JPS5839761B2 - Oxygen recycling ozone generator - Google Patents

Description

Detailed Description of the Invention This invention uses oxygen as a raw material gas, allows ozone in ozonized oxygen supplied from an ozone generator to be adsorbed on low-temperature silica gel, and refluxes the oxygen that is not ozonated to the ozone generator. This invention relates to an oxygen recycling ozone generator that efficiently supplies ozone by desorbing ozone adsorbed by a desorbing gas.

FIG. 1 is a circuit diagram showing the configuration of a conventional device. In the figure, 1 is a liquid oxygen container that supplies low-temperature raw material oxygen, 2 is a liquid oxygen evaporative cooler, and 3 is an electrode that is supplied with raw material oxygen and is opposed to it. 4 is a heat exchanger; 5 and 6 are adsorption/desorption containers 5a to 5d, 5a to 6d that house silica gel;
is a solenoid valve, 5a and 5a are solenoid valves for supplying ozonized oxygen,
Reference numerals 5b and 6b refer to oxygen discharge electromagnetic valves 5c that return oxygen in the adsorption/desorption containers 5 and 6 to the ozone generator 3;

6c is a desorption gas supply solenoid valve that supplies desorption gas such as dry air or dry oxygen, 5d and 5d are ozone discharge solenoid valves that discharge ozone desorbed from low-temperature silica gel, and 7 is a desorption gas supply solenoid valve that supplies desorption gas such as dry air or dry oxygen; This is a blower that sucks the oxygen in the container and sends it under pressure to the ozone generator 3.

As shown in FIG. 2, the interiors of the adsorption/desorption containers 5 and 6 are filled with silica gel 5e, and the upper and lower parts are separated by a filter-equipped partition plate 5f.

The structure is as described above, and part of the oxygen supplied from the liquid oxygen container 1 is converted into ozone by the ozone generator 3, and the solenoid valves 5a and 5b are opened. The pressure is supplied to the adsorption/desorption container 5, and the container 5
Ozone is adsorbed to the low temperature silica gel 5e inside.

Figure 3 is a diagram showing the progress of the adsorption process. In the figure, the left end A is the ozonized air supply side (hereinafter referred to as the inlet side), and the right end B is the oxygen discharge side (hereinafter referred to as the outlet side). It shows the ozone per unit volume adsorbed on silica gel, that is, the solid phase ozone concentration.

In addition, the curve group from t1 to tn shows the state of the ozone concentration of the silica gel in the container 5 as it progresses from time t to tn, and as shown in the figure, the ozone adsorption of the silica gel starts to saturate from the inlet side. As the adsorption process progresses, saturation progresses to the silica gel on the outlet side.

If this progresses further, ozone will be included in the oxygen discharged from the outlet side, at which point the adsorption process ends.

Next, by closing the solenoid valve 5a, the pressure inside the container 5 is lowered, and when the pressure has decreased to a predetermined level, the solenoid valve 5a is closed.
b, open the solenoid valves 5c and 5d, and transfer the desorbed gas to the container 5.
and enters the desorption process.

Figure 4 is a diagram showing the progress of the desorption process. Similarly, the solid phase ozone concentration of silica gel is shown on the vertical axis.

Therefore, the solid phase ozone concentration t of the silica gel in the container 5 at the start of the desorption process.

corresponds to tn in Figure 3, and as the desorption process progresses, the amount of ozone adsorbed on silica gel decreases, so
The amount of ozone in the unit desorbed gas discharged from the outlet side, that is, the gas phase ozone concentration decreases.

FIG. 5 is a diagram showing this state.

In actual adsorption and desorption, when one adsorption/desorption container 5 is used for the adsorption process, the other adsorption/desorption container 6 is used for the desorption process,
As adsorption and desorption effects decrease, adsorption and desorption are alternately used.

As a result, the ozone concentration discharged from the ozone discharge electromagnetic valve 5d or 6d repeats the ozone concentration curve shown in Fig. 6, which causes large fluctuations in ozone concentration, which is not desirable from the standpoint of ozone users. It was not a condition.

The present invention has been made in view of the above points, and it is an object of the present invention to provide an oxygen recycling ozone generator in which fluctuations in the ozone concentration in the emitted gas are minimized.

An embodiment of the present invention will be described below with reference to FIGS. 6 to 10.

In the figure, the same reference numerals as in FIGS. 1 to 5 indicate the same or corresponding parts, 5g.

6g is a desorption gas supply solenoid valve provided at the bottom of the adsorption/desorption containers 5, 6; 5h, 6h is an ozone discharge solenoid valve provided at an intermediate portion between the top and bottom of the containers 5, 6; 8a;
Reference numeral 8b denotes a regulating valve that regulates the supply amount of desorption gas.

In addition, the ozone discharge electromagnetic valves 5h and 6h are the containers 5,
6, the filter-equipped partition plate 5f, SL,
The mixing chamber 5f3 is provided in communication with the mixing chamber 5f3 formed by the mixing chamber 5f3.

Further, the desorption gas passes through the regulating valves 8a and 8b and is supplied from the solenoid valves 5c and 5g or the solenoid valves 6c and 6g of the adsorption/desorption container 5 or 6.

