JPS5837982A - レ−ザ発振器 - Google Patents

レ−ザ発振器

Info

Publication number
JPS5837982A
JPS5837982A JP13644081A JP13644081A JPS5837982A JP S5837982 A JPS5837982 A JP S5837982A JP 13644081 A JP13644081 A JP 13644081A JP 13644081 A JP13644081 A JP 13644081A JP S5837982 A JPS5837982 A JP S5837982A
Authority
JP
Japan
Prior art keywords
discharge tube
discharge
excitation
laser
efficiency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13644081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6328518B2 (enrdf_load_stackoverflow
Inventor
Tetsuo Hosokawa
哲夫 細川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP13644081A priority Critical patent/JPS5837982A/ja
Publication of JPS5837982A publication Critical patent/JPS5837982A/ja
Publication of JPS6328518B2 publication Critical patent/JPS6328518B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/0915Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light
    • H01S3/092Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP13644081A 1981-08-31 1981-08-31 レ−ザ発振器 Granted JPS5837982A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13644081A JPS5837982A (ja) 1981-08-31 1981-08-31 レ−ザ発振器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13644081A JPS5837982A (ja) 1981-08-31 1981-08-31 レ−ザ発振器

Publications (2)

Publication Number Publication Date
JPS5837982A true JPS5837982A (ja) 1983-03-05
JPS6328518B2 JPS6328518B2 (enrdf_load_stackoverflow) 1988-06-08

Family

ID=15175165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13644081A Granted JPS5837982A (ja) 1981-08-31 1981-08-31 レ−ザ発振器

Country Status (1)

Country Link
JP (1) JPS5837982A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6328518B2 (enrdf_load_stackoverflow) 1988-06-08

Similar Documents

Publication Publication Date Title
US4627063A (en) Laser oscillator
JP3297446B2 (ja) ストロボ装置
JP3552979B2 (ja) ArFエキシマレーザ装置
JPS5837982A (ja) レ−ザ発振器
CA2333804A1 (en) Operating method for a discharge lamp having at least one dielectrically impeded electrode
JP3167353B2 (ja) 閃光発光装置
JP2002118311A (ja) 露光用ArF、KrFエキシマレーザ装置及びフッ素レーザ装置
JPH0513185A (ja) 放電灯点灯装置
JP3157518B2 (ja) フラツシユランプ駆動電源
JPS62249493A (ja) 自動予備電離エキシマレ−ザ装置
JP2001267666A (ja) ArFエキシマレーザ装置、KrFエキシマレーザ装置及びフッ素レーザ装置
JPS6311796B2 (enrdf_load_stackoverflow)
JP2600747B2 (ja) レーザ装置
JPH0561789B2 (enrdf_load_stackoverflow)
JPS6041277A (ja) レ−ザ発振器
JPH01114088A (ja) レーザ装置
JP2584577Y2 (ja) ストロボ装置
JPH01241881A (ja) パルス発振レーザー電源装置
JP2002151768A (ja) 露光用フッ素レーザ装置
JP2603294Y2 (ja) 無電極放電灯点灯装置
JP2847541B2 (ja) パルス固体レーザ装置
JPH07183596A (ja) フラッシュランプ用トリガ装置
JPS6028154B2 (ja) レ−ザ発振装置
JPS61251181A (ja) レ−ザ励起用ランプ
JPS62152189A (ja) ガスレ−ザ発振装置