JPS5845687B2 - 移動距離及び速度の測定装置 - Google Patents

移動距離及び速度の測定装置

Info

Publication number
JPS5845687B2
JPS5845687B2 JP451175A JP451175A JPS5845687B2 JP S5845687 B2 JPS5845687 B2 JP S5845687B2 JP 451175 A JP451175 A JP 451175A JP 451175 A JP451175 A JP 451175A JP S5845687 B2 JPS5845687 B2 JP S5845687B2
Authority
JP
Japan
Prior art keywords
grating
diffraction
light beams
light
gratings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP451175A
Other languages
English (en)
Japanese (ja)
Other versions
JPS50104037A (xx
Inventor
ウイルヘルム イエルク
カウル デイートマール
ホツク フロムント
エルベ ワルター
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ernst Leitz Wetzlar GmbH
Original Assignee
Ernst Leitz Wetzlar GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE2401476A external-priority patent/DE2401476A1/de
Priority claimed from DE2431551A external-priority patent/DE2431551C2/de
Application filed by Ernst Leitz Wetzlar GmbH filed Critical Ernst Leitz Wetzlar GmbH
Publication of JPS50104037A publication Critical patent/JPS50104037A/ja
Publication of JPS5845687B2 publication Critical patent/JPS5845687B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4272—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having plural diffractive elements positioned sequentially along the optical path
    • G02B27/4277—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having plural diffractive elements positioned sequentially along the optical path being separated by an air space
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Transform (AREA)
JP451175A 1974-01-12 1975-01-08 移動距離及び速度の測定装置 Expired JPS5845687B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2401476A DE2401476A1 (de) 1974-01-12 1974-01-12 Anordnung zur modulation von licht
DE2431551A DE2431551C2 (de) 1974-07-01 1974-07-01 Anordnung zur Messung von Bewegungen und Geschwindigkeiten

Publications (2)

Publication Number Publication Date
JPS50104037A JPS50104037A (xx) 1975-08-16
JPS5845687B2 true JPS5845687B2 (ja) 1983-10-12

Family

ID=25766457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP451175A Expired JPS5845687B2 (ja) 1974-01-12 1975-01-08 移動距離及び速度の測定装置

Country Status (5)

Country Link
JP (1) JPS5845687B2 (xx)
CH (1) CH601799A5 (xx)
FR (1) FR2257915B1 (xx)
GB (1) GB1474049A (xx)
NL (1) NL7500316A (xx)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57157118A (en) * 1981-03-24 1982-09-28 Mitsutoyo Mfg Co Ltd Photoelectric type displacement detecting device
GB8320629D0 (en) * 1983-07-30 1983-09-01 Pa Consulting Services Displacement measuring apparatus
US4584484A (en) * 1983-10-03 1986-04-22 Hutchin Richard A Microscope for producing high resolution images without precision optics
GB8413955D0 (en) * 1984-05-31 1984-07-04 Pa Consulting Services Displacement measuring apparatus
DE3706277C2 (de) * 1986-02-28 1995-04-27 Canon Kk Drehungsmeßgeber
DE3633574A1 (de) * 1986-10-02 1988-04-14 Heidenhain Gmbh Dr Johannes Lichtelektrische winkelmesseinrichtung
GB8729246D0 (en) * 1987-12-15 1988-01-27 Renishaw Plc Opto-electronic scale-reading apparatus
FR2639460B1 (fr) * 1988-11-21 1993-05-21 Ricoh Kk Appareil d'enregistrement/reproduction optique
GB2239088B (en) * 1989-11-24 1994-05-25 Ricoh Kk Optical movement measuring method and apparatus
ATE100194T1 (de) * 1990-10-20 1994-01-15 Heidenhain Gmbh Dr Johannes Interferentielle messeinrichtung fuer wenigstens eine messrichtung.
AT395914B (de) * 1991-04-18 1993-04-26 Rsf Elektronik Gmbh Photoelektrische positionsmesseinrichtung
US5486923A (en) * 1992-05-05 1996-01-23 Microe Apparatus for detecting relative movement wherein a detecting means is positioned in the region of natural interference
ATE182677T1 (de) * 1992-05-05 1999-08-15 Microe Inc Apparat zum detektieren einer relativen bewegung
JPH0727543A (ja) * 1993-07-12 1995-01-27 Canon Inc 光学式変位センサー
JP3028716B2 (ja) * 1993-09-29 2000-04-04 キヤノン株式会社 光学式変位センサ
GB9424969D0 (en) * 1994-12-10 1995-02-08 Renishaw Plc Opto-electronic scale reading apparatus
GB0004120D0 (en) 2000-02-23 2000-04-12 Renishaw Plc Opto-electronic scale reading apparatus
CN110530283A (zh) * 2018-05-23 2019-12-03 宁波舜宇光电信息有限公司 结构光投射装置以及其制造方法

Also Published As

Publication number Publication date
GB1474049A (en) 1977-05-18
FR2257915B1 (xx) 1979-07-20
CH601799A5 (xx) 1978-07-14
JPS50104037A (xx) 1975-08-16
FR2257915A1 (xx) 1975-08-08
NL7500316A (nl) 1975-07-15

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