JPS5843681B2 - ヒヨウメンジヨウタイカンソクソウチ - Google Patents

ヒヨウメンジヨウタイカンソクソウチ

Info

Publication number
JPS5843681B2
JPS5843681B2 JP47060096A JP6009672A JPS5843681B2 JP S5843681 B2 JPS5843681 B2 JP S5843681B2 JP 47060096 A JP47060096 A JP 47060096A JP 6009672 A JP6009672 A JP 6009672A JP S5843681 B2 JPS5843681 B2 JP S5843681B2
Authority
JP
Japan
Prior art keywords
light beam
dimensional
light
photoelectric conversion
observation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47060096A
Other languages
English (en)
Japanese (ja)
Other versions
JPS4931345A (enrdf_load_stackoverflow
Inventor
隆彦 稲荷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP47060096A priority Critical patent/JPS5843681B2/ja
Publication of JPS4931345A publication Critical patent/JPS4931345A/ja
Publication of JPS5843681B2 publication Critical patent/JPS5843681B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP47060096A 1972-06-16 1972-06-16 ヒヨウメンジヨウタイカンソクソウチ Expired JPS5843681B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47060096A JPS5843681B2 (ja) 1972-06-16 1972-06-16 ヒヨウメンジヨウタイカンソクソウチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47060096A JPS5843681B2 (ja) 1972-06-16 1972-06-16 ヒヨウメンジヨウタイカンソクソウチ

Publications (2)

Publication Number Publication Date
JPS4931345A JPS4931345A (enrdf_load_stackoverflow) 1974-03-20
JPS5843681B2 true JPS5843681B2 (ja) 1983-09-28

Family

ID=13132207

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47060096A Expired JPS5843681B2 (ja) 1972-06-16 1972-06-16 ヒヨウメンジヨウタイカンソクソウチ

Country Status (1)

Country Link
JP (1) JPS5843681B2 (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3037622C2 (de) * 1980-10-04 1987-02-26 Theodor Prof. Dr.-Ing. 1000 Berlin Gast Einrichtung zur Bestimmung der Oberflächengüte
DE3232885A1 (de) * 1982-09-04 1984-03-08 Robert Bosch Gmbh, 7000 Stuttgart Verfahren zur automatischen pruefung von oberflaechen
JPS59151008A (ja) * 1983-02-18 1984-08-29 Koyo Seiko Co Ltd 円形物の外観検査方法
JPH03103756A (ja) * 1989-09-19 1991-04-30 Sumitomo Heavy Ind Ltd 成形品の外観検査装置
JPH03105238A (ja) * 1989-09-20 1991-05-02 Sumitomo Heavy Ind Ltd 成形品不良判別装置
JPH04248450A (ja) * 1991-02-04 1992-09-03 Sumitomo Heavy Ind Ltd 成形品の外観検査装置
JP5036644B2 (ja) * 2008-07-03 2012-09-26 住友重機械工業株式会社 表面検査方法、及びびびりマーク検査装置
JP6457574B2 (ja) * 2017-03-15 2019-01-23 ファナック株式会社 計測装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3667846A (en) * 1969-07-28 1972-06-06 Charles Nater Optical surface inspection apparatus

Also Published As

Publication number Publication date
JPS4931345A (enrdf_load_stackoverflow) 1974-03-20

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