technique Methods 0.000 abstract description 16
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 abstract description 5
- 229910033181 TiB2 Inorganic materials 0.000 abstract description 5
- 229910052719 titanium Inorganic materials 0.000 abstract description 5
- 229910052726 zirconium Inorganic materials 0.000 abstract description 5
- 229910007948 ZrB2 Inorganic materials 0.000 abstract description 3
- VWZIXVXBCBBRGP-UHFFFAOYSA-N boron;zirconium Chemical compound B#[Zr]#B VWZIXVXBCBBRGP-UHFFFAOYSA-N 0.000 abstract description 3
- 239000000126 substance Substances 0.000 abstract description 3
- 229910034327 TiC Inorganic materials 0.000 abstract description 2
- 150000001875 compounds Chemical class 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 11
- 230000005684 electric field Effects 0.000 description 6
- 238000000605 extraction Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000002470 thermal conductor Substances 0.000 description 2
- YPSXFMHXRZAGTG-UHFFFAOYSA-N 4-methoxy-2-[2-(5-methoxy-2-nitrosophenyl)ethyl]-1-nitrosobenzene Chemical compound COC1=CC=C(N=O)C(CCC=2C(=CC=C(OC)C=2)N=O)=C1 YPSXFMHXRZAGTG-UHFFFAOYSA-N 0.000 description 1
- 102100021569 Apoptosis regulator Bcl-2 Human genes 0.000 description 1
- 229910019918 CrB2 Inorganic materials 0.000 description 1
- 101000971171 Homo sapiens Apoptosis regulator Bcl-2 Proteins 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 229910010067 TiC2 Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000005539 carbonized material Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000012429 reaction media Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56142529A JPS5846542A (ja) | 1981-09-11 | 1981-09-11 | 電界放出型液体金属アルミニウムイオン銃及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56142529A JPS5846542A (ja) | 1981-09-11 | 1981-09-11 | 電界放出型液体金属アルミニウムイオン銃及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5846542A true JPS5846542A (ja) | 1983-03-18 |
| JPH026184B2 JPH026184B2 (enrdf_load_stackoverflow) | 1990-02-07 |
Family
ID=15317473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56142529A Granted JPS5846542A (ja) | 1981-09-11 | 1981-09-11 | 電界放出型液体金属アルミニウムイオン銃及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5846542A (enrdf_load_stackoverflow) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6059623A (ja) * | 1983-09-10 | 1985-04-06 | Anelva Corp | 液体金属イオン源 |
| JPS60155647A (ja) * | 1984-01-24 | 1985-08-15 | Riken Corp | ピストンリング |
| JPS61237328A (ja) * | 1985-04-11 | 1986-10-22 | Denki Kagaku Kogyo Kk | 液体硼素含有合金イオン源構造体 |
| JPS6383264A (ja) * | 1986-09-26 | 1988-04-13 | Anelva Corp | 液体金属イオン源 |
| JPH03233826A (ja) * | 1989-10-25 | 1991-10-17 | Denki Kagaku Kogyo Kk | 電界放出型イオン源 |
| US6527879B2 (en) | 1999-06-25 | 2003-03-04 | Hitachi Metals Ltd. | Self-lubricating piston ring material for internal combustion engine and piston ring |
| EP1622184A3 (en) * | 2004-07-28 | 2007-07-18 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Emitter for an ion source and method of producing same |
| WO2021015039A1 (ja) * | 2019-07-23 | 2021-01-28 | 株式会社Ｐａｒａｍ | 電子銃装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57132632A (en) * | 1981-02-09 | 1982-08-17 | Hitachi Ltd | Ion source |
-
1981
- 1981-09-11 JP JP56142529A patent/JPS5846542A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57132632A (en) * | 1981-02-09 | 1982-08-17 | Hitachi Ltd | Ion source |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6059623A (ja) * | 1983-09-10 | 1985-04-06 | Anelva Corp | 液体金属イオン源 |
| JPS60155647A (ja) * | 1984-01-24 | 1985-08-15 | Riken Corp | ピストンリング |
| JPS61237328A (ja) * | 1985-04-11 | 1986-10-22 | Denki Kagaku Kogyo Kk | 液体硼素含有合金イオン源構造体 |
| JPS6383264A (ja) * | 1986-09-26 | 1988-04-13 | Anelva Corp | 液体金属イオン源 |
| JPH03233826A (ja) * | 1989-10-25 | 1991-10-17 | Denki Kagaku Kogyo Kk | 電界放出型イオン源 |
| US6527879B2 (en) | 1999-06-25 | 2003-03-04 | Hitachi Metals Ltd. | Self-lubricating piston ring material for internal combustion engine and piston ring |
| EP1622184A3 (en) * | 2004-07-28 | 2007-07-18 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Emitter for an ion source and method of producing same |
| US7696489B2 (en) | 2005-07-27 | 2010-04-13 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Emitter for an ion source and method of producing same |
| WO2021015039A1 (ja) * | 2019-07-23 | 2021-01-28 | 株式会社Ｐａｒａｍ | 電子銃装置 |
| US11295925B2 (en) | 2019-07-23 | 2022-04-05 | Param Corporation | Electron gun device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH026184B2 (enrdf_load_stackoverflow) | 1990-02-07 |
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