With the above structure, the adsorption process is exactly the same as the conventional one shown in FIG. Since it is exactly the same as the conventional one shown in FIG. 3, the explanation will be omitted.

Next, the desorption process is different from the conventional one, and the adsorption/desorption container 5 or 6 is
The upper solenoid valve 5c or 6c and the lower solenoid valve 5
g or 6g is opened to supply desorption gas from the upper and lower parts, and the solenoid valve 5h or 6 in the middle of the container 5 or 6 is opened.
Fig. 9 shows how the solid phase ozone concentration of the silica gel in the container 5 or 6 changes during the desorption process.

In the figure, A is the ozonized oxygen supply port during the adsorption process;
B indicates the position of the oxygen outlet, and C indicates the position of the ozone outlet during the desorption process.

Solid phase ozone concentration t of silica gel at the start of the desorption process.

corresponds to the solid phase ozone concentration of silica gel at the end of the adsorption process, and changes from t1 to tn as desorption progresses.

The change in solid phase ozone concentration between B and C matches that shown in Figure 4, but between A and C, the supply side of the desorption gas is opposite to the conventional one, so it is different from the conventional one. , becomes discontinuous at point C.

Further, the gas phase ozone concentration at the ozone outlet increases as the desorption process progresses for the ozone supplied from the A side, and decreases for the ozone supplied from the B side.

Regarding the gas phase ozone concentration (hereinafter simply referred to as ozone concentration) at the ozone outlet, what is supplied from the A side and what is supplied from the B side are mixed in the mixing chamber 5f3, and the mixture is discharged from the ozone outlet.

As a result, the ozone concentration is averaged and gradually decreases from the start of the desorption process, but the fluctuation range becomes smaller as shown by the P1 curve in FIG. 10.

Although the above description has been made assuming that the supply amount of the desorption gas is the same as in the conventional case, by adjusting the supply amount of the desorption gas, the emitted ozone concentration can be adjusted.

That is, by reducing the amount of desorption gas supplied per unit time using the regulating valve 8a, the emitted ozone concentration can be increased, resulting in P2. As shown by the P3,44 curve, the variation in ozone concentration can be further reduced.

FIG. 11 shows another embodiment of the present invention, in which a plurality of ozone discharge ports are provided instead of being limited to the central portion, which is effective in reducing the range of variation in the discharged ozone concentration.

The above explanations are based on the case where two adsorption/desorption containers are provided, but as shown in Fig. 12, the number of adsorption/desorption containers connected in parallel can be increased to increase the cycle of adsorption and desorption processes. By staggering the measurements, it is possible to further reduce the fluctuation range of the emitted ozone concentration.

As described above, in the desorption process, the present invention supplies desorption gas from both the ozonized oxygen supply side and the oxygen discharge side in the adsorption process, and exhausts the desorbed ozone from the intermediate part. The emitted ozone concentration during the process is averaged, and the fluctuation range of ozone concentration can be reduced.

[Brief explanation of drawings]

Figures 1 to 5 show a conventional device. Figure 1 is a circuit diagram showing the configuration, Figure 2 is a cross-sectional view of the adsorption/desorption container, and Figure 3 is a diagram of ozone concentration characteristics of silica gel during the adsorption process. , FIG. 4 is a characteristic diagram of the ozone concentration of silica gel during the desorption process, and FIG. 5 is a characteristic diagram of the emitted ozone concentration during the desorption process. Figures 6 to 10 show an embodiment of this invention.
Fig. 6 is a circuit diagram showing the configuration, Fig. 7 is a cross-sectional view of the adsorption/desorption container, Fig. 8 is a characteristic diagram of ozone concentration of silica gel in the adsorption process, Fig. 9 is a characteristic diagram of ozone concentration of silica gel in the desorption process, FIG. 10 is a characteristic diagram of emitted ozone concentration during the desorption process. FIG. 11 is a sectional view of an adsorption/desorption container showing another embodiment, the first
FIG. 2 is a circuit diagram showing the configuration of still another embodiment. In the figures, the same reference numerals indicate the same or corresponding parts, 5
, 6 is an adsorption/desorption container, 5a, 6a are solenoid valves for supplying ozonized oxygen, 5b, 6b are solenoid valves for discharging oxygen, 5C25g, 6
c, 5g are solenoid valves for supplying desorbed gas; 5h, 6h are solenoid valves for ozone discharge; 8a; 8b is a regulating valve.

Claims (1)

[Claims] 1. Oxygen recycling equipped with an adsorption/desorption container that is supplied with ozonized oxygen and adsorbs ozone in the ozonized oxygen onto low-temperature silica gel, and is also supplied with desorption gas and desorbs the adsorbed ozone. In the ozone generator, an ozonized oxygen supply port is provided on one side of the adsorption/desorption container, and an oxygen discharge port for discharging oxygen in the container is provided on the other side, and both the ozonized oxygen supply port side and the oxygen discharge port side are provided. The oxygen recycling ozone generator is provided with a desorption gas supply port at the side of the ozonized oxygen supply port and an ozone discharge port for discharging desorbed ozone at an intermediate portion between the ozonized oxygen supply port side and the oxygen discharge port side. 2. The oxygen recycling ozone generator according to claim 1, wherein the desorption gas supply port is provided with an adjustment device for adjusting the supply amount of the desorption gas.