JPS5846153U - Semiconductor single crystal alignment equipment - Google Patents
Semiconductor single crystal alignment equipmentInfo
- Publication number
- JPS5846153U JPS5846153U JP1981142952U JP14295281U JPS5846153U JP S5846153 U JPS5846153 U JP S5846153U JP 1981142952 U JP1981142952 U JP 1981142952U JP 14295281 U JP14295281 U JP 14295281U JP S5846153 U JPS5846153 U JP S5846153U
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- plane
- light
- screen
- reflecting mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の結晶軸検出装置の概略図、第２図およ
び第３図は前記装置の要部を示す図である。
図において１はレーザ光線、２はレーザ光源、３はＣｄ
Ｔｅの単結晶、４は設置台、５は見開面、６はビームエ
キスパンダー、７は反射鏡、８はスクリーン、９は中心
軸、１０は中心部、１１は傾斜面、１２は切断面、１３
． １４． １５． １６゜１７．１８は基準線、１９
は光源を示す。FIG. 1 is a schematic diagram of the crystal axis detection device of the present invention, and FIGS. 2 and 3 are diagrams showing the main parts of the device. In the figure, 1 is a laser beam, 2 is a laser light source, and 3 is a Cd
Single crystal of Te, 4 is an installation stand, 5 is an open plane, 6 is a beam expander, 7 is a reflector, 8 is a screen, 9 is a central axis, 10 is a central part, 11 is an inclined surface, 12 is a cut surface, 13
．． 14. 15. 16°17.18 is the reference line, 19
indicates a light source.
Claims (1)
可能は設置台と、前記見開面に平行光線を照射する光源
と、前記光源の光軸に対して垂直な面から見開面と該結
晶を切断すべき所望の切断面とのなす角度を差し引いた
角度の傾斜面を有する反射鏡と該反射鏡より反射した平
行光線を投影するスクリーンとからなり、前記設置台に
見開面を設けた結晶を設置したのち、該見開面に光源よ
り平行光線を照射し、前記見開面より反射した光を反射
鏡に当てて反射せしめてクリーン上に映し出し、該スク
リーン上にあらかじめ設けた基準線からの位置ずれによ
り切断すべき結晶面からの位置ずれを検知することを特
徴とする半導体の結晶 ′軸検出装置。A mounting table movable in a three-dimensional direction on which a semiconductor crystal having a facing plane is installed; a light source that irradiates the facing plane with a parallel beam of light; It consists of a reflecting mirror having an inclined surface with an angle subtracting the angle formed by the desired cutting plane to cut the crystal, and a screen that projects parallel rays reflected from the reflecting mirror, and a wide-open plane is placed on the installation stand. After installing the prepared crystal, parallel light is irradiated from a light source onto the double-page spread, and the light reflected from the double-page spread is applied to a reflecting mirror and reflected onto a screen, and the crystal that has been prepared in advance on the screen is 1. A semiconductor crystal 'axis detection device, which detects a positional deviation from a crystal plane to be cut based on a positional deviation from a reference line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981142952U JPS5846153U (en) | 1981-09-25 | 1981-09-25 | Semiconductor single crystal alignment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981142952U JPS5846153U (en) | 1981-09-25 | 1981-09-25 | Semiconductor single crystal alignment equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5846153U true JPS5846153U (en) | 1983-03-28 |
| JPS643064Y2 JPS643064Y2 (en) | 1989-01-26 |
Family
ID=29935963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981142952U Granted JPS5846153U (en) | 1981-09-25 | 1981-09-25 | Semiconductor single crystal alignment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5846153U (en) |
-
1981
- 1981-09-25 JP JP1981142952U patent/JPS5846153U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS643064Y2 (en) | 1989-01-26 |
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