JPS5841982B2 - ヒカリハンシヤニヨル コウグマモウ チツピングノ インプロセスケンシユツホウホウ - Google Patents

ヒカリハンシヤニヨル コウグマモウ チツピングノ インプロセスケンシユツホウホウ

Info

Publication number
JPS5841982B2
JPS5841982B2 JP5951174A JP5951174A JPS5841982B2 JP S5841982 B2 JPS5841982 B2 JP S5841982B2 JP 5951174 A JP5951174 A JP 5951174A JP 5951174 A JP5951174 A JP 5951174A JP S5841982 B2 JPS5841982 B2 JP S5841982B2
Authority
JP
Japan
Prior art keywords
cutting
tool
light
niyor
kougumamou
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5951174A
Other languages
English (en)
Japanese (ja)
Other versions
JPS50155250A (enrdf_load_stackoverflow
Inventor
和雄 山崎
信重 沢井
秀彦 竹山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP5951174A priority Critical patent/JPS5841982B2/ja
Publication of JPS50155250A publication Critical patent/JPS50155250A/ja
Publication of JPS5841982B2 publication Critical patent/JPS5841982B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
JP5951174A 1974-05-27 1974-05-27 ヒカリハンシヤニヨル コウグマモウ チツピングノ インプロセスケンシユツホウホウ Expired JPS5841982B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5951174A JPS5841982B2 (ja) 1974-05-27 1974-05-27 ヒカリハンシヤニヨル コウグマモウ チツピングノ インプロセスケンシユツホウホウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5951174A JPS5841982B2 (ja) 1974-05-27 1974-05-27 ヒカリハンシヤニヨル コウグマモウ チツピングノ インプロセスケンシユツホウホウ

Publications (2)

Publication Number Publication Date
JPS50155250A JPS50155250A (enrdf_load_stackoverflow) 1975-12-15
JPS5841982B2 true JPS5841982B2 (ja) 1983-09-16

Family

ID=13115345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5951174A Expired JPS5841982B2 (ja) 1974-05-27 1974-05-27 ヒカリハンシヤニヨル コウグマモウ チツピングノ インプロセスケンシユツホウホウ

Country Status (1)

Country Link
JP (1) JPS5841982B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020153730A (ja) * 2019-03-19 2020-09-24 株式会社豊田中央研究所 摩耗量計測装置および摩耗量計測方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3137756A (en) * 1957-10-31 1964-06-16 Zeiss Carl Device for determining the dimensions of an object
JPS511005Y2 (enrdf_load_stackoverflow) * 1971-05-24 1976-01-13
JPS4855766A (enrdf_load_stackoverflow) * 1971-11-10 1973-08-04

Also Published As

Publication number Publication date
JPS50155250A (enrdf_load_stackoverflow) 1975-12-15

Similar Documents

Publication Publication Date Title
US6887126B2 (en) Wafer thickness control during backside grind
US4086496A (en) Method for optically measuring a cant to locate the narrowest flat side and its boundaries and manufacturing lumber therefrom
US4031368A (en) Adaptive control of cutting machining operations
KR102257259B1 (ko) 두께 계측 장치
ES433716A1 (es) Perfeccionamientos en dispositivos para determinar el per- fil de superficies.
US5031360A (en) Broken blade detector for semiconductor die saws
US4551017A (en) Laser doppler velocimeter for measuring torsional vibration
TW201812248A (zh) 測量裝置
DE3485002D1 (de) Kalibrierungsmessgeraet fuer einen computergesteuerten linsengenerator oder dergleichen.
US3695771A (en) Method and apparatus for inspecting surfaces
JP6624512B2 (ja) ウェーハ研削方法及びウェーハ研削装置
JPS5841982B2 (ja) ヒカリハンシヤニヨル コウグマモウ チツピングノ インプロセスケンシユツホウホウ
JPH04232407A (ja) 工具の検査方法
US4186310A (en) Automatic wane detector
JP2786512B2 (ja) 工具異常検出方法
SE8008297L (sv) Sagmaskin med spananordning for bakar samt forfarande for drift av sadan sagmaskin
US4072425A (en) Method of indicating the relative roughness of a surface
JPH04335133A (ja) 加工面評価範囲の設定装置
JPS59120390A (ja) レ−ザ−加工方法
JPS6295849U (enrdf_load_stackoverflow)
JPS6488302A (en) Position detecting device
JPS5810163B2 (ja) ヒカリハンシヤリヨウ ニ ヨル メン ノ ヘンイソクテイソウチ
JPS6329238A (ja) 板状体の表面欠陥検査方法および装置
GB1156920A (en) Method and apparatus for Determining Surface Quality
SU860958A1 (ru) Способ автоматической оценки износа фрезы при зубофрезеровании по методу обкатки